Method of inspecting tip of atomic force microscope and method of manufacturing semiconductor device
US-2025341540-A1 · Nov 6, 2025 · US
Calibration standards and methods of fabrication thereof
Calibration standards and methods of fabrication thereof · Cooperative Patent Classification (CPC)
Computing, optics, measurement, and control technologies.
Related technology areas
Mapped technology topics for this CPC code.
| Metric | Value |
|---|---|
| CPC code | G01Q40/02 |
| Official title | Calibration standards and methods of fabrication thereof |
| Display label | Calibration standards and methods of fabrication thereof |
| Total patents | 31 |
Filing trend
Year-over-year patent counts classified under this CPC code.
Filing activity over the last five years is growing.
| Year | Patents |
|---|---|
| 2015 | 1 |
| 2016 | 2 |
| 2017 | 1 |
| 2018 | 3 |
| 2019 | 4 |
| 2020 | 5 |
| 2021 | 1 |
| 2022 | 6 |
| 2023 | 4 |
| 2024 | 2 |
| 2025 | 2 |
Representative patents
Representative publications under this CPC code from precomputed stats, or recent filings when stats are unavailable.
Method of inspecting tip of atomic force microscope and method of manufacturing semiconductor device
US-12385946-B2 · Aug 12, 2025 · US
Method of removing defect of mask
US-2024219826-A1 · Jul 4, 2024 · US
Probe assessment method and spm
US-2024069064-A1 · Feb 29, 2024 · US
Method for calibrating nano measurement scale and standard material used therein
US-11852581-B2 · Dec 26, 2023 · US
Apparatus and method for a scanning probe microscope
US-11796563-B2 · Oct 24, 2023 · US
Method of inspecting tip of atomic force microscope and method of manufacturing semiconductor device
US-2023194567-A1 · Jun 22, 2023 · US
Method and apparatus for examining a measuring tip of a scanning probe microscope
US-11680963-B2 · Jun 20, 2023 · US
Method for calibrating nano measurement scale and standard material used therein
US-2022187195-A1 · Jun 16, 2022 · US
Apparatus and method for a scanning probe microscope
US-2022146548-A1 · May 12, 2022 · US
System and method of performing scanning probe microscopy on a substrate surface
US-11320457-B2 · May 3, 2022 · US
Method and apparatus for examining a measuring tip of a scanning probe microscope
US-2022107340-A1 · Apr 7, 2022 · US
Method and apparatus for examining a measuring tip of a scanning probe microscope
US-11237187-B2 · Feb 1, 2022 · US
Apparatus and method for a scanning probe microscope
US-11237185-B2 · Feb 1, 2022 · US
System and method of performing scanning probe microscopy on a substrate surface
US-2021318353-A1 · Oct 14, 2021 · US
Method and apparatus for examining a measuring tip of a scanning probe microscope
US-2020141972-A1 · May 7, 2020 · US
Non-contact velocity measurement instruments and systems, and related methods
US-10620100-B2 · Apr 14, 2020 · US
Calibrating tip-enhanced Raman microscopes
US-10605826-B2 · Mar 31, 2020 · US
Determining interaction forces in a dynamic mode AFM during imaging
US-10578643-B2 · Mar 3, 2020 · US
Apparatus and method for a scanning probe microscope
US-2020025796-A1 · Jan 23, 2020 · US
Frequently asked questions
Answers are generated from the same data shown on this page.
- What is CPC G01Q40/02?
- CPC G01Q40/02 is the Cooperative Patent Classification code for “Calibration standards and methods of fabrication thereof.”
- How many patents are filed under CPC G01Q40/02 (Calibration standards and methods of fabrication thereof)?
- Our database includes 31 publications tagged with this CPC code.
- Is patent activity under CPC G01Q40/02 growing?
- Publication counts under this code: 2 in 2024 vs 2 in 2025 (latest complete years).