Susceptor having CF coating

Patent metadata

Field	Value
Publication number	US-11359302-B2
Application number	US-202017126275-A
Country	US
Kind code	B2
Filing date	Dec 18, 2020
Priority date	Oct 3, 2018
Publication date	Jun 14, 2022
Grant date	Jun 14, 2022

Abstract

Examples of a susceptor for supporting a substrate includes a base metal formed of aluminum or a material containing aluminum, an anodized layer covering a surface of the base metal and having cracks therein, and a CF coating of polymer provided in the cracks such that the exposure of the base metal is avoided.

First claim

The invention claimed is:

1. A susceptor comprising:
a base metal formed of aluminum or a material containing aluminum;
an anodized layer covering a surface of the base metal and having cracks therein; and
a CF coating of polymer provided in the cracks,
wherein an upper surface of the anodized layer is exposed,
wherein the CF coating comprises a polymer formed of at least one monomer that contains F, and
wherein the CF coating is formed on inner walls of the cracks and does not completely fill the cracks.

2. The susceptor according to claim 1 , wherein the anodized layer contains AlO2.

3. The susceptor according to claim 1 , further comprising a heater provided inside the base metal.

4. The susceptor according to claim 1 , wherein the CF coating comprises Dimethyldimethoxysilane (DMDMOS).

5. The susceptor according to claim 1 , wherein the CF coating contacts the base metal, the CF coating prevent the base metal from being exposed.

6. A susceptor comprising:
a base metal formed of aluminum or a material containing aluminum;
an anodized layer covering a surface of the base metal and having cracks therein; and
a CF coating of polymer provided in the cracks,
wherein the CF coating comprises a polymer formed of at least one monomer that contains F, and
wherein the CF coating is filled in the cracks, and an upper surface of the anodized layer is exposed.

7. The susceptor according to claim 6 , wherein an upper surface of the CF coating is flush with the upper surface of the anodized layer.

Assignees

• Asm Ip Holding Bv

Inventors

• Yanagisawa Ippei

Classifications

• C25D11/246

  for sealing layers · CPC title

• C25D17/16

  Apparatus for electrolytic coating of small objects in bulk · CPC title

• C25D11/16 Primary

  Pretreatment {, e.g. desmutting} · CPC title

• C23C16/50

  using electric discharges {(generation and control of plasma in discharge tubes for surface treatment H01J37/32, H01J37/34)} · CPC title

• C23C16/4404

  Coatings or surface treatment on the inside of the reaction chamber or on parts thereof · CPC title