Three-Dimensional Fine Movement Device

Patent metadata

Field	Value
Publication number	US-2016011231-A1
Application number	US-201514794968-A
Country	US
Kind code	A1
Filing date	Jul 9, 2015
Priority date	Jul 9, 2014
Publication date	Jan 14, 2016
Grant date	—

Abstract

A three-dimensional fine movement device includes a moving body, a fixation member to which the moving body is fixed, a three-dimensional fine movement unit, to which the fixation member is fixed, and which allows for three-dimensional fine movement of the moving body with the fixation member interposed therebetween, a base member to which the three-dimensional fine movement unit is fixed, and movement amount detecting means that is fixed to the base member to detect a movement amount of the fixation member.

First claim

What is claimed is:

1 . A three-dimensional fine movement device comprising:
a moving body; a fixation member to which the moving body is fixed; a three-dimensional fine movement unit, to which the fixation member is fixed, and which allows for three-dimensional fine movement of the moving body with the fixation member interposed therebetween; a base member to which the three-dimensional fine movement unit is fixed; and a movement amount detector that is fixed to the base member and is configured to detect a movement amount of the fixation member.

2 . The three-dimensional fine movement device according to claim 1 ,
wherein the movement amount detector is configured to detect a detection surface of the fixation member.

3 . The three-dimensional fine movement device according to claim 2 ,
wherein a plurality the detection surfaces are arranged on the respective axes of the three-dimensional axes, and the movement amount detector is provided on the respective detection surface on the respective axes to detect the corresponding detection surfaces.

4 . The three-dimensional fine movement device according to claim 1 ,
wherein the movement amount detector is a non-contact sensor.

5 . The three-dimensional fine movement device according to claim 4 ,
wherein the non-contact sensor is a sensor that uses electrostatic capacitance, optical interference or optical diffraction.

6 . The three-dimensional fine movement device according to claim 1 ,
wherein the moving body is a cantilever that comes into contact with or approaches a sample, wherein the three-dimensional fine movement device further comprises a sample stage that is fixed to the base member with a three-dimensional coarse movement unit interposed therebetween, and faces the cantilever, and wherein the sample is disposed on a surface of the sample stage.

7 . The three-dimensional fine movement device according to claim 1 ,
wherein the moving body is a sample, wherein the three-dimensional fine movement device further comprises a cantilever attachment unit that is directly or indirectly fixed to the base member, and faces the sample, and wherein a cantilever that comes into contact with or approaches the sample is disposed on a surface of the cantilever attachment unit.

8 . The three-dimensional fine movement device according to claim 1 , further comprising:
a control device configured to perform control on a position on at least one axis of three-dimensional positions of the moving body through closed loop control based on the movement amount detected by the movement amount detector.

9 . A three-dimensional fine movement device comprising:
a moving body; a fixation member to which the moving body is fixed; a three-dimensional fine movement unit, to which the fixation member is fixed, and which allows for the three-dimensional fine movement of the moving body with the fixation member interposed therebetween; a three-dimensional coarse movement unit, to which the three-dimensional fine movement unit is fixed, and which allows for coarse movement of the three-dimensional fine movement unit on at least one axis of three-dimensional axes at a movement amount greater than that of the three-dimensional fine movement unit; a base member to which the three-dimensional coarse movement unit is fixed; and a movement amount detector that is fixed to the three-dimensional coarse movement unit and is configured to detect a movement amount of the fixation member.

10 . The three-dimensional fine movement device according to claim 9 ,
wherein the movement amount detector is configured to detect a detection surface of the fixation member.

11 . The three-dimensional fine movement device according to claim 10 ,
wherein a plurality the detection surfaces are arranged on the respective axes of the three-dimensional axes, and the movement amount detector is provided on the respective detection surface on the respective axes to detect the corresponding detection surfaces.

12 . The three-dimensional fine movement device according to claim 9 , wherein the movement amount detector is a non-contact sensor.

13 . The three-dimensional fine movement device according to claim 12 ,
wherein the non-contact sensor is a sensor that uses electrostatic capacitance, optical interference or optical diffraction.

14 . The three-dimensional fine movement device according to claim 9 ,
wherein the moving body is a cantilever that comes into contact with or approaches a sample, wherein the three-dimensional fine movement device further comprises a sample stage that is directly fixed to the base member or is fixed to the base member with a second three-dimensional coarse movement unit interposed therebetween, and faces the cantilever, and wherein the sample is disposed on a surface of the sample stage.

15 . The three-dimensional fine movement device according to claim 14 ,
wherein the second three-dimensional coarse movement unit moves coarsely on an axis that is different from an axis onto which the three-dimensional coarse movement unit moves coarsely.

16 . The three-dimensional fine movement device according to claim 9 , further comprising:
a control device configured to perform control on a position on at least one axis of three-dimensional positions of the moving body through closed loop control based on the movement amount detected by the movement amount detector.

Assignees

• Hitachi High Tech Science Corp

Inventors

• Shigeno Masatsugu
• Watanabe Kazutoshi
• Watanabe Masafumi

Classifications

• G01Q10/04 Primary

  Fine scanning or positioning · CPC title

• G01Q20/02

  by optical means · CPC title

• G01Q20/00

  Monitoring the movement or position of the probe · CPC title

• G01Q10/02

  Coarse scanning or positioning · CPC title

• G01Q70/04

  with compensation for temperature or vibration induced errors · CPC title