Substrate processing apparatus and method of manufacturing semiconductor device
US-2026081115-A1 · Mar 19, 2026 · US
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Yanai Hidehiro patents
Yanai Hidehiro is listed as an inventor on 33 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Yanai Hidehiro |
| Total patents | 33 |
| First publication | Jan 6, 2015 |
| Latest publication | Mar 19, 2026 |
Notable patents
Publications ranked by popularity score, then publication date.
Substrate processing apparatus, and method of manufacturing semiconductor device
US-12505989-B2 · Dec 23, 2025 · US
Substrate processing apparatus, gas supply system, method of processing substrate, method of manufacturing semiconductor device, and recording medium
US-2025343054-A1 · Nov 6, 2025 · US
Substrate processing apparatus, and method of manufacturing semiconductor device
US-2024212989-A1 · Jun 27, 2024 · US
Substrate processing apparatus, method of manufacturing semiconductor device, and baffle structure of the substrate processing apparatus
US-11948778-B2 · Apr 2, 2024 · US
Substrate processing apparatus, method of manufacturing semiconductor device, and recording medium
US-2023416916-A1 · Dec 28, 2023 · US
Substrate processing apparatus, substrate processing method and non-transitory computer-readable recording medium
US-2023073084-A1 · Mar 9, 2023 · US
Substrate processing apparatus, method of manufacturing semiconductor device and non-transitory computer-readable recording medium
US-11530481-B2 · Dec 20, 2022 · US
Substrate processing apparatus, method of manufacturing semiconductor device, and non-transitory computer-readable recording medium
US-2022189801-A1 · Jun 16, 2022 · US
Substrate processing apparatus, method of manufacturing semiconductor device, and baffle structure of the substrate processing apparatus
US-2021343507-A1 · Nov 4, 2021 · US
Recent patents
Latest publications not already listed above.
Substrate processing apparatus, method of manufacturing semiconductor device, and baffle structure of the substrate processing apparatus
US-11101111-B2 · Aug 24, 2021 · US
Substrate processing apparatus, method of manufacturing semiconductor device and non-transitory computer-readable recording medium
US-2021079525-A1 · Mar 18, 2021 · US
Substrate processing apparatus
US-2021071297-A1 · Mar 11, 2021 · US
Substrate processing apparatus, method of manufacturing semiconductor device, and baffle structure of the substrate processing apparatus
US-2020381221-A1 · Dec 3, 2020 · US
Substrate processing apparatus, method of manufacturing semiconductor device, and baffle structure of the substrate processing apparatus
US-10763084-B2 · Sep 1, 2020 · US
Plasma processing apparatus and method of manufacturing semiconductor device
US-10403478-B2 · Sep 3, 2019 · US
Substrate processing apparatus
US-10287684-B2 · May 14, 2019 · US
Substrate processing apparatus, method of manufacturing semiconductor device, and baffle structure of the substrate processing apparatus
US-2018144908-A1 · May 24, 2018 · US
Substrate processing apparatus, method of manufacturing semiconductor device, and baffle structure of the substrate processing apparatus
US-9911580-B2 · Mar 6, 2018 · US
Substrate processing apparatus and method of manufacturing semiconductor device
US-9659767-B2 · May 23, 2017 · US
Substrate Processing Apparatus
US-2016379848-A1 · Dec 29, 2016 · US
Method of manufacturing semiconductor device
US-9508546-B2 · Nov 29, 2016 · US
Substrate processing apparatus and substrate processing method
US-9378991-B2 · Jun 28, 2016 · US
Substrate processing apparatus, method of manufacturing semiconductor device and non-transitory computer-readable recording medium
US-2016079101-A1 · Mar 17, 2016 · US
Substrate processing apparatus
US-2016024650-A1 · Jan 28, 2016 · US
Substrate processing apparatus
US-2016010210-A1 · Jan 14, 2016 · US
Plasma processing apparatus and method of manufacturing semiconductor device
US-2015371832-A1 · Dec 24, 2015 · US
Method of manufacturing semiconductor device
US-2015221503-A1 · Aug 6, 2015 · US
Method of manufacturing semiconductor device
US-2015214044-A1 · Jul 30, 2015 · US
Substrate processing apparatus and method of manufacturing semiconductor device
US-9082797-B2 · Jul 14, 2015 · US
Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Hitachi Int Electric Inc | 19 |
| Kokusai Electric Corp | 17 |
| Yanai Hidehiro | 4 |
| Sakata Masakazu | 2 |
| Shimada Toshiya | 2 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| H01J37/32449 | 15 |
| H10P50/242 | 14 |
| H10P50/287 | 12 |
| H01J37/321 | 12 |
| H10P72/0402 | 11 |