Transistors comprising an electrolyte, semiconductor devices, electronic systems, and related methods

Patent metadata

Field	Value
Publication number	US-11257962-B2
Application number	US-201916401844-A
Country	US
Kind code	B2
Filing date	May 2, 2019
Priority date	May 2, 2019
Publication date	Feb 22, 2022
Grant date	Feb 22, 2022

Abstract

A transistor comprises a channel region between a source region and a drain region, a dielectric material adjacent to the channel region, an electrode adjacent to the dielectric material, and an electrolyte between the dielectric material and the electrode. Related semiconductor devices comprising at least one transistors, related electronic systems, and related methods are also disclosed.

First claim

What is claimed is:

1. A transistor, comprising:
a channel region between a source region and a drain region, wherein each of the channel region, the source region, and the drain region is directly overlying and contacting a semiconductor base material, wherein surfaces of the channel region, the source region, and the drain region are in contact with the base material and coplanar with each other;
a dielectric material overlying and in contact with the channel region, the dielectric material having a dielectric constant greater than about 5.0; and
an electrolyte between the dielectric material and an electrode, wherein the electrolyte directly contacts the dielectric material and the electrode, the electrolyte comprising cations configured to move between an interface between the dielectric material and the electrolyte and an interface between the electrode and the electrolyte responsive to application of a voltage to the electrode, the dielectric material not contacting the electrode and spaced from the electrode by the electrolyte, the channel region not contacting the electrolyte and spaced from the electrolyte by the dielectric material, wherein sidewalls of the electrolyte are coplanar with sidewalls of the dielectric material and sidewalls of the electrode.

2. The transistor of claim 1 , wherein the electrolyte comprises lithium ions.

3. The transistor of claim 1 , wherein the electrolyte comprises cobalt.

4. The transistor of claim 1 , wherein the electrolyte comprises cobalt crown ether phthalocyanine.

5. The transistor of claim 1 , wherein the electrolyte has a thickness within a range from about 4 Å to about 10 Å.

6. The transistor of claim 1 , wherein the electrolyte is located on opposing sides of the channel region, the channel region and the dielectric material laterally between portions of the electrolyte.

7. The transistor of claim 1 , wherein the electrolyte substantially surrounds the dielectric material.

8. An electronic system, comprising:
an input device;
an output device;
at least one processor device operably coupled to the at least one input device and the at least one output device; and
a semiconductor device operably coupled to the at least one processor device, the semiconductor device comprising:
at least one vertical transistor vertically extending above a base material, the at least one vertical transistor comprising a channel region between a source region and a drain region, wherein the channel region is vertically oriented with respect to a major surface of the base material, the channel region comprising a laterally central portion of the at least one vertical transistor;
a dielectric material laterally adjacent to and surrounding at least the channel region and contacting the source region and the drain region;
an electrolyte laterally adjacent to and surrounding the dielectric material, the electrolyte having a greater vertical dimension than a lateral dimension, the dielectric material directly contacting laterally opposing sides of each of the source region, the drain region, and the channel region; and
an electrode laterally adjacent to and surrounding the electrolyte, the electrolyte directly between and contacting the dielectric material and the electrode, the dielectric material spaced from the electrode by the electrolyte.

9. The electronic system of claim 8 , wherein the electrolyte comprises a crown ether.

10. The electronic system of claim 8 , wherein the electrolyte comprises lithium ions.

11. A semiconductor device comprising at least one transistor, the at least one transistor consisting of:
a channel region between a source and a drain, each of the channel region, the source, and the drain directly overlying and contacting a semiconductor base material;
a dielectric material directly contacting the channel region;
an electrolyte comprising a crown ether and directly contacting the dielectric material, the dielectric material spacing the electrolyte from the channel region; and
an electrode directly contacting the electrolyte, the dielectric material not contacting the electrode and spaced from the electrode by the electrolyte, the dielectric material exhibiting a band gap greater than about 4.0 eV, and the channel region not contacting the electrolyte and spaced from the electrolyte by the dielectric material.

12. The semiconductor device of claim 11 , wherein the channel region comprises a two-dimensional crystalline material.

13. A method of forming a semiconductor device, the method comprising:
forming a channel region between a source region and a drain region directly overlying and in contact with a semiconductor base material, surfaces of the channel region, the source region, and the drain region in contact with the base material and coplanar with each other;
forming a dielectric material having a dielectric constant greater than about 5.0, the dielectric material overlying and in contact with the channel region;
forming an electrolyte adjacent to the dielectric material; and
forming an electrode adjacent to the electrolyte and spaced from the dielectric material by the electrolyte, the electrolyte comprising cations configured to move between an interface between the dielectric material and the electrolyte and an interface between the electrode and the electrolyte responsive to application of a voltage to the electrode, the electrolyte directly contacting the dielectric material and the electrode, the dielectric material not contacting the electrode and spaced from the electrode by the electrolyte, the channel region not contacting the electrolyte and spaced from the electrolyte by the dielectric material, sidewalls of the electrolyte coplanar with sidewalls of the dielectric material and sidewalls of the electrode.

14. The method of claim 13 , wherein forming an electrolyte comprises forming the electrolyte spaced from the channel region by the dielectric material.

15. The method of claim 13 , wherein forming a dielectric material comprises forming a dielectric material having a band gap greater than about 4.0 eV.

16. A method of operating a semiconductor device, the method comprising:
applying a voltage to an electrode of a transistor comprising:
a channel region between a source region and a drain region, wherein each of the channel region, the source region, and the drain region is directly overlying and contacting a semiconductor base material, wherein surfaces of the channel region, the source region, and the drain region are coplanar with each other;
a dielectric material overlying and in contact with the channel region, the dielectric material having a dielectric constant greater than about 5.0; and
an electrolyte directly between the dielectric material and an electrode, wherein the electrolyte directly contacts the dielectric material and the electrode, the electrolyte comprising cations configured to move between an interface between the dielectric material and the electrolyte and an interface between the electrode and the electrolyte responsive to application of a voltage to the electrode, the dielectric material not contacting the electrode and spaced from the electrode by the electrolyte, the channel region not contacting the electrolyte and spaced from the electrolyte by the dielectric material, wherein sidewalls of the electrolyte are coplanar with sidewalls of the dielectric material and sidewalls of the electrode,

wherein applying the voltage moves the cations to one of the interface between the electrode and the electrolyte or the interface between the dielectric material and the electrolyte; and
de

Assignees

• Micron Technology Inc

Inventors

• Gao Yunfei
• Karda Kamal M
• Kramer Stephen J
• Sandhu Gurtej S
• Pandey Sumeet C
• Liu Haitao

Classifications

• H10D62/83

  being Group IV materials, e.g. B-doped Si or undoped Ge · CPC title

• H10D30/6758

  characterised by the insulating substrates · CPC title

• H10D30/6733

  Multi-gate TFTs · CPC title

• H10D30/6728

  Vertical TFTs · CPC title

• H10D30/60

  Insulated-gate field-effect transistors [IGFET] (H10D30/40 takes precedence) · CPC title