Semiconductor package

Patent metadata

Field	Value
Publication number	US-11121064-B2
Application number	US-202016819318-A
Country	US
Kind code	B2
Filing date	Mar 16, 2020
Priority date	Aug 19, 2019
Publication date	Sep 14, 2021
Grant date	Sep 14, 2021

Abstract

A semiconductor package having a redistribution structure including a first face and a second face and a first semiconductor chip mounted on the first face. The semiconductor package may further include a first redistribution pad exposed from the second face of the redistribution structure and a second redistribution pad exposed from the second face of the redistribution structure. The semiconductor package may further include a first solder ball being in contact with the first redistribution pad and a second solder ball being in contact with the second redistribution pad. In some embodiments, a first distance of the first redistribution pad is smaller than a second distance of the second redistribution pad, the first and second distances are measured with respect to a reference plane that intersects a lower portion of the first solder ball and a lower portion of the second solder ball.

First claim

What is claimed is:

1. A semiconductor package comprising:
a redistribution structure including a first face and a second face opposite to each other;
a first semiconductor chip mounted on the first face of the redistribution structure;
a first redistribution pad exposed from the second face of the redistribution structure and having a first width;
a second redistribution pad exposed from the second face of the redistribution structure and having a second width smaller than the first width of the first redistribution pad;
a first solder ball being in contact with the first redistribution pad and having a third width; and
a second solder ball being in contact with the second redistribution pad and having a fourth width smaller than the third width of the first solder ball,
wherein a first distance of the first redistribution pad is smaller than a second distance of the second redistribution pad, the first and second distances are measured with respect to a reference plane that intersects a lower portion of the first solder ball and a lower portion of the second solder ball.

2. The semiconductor package of claim 1 , wherein the redistribution structure comprises a chip region which overlaps the first semiconductor chip, and a fan-out region which does not overlap the first semiconductor chip.

3. The semiconductor package of claim 1 , further comprising:
a molding part which covers at least a portion of the first semiconductor chip, over the first face of the redistribution structure.

4. The semiconductor package of claim 3 , wherein a side face of the molding part is continuous with a side face of the redistribution structure.

5. The semiconductor package of claim 1 , wherein the redistribution structure comprises:
a plurality of insulating layers including a photoimageable dielectric (PID);
a plurality of redistribution layers stacked sequentially inside the plurality of insulating layers in a direction from the first face toward the second face; and
a plurality of vias which penetrates the insulating layers and connect the redistribution layers to each other.

6. The semiconductor package of claim 5 , wherein widths of each via of the plurality of vias gradually decrease in a direction from the second face toward the first face.

7. The semiconductor package of claim 5 , wherein widths of each via of the plurality of vias gradually decrease in a direction from the first face toward the second face.

8. The semiconductor package of claim 7 , further comprising:
a plurality of chip bumps which electrically connects the first semiconductor chip and the redistribution structure.

9. The semiconductor package of claim 1 , wherein a first contact face of the first redistribution pad being in contact with the first solder ball, and a second contact face of the second redistribution pad being in contact with the second solder ball are continuous with the second face of the redistribution structure or protrude from the second face of the redistribution structure.

10. The semiconductor package of claim 1 , wherein the second face of the redistribution structure is concave downward.

11. The semiconductor package of claim 1 , wherein the second redistribution pad is spaced apart from an edge of the redistribution structure further than the first redistribution pad.

12. The semiconductor package of claim 1 , further comprising:
a second semiconductor chip mounted on the first face of the redistribution structure.

13. A semiconductor package comprising:
a redistribution structure including a first face, and a second face which is opposite to the first face and concave downward;
a semiconductor chip mounted on the first face of the redistribution structure;
a first redistribution pad exposed from the second face of the redistribution structure and having a first width;
a second redistribution pad which is spaced apart from an edge of the redistribution structure further than the first redistribution pad, is exposed from the second face of the redistribution structure, and has a second width smaller than the first width of the first redistribution pad;
a first solder ball which is in contact with the first redistribution pad and has a third width and a first height; and
a second solder ball which is in contact with the second redistribution pad and has a fourth width smaller than the third width of the first solder ball and a second height larger than the first height of the first solder ball.

14. The semiconductor package of claim 13 , wherein the redistribution structure comprises a chip region which overlaps the semiconductor chip, and a fan-out region which does not overlap the semiconductor chip.

15. The semiconductor package of claim 14 , wherein the first redistribution pad is arranged in the fan-out region, and the second redistribution pad is arranged in the chip region.

16. The semiconductor package of claim 14 , further comprising:
a molding part which covers the semiconductor chip and the fan-out region.

17. The semiconductor package of claim 13 , wherein a first volume of the first solder ball is the same as a second volume of the second solder ball.

18. The semiconductor package of claim 13 , further comprising:
a third redistribution pad disposed between the first redistribution pad and the second redistribution pad, the third redistribution pad being exposed from the second face of the redistribution structure and having a third width smaller than the first width of the first redistribution pad and greater than the second width of the second redistribution pad, and
a third solder ball being in contact with the third redistribution pad and having a fifth width smaller than the third width of the third redistribution pad and greater than the fourth width of the second solder ball, and a third height greater than the first height of the first solder ball and smaller than the second height of the second solder ball.

19. A semiconductor package mounted on a mainboard, comprising:
a redistribution structure which includes a plurality of insulating layers including a photoimageable dielectric (PID), a plurality of redistribution layers in the insulating layers, and a plurality of vias penetrating the insulating layers to connect the redistribution layers to each other, the redistribution structure including a first face and a second face opposite to each other;
a semiconductor chip mounted on the first face of the redistribution structure;
a molding part which covers at least a portion of the semiconductor chip on the first face of the redistribution structure;
a first redistribution pad exposed from the second face of the redistribution structure and having a first width;
a second redistribution pad exposed from the second face of the redistribution structure and having a second width smaller than the first width of the first redistribution pad;
a first solder ball being in contact with the first redistribution pad and the mainboard and having a third width; and
a second solder ball being in contact with the second redistribution pad and the mainboard, and having a fourth width smaller than the third width of the first solder ball,
wherein a first distance of the first redistribution pad is smaller than a second distance of the second redistribution pad, the first and second distances are measured with respect to an upper face of the mainboard.

20. The semiconductor package of claim 19 , wherein the second redistribution pad is spaced apart from an edge of the redistribution structure fu

Assignees

• Samsung Electronics Co Ltd

Inventors

• Park Jung-Ho
• Kim Da Hye
• Park Jin-Woo
• Jang Jae Gwon

Classifications

• H10W74/117 Primary

  the substrate having spherical bumps for external connection · CPC title

• H10W70/685

  comprising multiple insulating layers · CPC title

• H10W70/65

  Shapes or dispositions of interconnections · CPC title

• H10W74/00

  Encapsulations, e.g. protective coatings · CPC title

• H10W72/9415

  relative to the surface, e.g. recessed, protruding · CPC title