Deflectable platens and associated methods
US-12424452-B2 · Sep 23, 2025 · US
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Sun Dawei patents
Sun Dawei is listed as an inventor on 41 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Sun Dawei |
| Total patents | 41 |
| First publication | Feb 12, 2015 |
| Latest publication | Sep 23, 2025 |
Notable patents
Publications ranked by popularity score, then publication date.
Model-based controlled load lock pumping scheme
US-12278124-B2 · Apr 15, 2025 · US
Chuck for processing semiconductor workpieces at high temperatures
US-12046503-B2 · Jul 23, 2024 · US
Managing beam power effects by varying base emissivity
US-2024087839-A1 · Mar 14, 2024 · US
System and method for dissipating workpiece charge build up
US-11864299-B2 · Jan 2, 2024 · US
System and method for dissipating workpiece charge build up
US-2023371160-A1 · Nov 16, 2023 · US
Optimal knowledge distillation scheme
US-2023196067-A1 · Jun 22, 2023 · US
Solid state heater and method of manufacture
US-11665786-B2 · May 30, 2023 · US
Model-Based Controlled Load Lock Pumping Scheme
US-2023138326-A1 · May 4, 2023 · US
Chuck For Processing Semiconductor Workpieces At High Temperatures
US-2023132307-A1 · Apr 27, 2023 · US
Recent patents
Latest publications not already listed above.
Method and apparatus for calibration of substrate temperature using pyrometer
US-11543296-B2 · Jan 3, 2023 · US
Hybrid control system for workpiece heating
US-11545375-B2 · Jan 3, 2023 · US
Enhanced substrate temperature measurement apparatus, system and method
US-11473978-B2 · Oct 18, 2022 · US
Deflectable platens and associated methods
US-2022189784-A1 · Jun 16, 2022 · US
Deflectable platens and associated methods
US-11302536-B2 · Apr 12, 2022 · US
Deflectable platen and associated method
US-11133213-B2 · Sep 28, 2021 · US
Carbon nanotube electrostatic chuck
US-2021225682-A1 · Jul 22, 2021 · US
Carbon nanotube electrostatic chuck
US-11069554-B1 · Jul 20, 2021 · US
Solid State Heater And Method Of Manufacture
US-2021176824-A1 · Jun 10, 2021 · US
Deflectable platen and associated method
US-2021134650-A1 · May 6, 2021 · US
Deflectable platens and associated methods
US-2021118692-A1 · Apr 22, 2021 · US
Human G protein alpha subunit gail with at least one mutated amino acid residue
US-10899805-B2 · Jan 26, 2021 · US
Hybrid Control System For Workpiece Heating
US-2020395233-A1 · Dec 17, 2020 · US
Enhanced substrate temperature measurement apparatus, system and method
US-2020378837-A1 · Dec 3, 2020 · US
Method and apparatus for calibration of substrate temperature using pyrometer
US-2020378832-A1 · Dec 3, 2020 · US
System and apparatus for enhanced substrate heating and rapid substrate cooling
US-2020381271-A1 · Dec 3, 2020 · US
Apparatus for forming crystalline sheet from a melt
US-2020115819-A1 · Apr 16, 2020 · US
Apparatus for forming crystalline sheet from a melt
US-10526720-B2 · Jan 7, 2020 · US
Apparatus and method for crystalline sheet growth
US-10179958-B2 · Jan 15, 2019 · US
Method for achieving sustained anisotropic crystal growth on the surface of a silicon melt
US-2018202066-A1 · Jul 19, 2018 · US
Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Applied Materials Inc | 24 |
| Varian Semiconductor Equipment Ass Inc | 13 |
| Auburn Univeristy | 2 |
| Univ Auburn | 2 |
| Varian Semiconductor Equipment | 1 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| H10P72/0602 | 12 |
| C30B15/06 | 11 |
| H10P72/722 | 11 |
| C30B29/06 | 8 |
| H10P72/0432 | 7 |