Methods and apparatus for cleaving of semiconductor substrates

Patent metadata

Field	Value
Publication number	US-11569122-B2
Application number	US-202117217179-A
Country	US
Kind code	B2
Filing date	Mar 30, 2021
Priority date	May 15, 2018
Publication date	Jan 31, 2023
Grant date	Jan 31, 2023

Abstract

Methods and apparatus for cleaving a substrate in a semiconductor chamber. The semiconductor chamber pressure is adjusted to a process pressure, a substrate is then heated to a nucleation temperature of ions implanted in the substrate, the temperature of the substrate is then adjusted below the nucleation temperature of the ions, and the temperature is maintained until cleaving of the substrate occurs. Microwaves may be used to provide heating of the substrate for the processes. A cleaving sensor may be used for detection of successful cleaving by detecting pressure changes, acoustic emissions, changes within the substrate, and/or residual gases given off by the implanted ions when the cleaving occurs.

First claim

The invention claimed is:

1. A method of cleaving a substrate in a chamber, comprising:
adjusting a pressure of the chamber to a process pressure;
adjusting a temperature of the substrate to a nucleation temperature of ions implanted in the substrate;
adjusting the temperature of the substrate below the nucleation temperature of ions implanted in the substrate; and
maintaining the temperature of the substrate at a soak temperature until cleaving of the substrate occurs.

2. The method of claim 1 , further comprising:
adjusting the temperature of the substrate using microwaves at a fixed power level.

3. The method of claim 1 , further comprising:
adjusting the temperature of the substrate using microwaves controlled by a proportional-integral-derivative (PID) controller interfacing with an infrared sensor.

4. The method of claim 1 , further comprising:
adjusting the temperature of the substrate using microwaves with a power level adjusted before, after, or in parallel with a change of the process pressure in the chamber.

5. The method of claim 4 , wherein the power level of the microwaves is in a range of greater than zero watts to approximately 1600 watts.

6. The method of claim 1 , further comprising:
adjusting the temperature of the substrate using microwaves with a single frequency or a sweeping frequency.

7. The method of claim 6 , wherein the sweeping frequency has a range of approximately 2 GHz to approximately 8 GHz.

8. The method of claim 6 , wherein the sweeping frequency has a range of approximately 5.85 GHz to approximately 6.65 GHz.

9. The method of claim 1 , further comprising:
adjusting the temperature of the substrate to the nucleation temperature of ions with a ramping rate of approximately 0.01 degrees Celsius to approximately 15 degrees Celsius.

10. The method of claim 1 , further comprising:
pulsing the soak temperature while maintaining the process pressure in the chamber to promote cleaving of the substrate.

11. The method of claim 1 , further comprising:
pulsing the process pressure in the chamber while maintaining the soak temperature to promote cleaving of the substrate.

12. The method of claim 1 , further comprising:
adjusting the process pressure of the chamber to a range of greater than zero Torr to approximately 770 Torr.

13. The method of claim 1 , wherein ions implanted in the substrate include hydrogen, helium, nitrogen, oxygen, or argon.

14. A method of cleaving a substrate in a chamber, comprising:
adjusting a pressure of the chamber to a process pressure;
adjusting a temperature of the substrate to a nucleation temperature of ions implanted in the substrate using microwaves with a single frequency or a sweeping frequency;
adjusting the temperature of the substrate below the nucleation temperature of ions implanted in the substrate using microwaves with a single frequency or a sweeping frequency;
maintaining the temperature of the substrate at a soak temperature; and
detecting when cleaving of the substrate has occurred.

15. The method of claim 14 , further comprising:
using microwaves with a frequency range of approximately 5.85 GHz to approximately 6.65 GHz.

16. The method of claim 15 , further comprising:
sweeping the frequency range at a rate of approximately 750 microseconds between frequencies to approximately 25 microseconds between frequencies.

17. The method of claim 14 , further comprising:
detecting the cleaving of the substrate by a change in a pressure of the chamber, by an acoustic emission, or by a presence of a residual gas associated with ions implanted in the substrate.

18. An apparatus for cleaving a substrate, comprising:
a chamber configured to cleave the substrate;
a microwave power source coupled to a multi-faceted microwave cavity, the microwave power source configured to heat the substrate during processing with microwaves of a single frequency or of a sweeping frequency in a range of approximately 2 GHz to approximately 8 GHz;
a vacuum source with pulsing capabilities configured to pulse a process pressure within the chamber;
a contactless temperature sensor that reads a temperature of the substrate during processing and relays the temperature to a controller; and
the controller with proportional-integral-derivative (PID) control configured to adjust the temperature of the substrate with the microwave power source and adjust the process pressure within the chamber with the vacuum source, the controller configured to perform a substrate cleaving process including:
adjusting the process pressure within the chamber;
adjusting the temperature of the substrate to a nucleation temperature of ions implanted in the substrate;
adjusting the temperature of the substrate below the nucleation temperature of ions implanted in the substrate; and
maintaining the temperature of the substrate at a soak temperature until cleaving of the substrate occurs.

19. The apparatus of claim 18 , further comprising:
a cleaving sensor coupled to the controller and configured to detect when a cleaving of the substrate has occurred.

20. The apparatus of claim 19 , wherein the cleaving sensor includes an acoustic emission sensor, a residual gas analyzer, or a pressure sensor.

Assignees

• Applied Materials Inc

Inventors

• Deng Felix
• Ow Yueh Sheng
• Koh Tuck Foong
• Chen Nuno Yen-Chu
• Wada Yuichi
• Kesapragada Sree Rangasai V
• Goh Clinton

Classifications

• H10P72/0604

  Process monitoring, e.g. flow or thickness monitoring · CPC title

• H10P72/0436 Primary

  mainly by radiation · CPC title

• H10P72/0402

  Apparatus for fluid treatment (H10P72/0441, H10P72/0448 take precedence) · CPC title

• H10W10/181

  Semiconductor-on-insulator [SOI] isolation regions, e.g. buried oxide regions of SOI wafers · CPC title

• H10P54/52

  by cleaving · CPC title