Method of forming low-k material layer with high-frequency power, structure including the layer, and system for forming same
US-12512313-B2 · Dec 30, 2025 · US
This page is not indexed by search engines while we improve data quality.
Yanagisawa Ippei patents
Yanagisawa Ippei is listed as an inventor on 9 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Yanagisawa Ippei |
| Total patents | 9 |
| First publication | Jun 8, 2017 |
| Latest publication | Dec 30, 2025 |
Notable patents
Publications ranked by popularity score, then publication date.
Substrate supporting apparatus and substrate processing apparatus
US-2024417855-A1 · Dec 19, 2024 · US
Method of forming low-k material layer with high-frequency power, structure including the layer, and system for forming same
US-2023207308-A1 · Jun 29, 2023 · US
Cvd apparatus and method for cleaning chamber of cvd apparatus
US-2023069139-A1 · Mar 2, 2023 · US
Susceptor having CF coating
US-11359302-B2 · Jun 14, 2022 · US
Substrate processing device having connection plates, substrate processing method
US-11339476-B2 · May 24, 2022 · US
Susceptor having cf coating
US-2021108328-A1 · Apr 15, 2021 · US
Substrate processing device having connection plates, substrate processing method
US-2021102289-A1 · Apr 8, 2021 · US
Film forming apparatus, recording medium, and film forming method
US-2017162366-A1 · Jun 8, 2017 · US
Recent patents
Latest publications not already listed above.
No data yet.
Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Asm Ip Holding Bv | 9 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| H01J37/3244 | 5 |
| H01J37/32449 | 4 |
| C23C16/4405 | 4 |
| H01J37/32091 | 4 |
| H01J37/32174 | 4 |