Chuck for processing semiconductor workpieces at high temperatures

Patent metadata

Field	Value
Publication number	US-12046503-B2
Application number	US-202117510991-A
Country	US
Kind code	B2
Filing date	Oct 26, 2021
Priority date	Oct 26, 2021
Publication date	Jul 23, 2024
Grant date	Jul 23, 2024

Abstract

A chuck for heating and clamping a workpiece, such as a semiconductor workpiece, is disclosed. The chuck is configured to allow the workpiece to be heated to temperatures in excess of 600° C. Further, while the workpiece is heating, the components that make up the chuck may be maintained at a much lower temperature, such as room temperature. The chuck includes a housing, formed as a hollow cylinder with sidewalls and an open end. Electrodes are disposed at the top surface of the sidewalls to clamp the workpiece. A heat source is disposed in the cavity and emits radiated heat toward the workpiece. A clamp ring may be used to secure the workpiece. In some embodiments, a thermal sensor is used to monitor the temperature of the workpiece.

First claim

What is claimed is:

1. A chuck for clamping and heating a workpiece, comprising:
a housing, formed as a hollow cylinder having sidewalls and an open end, wherein a region inside the sidewalls defines a cavity and the inner diameter of the sidewalls is less than an outer diameter of the workpiece to be clamped such that the workpiece rests on a top surface of the sidewalls and is supported only by the sidewalls;
a heat source disposed in the cavity; and
one or more pairs of electrodes disposed on the top surface of the sidewalls.

2. The chuck of claim 1 , further comprising a clamp ring disposed on the top surface of the sidewalls.

3. The chuck of claim 2 , wherein an inner diameter of the clamp ring is greater than an outer diameter of the workpiece, such that the clamp ring does not cover any portion of the workpiece.

4. The chuck of claim 3 , wherein the clamp ring comprises a plurality of tabs that extend inward from the inner diameter, such that the plurality of tabs are disposed above a portion the workpiece and wherein an electrostatic force generated by the one or more electrodes attracts the plurality of tabs toward the top surface.

5. The chuck of claim 4 , further comprising downward protrusions disposed on a bottom surface of the plurality of tabs to reduce a contact area between the plurality of tabs and the workpiece.

6. The chuck of claim 3 , wherein the inner diameter of the clamp ring is larger than an inner diameter of the sidewalls and smaller than an outer diameter of the sidewalls such that the clamp ring rests on only a portion of the top surface.

7. The chuck of claim 2 , wherein an inner diameter of the clamp ring is less than an outer diameter of the workpiece, such that the clamp ring covers a portion of the workpiece such that the workpiece is disposed between the clamp ring and the top surface and an electrostatic force generated by the one or more pairs of electrodes attracts the clamp ring toward the top surface.

8. The chuck of claim 1 , further comprising radiation shields disposed between the housing and the heat source.

9. The chuck of claim 1 , further comprising protrusions disposed on the top surface of the sidewalls to reduce a contact area between the housing and the workpiece.

10. The chuck of claim 1 , further comprising a thermal sensor and a controller, wherein the controller modifies an output of the heat source based on information from the thermal sensor.

11. The chuck of claim 10 , wherein the thermal sensor comprises a pyrometer.

12. The chuck of claim 1 , wherein the one or more pairs of electrodes each comprise two electrodes that are each provided with a respective bipolar DC signal and the bipolar DC signals are of opposite phase.

13. The chuck of claim 12 , wherein voltages supplied by the bipolar power supply comprise an AC voltage or a pulsed DC voltage.

14. The chuck of claim 1 , wherein the heat source heats the workpiece using radiative heating.

15. The chuck of claim 1 , wherein lift pins and/or ground pins are disposed on the top surface of the sidewalls.

16. The chuck of claim 1 , wherein each pair of the one or more pairs of electrodes are in communication with a respective bipolar power supply such that voltages applied to the electrodes in each pair are of opposite polarity.

17. An ion implantation system, comprising:
an ion source; and
an electrostatic chuck, the electrostatic chuck comprising:
a housing, formed as a hollow cylinder having sidewalls and an open end, wherein a region inside the sidewalls defines a cavity and the inner diameter of the sidewalls is less than an outer diameter of the workpiece to be clamped such that the workpiece rests on a top surface of the sidewalls and is supported only by the sidewalls;
a heat source disposed in the cavity; and
one or more pairs of electrodes disposed on a top surface of the sidewalls.

Assignees

• Applied Materials Inc

Inventors

• Sun Dawei
• Hall Daniel

Classifications

• H10P72/7612

  characterised by lifting arrangements, e.g. lift pins · CPC title

• H10P72/7606 Primary

  characterised by edge clamping, e.g. clamping ring · CPC title

• H10P72/0602

  Temperature monitoring · CPC title

• H10P72/0436

  mainly by radiation · CPC title

• H10P72/722 Primary

  Details of electrostatic chucks · CPC title