Method and apparatus for using universal cavity wafer in wafer level packaging

Patent metadata

Field	Value
Publication number	US-10418249-B2
Application number	US-201715846357-A
Country	US
Kind code	B2
Filing date	Dec 19, 2017
Priority date	Jun 9, 2015
Publication date	Sep 17, 2019
Grant date	Sep 17, 2019

Abstract

An electronics module assembly is described herein that packages dies using a universal cavity wafer that is independent of electronics module design. In one embodiment, the electronics module assembly can include a cavity wafer having a single frontside cavity that extends over a majority of a frontside surface area of the cavity wafer and a plurality of fillports. The assembly can also include at least one group of dies placed in the frontside cavity and encapsulant that secures the position of the at least one group of dies relative to the cavity wafer. Further, a layer of the encapsulant can cover a backside of the cavity wafer.

First claim

What is claimed is:

1. An electronics module assembly, comprising:
a cavity wafer having a single frontside cavity that extends over a majority of a frontside surface area of the cavity wafer, a single backside cavity, and a plurality of fillports;
at least one group of dies, where the dies are placed in the frontside cavity; and
encapsulant that fills the frontside cavity, the backside cavity, and the fillports, wherein the encapsulant secures the position of the at least one group of dies relative to the cavity wafer.

2. The electronics module assembly of claim 1 wherein the dies in the at least one group of dies are interconnected to form an electronic module.

3. The electronics module assembly of claim 1 wherein the frontside cavity is bounded by a full thickness perimeter rim of the cavity wafer.

4. The electronics module assembly of claim 1 where the plurality of fillports are distributed throughout a fillport area that is an area corresponding to the frontside cavity.

5. The electronics module assembly of claim 1 wherein the cavity wafer is made of any rigid material that tolerates 230.degree. C. process temperature.

6. The electronics module assembly of claim 4 , wherein a portion of the fillport area is further cut out and the frontside cavity extends to the space formed by cutting out the portion of the fillport area.

7. The electronics module assembly of claim 1 , wherein the single frontside cavity extends over the majority of the frontside surface area of the cavity wafer except for a perimeter rim.

8. An electronics module assembly, comprising:
a cavity wafer having a single frontside cavity that extends over a majority of a frontside surface area of the cavity wafer and a plurality of fillports;
at least one group of dies, where the dies are placed in the frontside cavity; and
encapsulant that fills the frontside cavity and the fillports, wherein the encapsulant secures the position of the at least one group of dies relative to the cavity wafer,
wherein a uniform layer of the encapsulant covers a backside of the cavity wafer.

9. The electronics module assembly of claim 8 wherein the dies in the at least one group of dies are interconnected to form an electronic module.

10. The electronics module assembly of claim 8 wherein the frontside cavity is bounded by a full thickness perimeter rim of the cavity wafer.

11. The electronics module assembly of claim 8 where the plurality of fillports are distributed throughout a fillport area that is an area corresponding to the frontside cavity.

12. The electronics module assembly of claim 8 wherein the cavity wafer is made of any rigid material that tolerates 230.degree. C. process temperature.

13. The electronics module assembly of claim 11 , wherein a portion of the fillport area is further cut out and the frontside cavity extends to the space formed by cutting out the portion of the fillport area.

14. The electronics module assembly of claim 8 wherein a thickness of the layer of the encapsulant covering the backside of the cavity wafer is determined to minimize wafer bow caused by encapsulant in the frontside cavity.

15. The electronics module assembly of claim 8 , wherein the single frontside cavity extends over the majority of the frontside surface area of the cavity wafer except for a perimeter rim.

Assignees

• Charles Stark Draper Laboratory Inc

Inventors

• Karpman Maurice
• Rickley Michael
• Mueller Andrew
• Mueller Nicole
• Thompson Jeffrey
• Baab Charles

Classifications

• H10W72/9413

  on encapsulations · CPC title

• H10W72/874

  On different surfaces · CPC title

• H10W70/698

  Semiconductor materials that are electrically insulating, e.g. undoped silicon · CPC title

• H10W70/682

  comprising holes having chips therein · CPC title

• H10W70/681

  comprising holes not having chips therein, e.g. for outgassing, underfilling or bond wire passage · CPC title