Extreme ultraviolet (EUV) polarization splitter

Patent metadata

Field	Value
Publication number	US-10962885-B2
Application number	US-201916584286-A
Country	US
Kind code	B2
Filing date	Sep 26, 2019
Priority date	Sep 28, 2018
Publication date	Mar 30, 2021
Grant date	Mar 30, 2021

Abstract

A polarization filter includes a multilayer structure including a first plurality of elements and a second plurality of elements alternating between each other. The first plurality of elements and the second plurality of elements have different thicknesses, and the multilayer structure is configured to interact with unpolarized light incident on the multilayer structure and separate transverse electric (TE) waves and transverse magnetic (TM) waves of the unpolarized light.

First claim

What is claimed is:

1. A polarization filter, comprising:
a multilayer structure including a first plurality of elements and a second plurality of elements alternating between each other, wherein
the first plurality of elements and the second plurality of elements have different thickness,
the multilayer structure has a first main surface and a second main surface opposite to the first main surface, both the first and second main surfaces being exposed,
the thicknesses of the first plurality of elements and the second plurality of elements are such that transverse electric (TE) waves and transverse magnetic (TM) waves are obtained from unpolarized extreme ultraviolet (EUV) light, and
the unpolarized EUV light is incident on the first main surface of the multilayer structure and the transverse electric (TE) waves in the incident unpolarized EUV light are partially reflected at the first main surface and the transverse magnetic (TM) waves in the incident unpolarized EUV light are partially transmitted and exit from the second main surface.

2. The polarization filter of claim 1 , wherein the first plurality of elements include molybdenum (Mo) and the second plurality of elements include silicon (Si).

3. The polarization filter of claim 2 , wherein each element of the first plurality of elements has a thickness of between 2.2 nm to 2.8 nm and each element of the second plurality of elements has a thickness of between 6.7 nm and 7.3 nm.

4. The polarization filter of claim 1 , wherein the extreme EUV light is incident at a Brewster's angle, and wherein the Brewster's angle ranges from 40.5 degrees to 44.5 degrees.

5. The polarization filter of claim 1 , wherein the multilayer structure includes the first plurality of elements and the second plurality of elements arranged in pairs, a number of pairs being between 18 to 22, and each pair including an element from the first plurality of elements and an element from the second plurality of elements.

6. The polarization filter of claim 1 , wherein the first plurality of elements and the second plurality of elements are configured such that the incident unpolarized EUV light is partially reflected and partially transmitted.

7. A method, comprising:
providing a multilayer structure including a first plurality of elements and a second plurality of elements alternating between each other, the first plurality of elements and the second plurality of elements having different thicknesses; and
interacting the multilayer structure with unpolarized extreme ultraviolet (EUV) light to obtain transverse electric (TE) waves and transverse magnetic (TM) waves of the unpolarized EUV light, wherein
the unpolarized EUV light is incident at an angle of incidence equal to the Brewster's angle,
the unpolarized EUV light is incident on a first main surface of the multilayer structure,
the transverse electric (TE) waves in the incident unpolarized EUV light are partially reflected at the first main surface, and
the transverse magnetic (TM) waves in the incident unpolarized EUV light are partially transmitted and exit from a second main surface of the multilayer structure opposite to the first main surface.

8. The method of claim 7 , further comprising:
varying the thicknesses of the first plurality of elements and the second plurality of elements such that the partially reflected light includes a desired amount of the transverse electric (TE) waves, and the partially transmitted light includes a desired amount of the transverse magnetic (TM) waves.

9. The method of claim 8 , wherein varying the thicknesses of the first plurality of elements and the second plurality of elements includes varying the thicknesses of the first plurality of elements and the second plurality of elements such that an amount of the transverse electric (TE) waves in the partially reflected light are greater than an amount of the transverse magnetic (TM) waves in the partially reflected light.

10. The method of claim 8 , wherein varying the thicknesses of the first plurality of elements and the second plurality of elements includes varying the thicknesses of the first plurality of elements and the second plurality of elements such that an amount of the transverse magnetic (TM) waves in the partially transmitted light are greater than an amount of the transverse electric (TE) waves in the partially transmitted light.

11. The method of claim 8 , wherein providing the multilayer structure includes providing the multilayer structure having the first plurality of elements including molybdenum (Mo), each element of the first plurality of elements having a thickness of between 2.2 nm to 2.8 nm, and the second plurality of elements including silicon (Si), each element of the second plurality of elements having a thickness of between 6.7 nm and 7.3 nm.

12. The method of claim 8 , wherein providing the multilayer structure includes providing the multilayer structure having the first plurality of elements and the second plurality of elements arranged in pairs,
wherein a number of pairs is between 18 to 22 pairs, and each pair includes an element from the first plurality of elements and an element from the second plurality of elements.

13. The method of claim 12 , further comprising adjusting the angle of incidence of the unpolarized EUV light in a range from 40.5 degrees to 44.5 degrees with respect to a normal line of the multilayer structure.

14. The method of claim 7 , wherein the multilayer structure and the angle of incidence of the unpolarized EUV light are configured such that a reflectivity of reflected TM waves is below 0.1%.

15. The method of claim 7 , further comprising:
providing an extreme ultraviolet (EUV) lithography system including the multilayer structure; and
exposing a reticle positioned in the EUV lithography system to the transverse electric (TE) waves obtained from the multilayer structure.

16. An EUV lithography apparatus, comprising:
a reflective optics;
a wafer stage; and
a polarization filter along a light path within the reflective optics, wherein:
the polarization filter comprises:
a multilayer structure including a plurality of layers of molybdenum (Mo) and a plurality of layers of silicon (Si) alternating between each other,
the plurality of layers of molybdenum (Mo) and the plurality of layers of silicon (Si) have different thicknesses,
the EUV lithography apparatus receives unpolarized extreme ultraviolet (EUV) light,
the plurality of layers of molybdenum (Mo) and the plurality of layers of silicon (Si) are configured to interact with the unpolarized extreme ultraviolet (EUV) light incident on the multilayer structure to obtain transverse electric (TE) waves and transverse magnetic (TM) waves in the unpolarized EUV light,
the unpolarized EUV light is incident on a first main surface of the multilayer structure,
the transverse electric (TE) waves in the incident unpolarized EUV light are partially reflected at the first main surface,
the transverse magnetic (TM) waves in the incident unpolarized EUV light are partially transmitted and exit from a second main surface of the multilayer structure opposite to the first main surface, and
the transverse electric (TE) waves obtained by the polarization filter are directed toward the wafer stage.

17. The EUV lithography apparatus of claim 16 , wherein the multilayer structure includes 18-22 pairs of the layers of molybdenum (Mo) and layers of silicon (Si) and each pair includes a layer of molybdenum (Mo) and a layer of silicon (Si).

18. The EUV lithography apparatus of cla

Assignees

• Taiwan Semiconductor Mfg Co Ltd

Inventors

• Chen Minfeng

Classifications

• G02B27/283

  used for beam splitting or combining · CPC title

• G02B5/3066

  involving the reflection of light at a particular angle of incidence, e.g. Brewster's angle · CPC title

• G03F7/70566 Primary

  Polarisation control · CPC title

• G03F7/70958

  Optical materials or coatings, e.g. with particular transmittance, reflectance or anti-reflection properties · CPC title

• G02B5/3091

  for use in the UV · CPC title