Spray-coated electrostatic chuck design
US-12476086-B2 · Nov 18, 2025 · US
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Wada Yuichi patents
Wada Yuichi is listed as an inventor on 60 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Wada Yuichi |
| Total patents | 60 |
| First publication | May 14, 2015 |
| Latest publication | Nov 18, 2025 |
Notable patents
Publications ranked by popularity score, then publication date.
Shutter disk
US-12148629-B2 · Nov 19, 2024 · US
High conductance inner shield for process chamber
US-12100577-B2 · Sep 24, 2024 · US
Preclean chamber upper shield with showerhead
US-12080522-B2 · Sep 3, 2024 · US
Spray-coated electrostatic chuck design
US-2024258076-A1 · Aug 1, 2024 · US
Shutter Disk
US-2024087913-A1 · Mar 14, 2024 · US
Methods and apparatus for processing a substrate
US-11913107-B2 · Feb 27, 2024 · US
Methods and apparatus for reducing defects in preclean chambers
US-11881385-B2 · Jan 23, 2024 · US
Shutter disk
US-11862480-B2 · Jan 2, 2024 · US
Inline microwave batch degas chamber
US-11629409-B2 · Apr 18, 2023 · US
Recent patents
Latest publications not already listed above.
Methods and apparatus for cleaving of semiconductor substrates
US-11610807-B2 · Mar 21, 2023 · US
Methods and apparatus for processing a substrate
US-11587799-B2 · Feb 21, 2023 · US
Methods and apparatus for cleaving of semiconductor substrates
US-11569122-B2 · Jan 31, 2023 · US
Methods and apparatus for prevention of component cracking using stress relief layer
US-11557499-B2 · Jan 17, 2023 · US
Upper shield with showerhead for a process chamber
US-D973609-S · Dec 27, 2022 · US
Lower shield for a substrate processing chamber
US-D971167-S · Nov 29, 2022 · US
Substrate processing apparatus, heater and method of manufacturing semiconductor device
US-11359285-B2 · Jun 14, 2022 · US
Methods and apparatus for prevention of component cracking using stress relief layer
US-2022122871-A1 · Apr 21, 2022 · US
Methods and apparatus for high voltage electrostatic chuck protection
US-11289357-B2 · Mar 29, 2022 · US
Shutter Disk
US-2022028702-A1 · Jan 27, 2022 · US
Shutter disk
US-11171017-B2 · Nov 9, 2021 · US
Preclean chamber upper shield with showerhead
US-2021335581-A1 · Oct 28, 2021 · US
Methods and apparatus for reducing defects in preclean chambers
US-2021335582-A1 · Oct 28, 2021 · US
Lower shield for a substrate processing chamber
US-D931241-S · Sep 21, 2021 · US
Methods and Apparatus for Cleaving of Semiconductor Substrates
US-2021233802-A1 · Jul 29, 2021 · US
Methods and apparatus for cleaving of semiconductor substrates
US-2021217656-A1 · Jul 15, 2021 · US
Methods and apparatus for processing a substrate
US-2021166953-A1 · Jun 3, 2021 · US
Methods and apparatus for processing a substrate
US-2021140029-A1 · May 13, 2021 · US
Methods and apparatus for cleaving of semiconductor substrates
US-10991617-B2 · Apr 27, 2021 · US
Inner shield for a substrate processing chamber
US-D913979-S · Mar 23, 2021 · US
Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Applied Materials Inc | 37 |
| Hitachi Int Electric Inc | 22 |
| Kokusai Electric Corp | 5 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| H10P72/0402 | 14 |
| H10P72/0602 | 13 |
| H10P72/0436 | 12 |
| H10P72/0431 | 12 |
| H10P72/0434 | 11 |