Apparatus and method for a scanning probe microscope

Patent metadata

Field	Value
Publication number	US-11237185-B2
Application number	US-201916586239-A
Country	US
Kind code	B2
Filing date	Sep 27, 2019
Priority date	Mar 31, 2017
Publication date	Feb 1, 2022
Grant date	Feb 1, 2022

Abstract

The present application relates to an apparatus for a scanning probe microscope, said apparatus having: (a) at least one first measuring probe having at least one first cantilever, the free end of which has a first measuring tip; (b) at least one first reflective area arranged in the region of the free end of the at least one first cantilever and embodied to reflect at least two light beams in different directions; and (c) at least two first interferometers embodied to use the at least two light beams reflected by the at least one first reflective area to determine the position of the first measuring tip.

First claim

What is claimed is:

1. An apparatus for a scanning probe microscope, having:
a. at least one first measuring probe having at least one first cantilever, a free end of which has a first measuring tip;
b. at least one first reflective area arranged in a region of the free end of the at least one first cantilever and embodied to reflect at least two light beams in different directions, wherein the at least one first reflective area comprises at least one first reflective portion and at least one second reflective portion, and wherein the first reflective portion and the second reflective portion are not arranged in a plane; and
c. at least two first interferometers embodied to use the at least two light beams reflected by the at least one first reflective area to determine a position of the first measuring tip.

2. The apparatus according to claim 1 , wherein the at least one first reflective area is arranged on a side, opposite the first measuring tip, of the at least one first cantilever.

3. The apparatus according to claim 1 , wherein the at least one second reflective portion is arranged tilted by an angle β in relation to the at least one first reflective portion and/or wherein the at least one second reflective portion is rotated through an angle α relative to a longitudinal axis of the cantilever.

4. The apparatus according to claim 1 , further comprising: an objective through which the at least two light beams incident on the at least one reflective area pass.

5. The apparatus according to claim 1 , wherein the at least one first reflective area has a diffractive structure.

6. The apparatus according to claim 5 , wherein the diffractive structure comprises at least one line grating and/or wherein the at least one line grating comprises a blazed grating.

7. The apparatus according to claim 5 , wherein the diffractive structure comprises at least two line gratings arranged rotated in relation to one another.

8. The apparatus according to claim 1 , further comprising: a multi-segment photodiode embodied to detect, from one of the at least two reflected light beams, a tilt of the first measuring tip of the at least one first cantilever relative to the longitudinal axis of the cantilever and/or a twist of the free end of the at least one first cantilever.

9. The apparatus according to claim 1 , further comprising: at least one scanning apparatus embodied to scan the at least one first measuring probe over a sample surface.

10. The apparatus according to claim 9 , wherein the scanning apparatus is further embodied to adapt a lateral spacing between adjacent measuring points to a contour of the sample surface.

11. The apparatus according to claim 1 , wherein the at least one first measuring probe is embodied to facilitate an installation, tilted toward a sample surface, of the at least one first measuring probe in a measuring head of the scanning probe microscope.

12. The apparatus according to claim 1 , further comprising:
a. at least one second measuring probe having at least one second cantilever, the free end of which has a second measuring tip; and
b. wherein the at least one first measuring probe and the at least one second measuring probe are not arranged parallel to one another.

13. The apparatus according to claim 12 , wherein the at least one first measuring probe and the at least one second measuring probe are arranged substantially in antiparallel fashion or substantially rotated by 90° in relation to one another.

14. The apparatus according to claim 12 , further comprising:
a. at least one further measuring probe having at least one further cantilever, a free end of which has a further measuring tip;
b. at least one further reflective area arranged in a region of the free end of the at least one further cantilever and embodied to reflect at least two light beams in different directions; and
c. at least two further interferometers embodied to use the at least two light beams reflected by the at least one further reflective area to determine a position of the further measuring tip.

15. The apparatus according to claim 14 , further comprising an objective through which the at least two light beams incident on the at least one first reflective area, the at least two light beams reflected by the first reflective area, the at least two light beams incident on the at least one second reflective area, the at least two light beams reflected by the second reflective area, the at least two light beams incident on the at least one further reflective area, and the at least two light beams reflected by the further reflective area pass.

16. The apparatus of claim 1 , wherein at least one of the at least one first portion or the at least one second portion of the at least one reflective area is a plane area.

17. A method for examining a sample surface with a scanning probe microscope, the method comprising the steps of:
a. directing at least one first light beam from at least one first interferometer onto at least one first reflective area arranged in the region of a free end of at least one first cantilever, which has a first measuring tip, wherein the at least one first reflective area comprises at least one first reflective portion and at least one second reflective portion, and wherein the first reflective portion and the second reflective portion are not arranged in a plane;
b. directing at least one second light beam from at least one second interferometer onto the at least one first reflective area arranged in the region of the free end of the at least one first cantilever, wherein the at least one first reflective area reflects the at least one first light beam and the at least one second light beam in different directions; and
c. using the at least one first light beam reflected by the at least one first reflective area and the at least one second light beam reflected by the at least one first reflective area for the purposes of examining the sample surface.

18. A non-transitory computer-readable medium storing a computer program comprising instructions which, when they are executed by an apparatus for a scanning probe microscope, the apparatus comprising:
a1. at least one first measuring probe having at least one first cantilever, a free end of which has a first measuring tip,
b1. at least one first reflective area arranged in a region of the free end of the at least one first cantilever and embodied to reflect at least two light beams in different directions, wherein the at least one first reflective area comprises at least one first reflective portion and at least one second reflective portion, and wherein the first reflective portion and the second reflective portion are not arranged in a plane, and
c1. at least two first interferometers embodied to use the at least two light beams reflected by the at least one first reflective area to determine a position of the first measuring tip,
cause the apparatus to perform method steps comprising:
a2. directing at least one first light beam from at least one first interferometer onto the at least one first reflective area arranged in the region of the free end of the at least one first cantilever, which has the first measuring tip, wherein the at least one first reflective area comprises the at least one first reflective portion and the at least one second reflective portion, and wherein the first reflective portion and the second reflective portion are not arranged in a plane;
b2. directing at least one second light beam from at least one second interferometer onto the at least one first reflective ar

Assignees

• Zeiss Carl Smt Gmbh

Inventors

• Matejka Ulrich
• Baur Christof

Classifications

• G01Q10/06

  Circuits or algorithms therefor · CPC title

• G01Q10/045

  Self-actuating probes, i.e. wherein the actuating means for driving are part of the probe itself, e.g. piezoelectric means on a cantilever probe · CPC title

• G01Q20/02 Primary

  by optical means · CPC title

• G01Q40/02

  Calibration standards and methods of fabrication thereof · CPC title

• G01Q70/06

  Probe tip arrays · CPC title