Hybrid control system for workpiece heating

Patent metadata

Field	Value
Publication number	US-11545375-B2
Application number	US-201916443043-A
Country	US
Kind code	B2
Filing date	Jun 17, 2019
Priority date	Jun 17, 2019
Publication date	Jan 3, 2023
Grant date	Jan 3, 2023

Abstract

A system and method of heating a workpiece to a desired temperature is disclosed. This system and method consider the physical limitations of the temperature device, such as time lag, temperature offset, and calibration, in creating a hybrid approach that heats the workpiece more efficiently. First, the workpiece is heated using open loop control to heat the workpiece to a threshold temperature. After the threshold temperature is reach, a closed loop maintenance mode is utilized. In certain embodiments, an open loop maintenance mode is employed between the open loop warmup mode and the closed loop maintenance mode. Additionally, a method of calibrating a pyrometer using a contact thermocouple is also disclosed.

First claim

What is claimed is:

1. A system for controlling a temperature of a workpiece, comprising:
a temperature sensor;
a heating element; and
a controller, in communication with the temperature sensor and the heating element, wherein the controller comprises a processing unit and a memory device, wherein the memory device comprises instructions, which when executed by the processing unit, enable the controller to:
operate in an open loop warmup mode, wherein the controller uses open loop control to heat the workpiece until a threshold temperature is reached; and
operate in closed loop maintenance mode, wherein the controller uses closed loop control to maintain the temperature of the workpiece at a target temperature, wherein the temperature sensor is used in both open loop warmup mode and closed loop maintenance mode.

2. The system of claim 1 , wherein the temperature sensor has a time lag, wherein time lag is defined as a time between a change in the temperature of the workpiece and a time that the change in temperature is measured by the temperature sensor, and the memory device further comprises instructions, which when executed by the processing unit, enable the controller to:
operate in an open loop maintenance mode after the threshold temperature is reached, wherein the controller uses open loop control to roughly maintain the temperature of the workpiece, wherein the temperature of the workpiece may deviate from the threshold temperature by up to 20° C.; and
switch from open loop maintenance mode to the closed loop maintenance mode after a time duration.

3. The system of claim 2 , wherein the time duration is at least as long as the time lag.

4. The system of claim 1 , wherein the threshold temperature is selected such that the temperature of the workpiece does not exceed the target temperature during the open loop warmup mode.

5. The system of claim 1 , wherein operating in the closed loop maintenance mode comprises:
sampling an output of the temperature sensor;
correcting for a temperature offset, if any, of the temperature sensor;
compensating for a time lag, if any, of the temperature sensor wherein time lag is defined as a time between a change in the temperature of the workpiece and a time that the change in temperature is measured by the temperature sensor; and
using a corrected and compensated output of the temperature sensor as an input to a proportional-integral-derivative control loop to determine an output to the heating element.

6. The system of claim 5 , wherein the compensating for the time lag comprises utilizing an inverse low pass filter, wherein a time constant of the inverse low pass filter is equal to the time lag of the temperature sensor.

7. The system of claim 1 , wherein the temperature sensor is a contact thermocouple.

8. The system of claim 1 , wherein the temperature sensor is a pyrometer.

9. A method of heating a workpiece to a target temperature, comprising:
operating in an open loop warmup mode, wherein a controller uses open loop control to control a heating element until a threshold temperature is reached; and
operating in a closed loop maintenance mode, wherein the controller uses closed loop control to maintain a temperature of the workpiece at the target temperature based on measurements from a temperature sensor, wherein the temperature sensor is also used in the open loop warmup mode.

10. The method of claim 9 , further comprising:
operating in an open loop maintenance mode, wherein the controller uses open loop control to roughly maintain a temperature of the workpiece for a time duration before switching to the closed loop maintenance mode, wherein the temperature of the workpiece may deviate from the threshold temperature by up to 20° C.

11. The method of claim 10 , wherein the temperature sensor has a time lag, wherein time lag is defined as a time between a change in the temperature of the workpiece and a time that the change in temperature is measured by the temperature sensor, and the time duration is at least as long as the time lag.

12. The method of claim 9 , wherein operating in closed loop maintenance mode comprises:
sampling an output of the temperature sensor;
correcting for a temperature offset, if any, of the temperature sensor;
compensating for a time lag, if any, of the temperature sensor wherein time lag is defined as a time between a change in the temperature of the workpiece and a time that the change in temperature is measured by the temperature sensor; and
using a corrected and compensated output of the temperature sensor as an input to a proportional-integral-derivative control loop to determine an output to the heating element.

13. The method of claim 12 , wherein the compensating for the time lag comprises utilizing an inverse low pass filter, wherein a time constant of the inverse low pass filter is equal to the time lag of the temperature sensor.

14. The method of claim 9 , wherein the temperature sensor comprises a pyrometer, the method further comprising:
calibrating the pyrometer, prior to the open loop warmup mode, using a contact thermocouple by:
heating a workpiece to a known temperature as determined by the contact thermocouple;
dwelling at the known temperature for a time duration greater than a time lag of the contact thermocouple wherein time lag is defined as a time between a change in the temperature of the workpiece and a time that the change in temperature is measured by the contact thermocouple; and
correlating an output of the pyrometer to the known temperature determined by the contact thermocouple.

15. A non-transitory computer readable media, comprising instructions, which when executed by a controller, enable the controller to:
operate in an open loop warmup mode, wherein the controller uses open loop control to heat a workpiece using a heating element until a threshold temperature is reached as measured by a temperature sensor; and
operate in closed loop maintenance mode, wherein the controller uses closed loop control to maintain a temperature of the workpiece at a target temperature based on measurements by the temperature sensor.

16. The non-transitory computer readable media of claim 15 , wherein the temperature sensor has a time lag, wherein time lag is defined as a time between a change in the temperature of the workpiece and a time that the change in temperature is measured by the temperature sensor, and the non-transitory computer readable media further comprises instructions, which when executed by the controller, enable the controller to:
operate in an open loop maintenance mode after the threshold temperature is reached, wherein the controller uses open loop control to roughly maintain the temperature of the workpiece, wherein the temperature of the workpiece may deviate from the threshold temperature by up to 20° C.; and
switch from open loop maintenance mode to closed loop maintenance after a time duration.

17. The non-transitory computer readable media of claim 16 , wherein the time duration is at least as long as the time lag.

18. The non-transitory computer readable media of claim 15 , wherein the threshold temperature is selected such that the temperature of the workpiece does not exceed the target temperature during the open loop warmup mode.

19. The non-transitory computer readable media of claim 15 , wherein operating in the closed loop maintenance mode comprises:
sampling an output of the temperature sensor;
correcting for a temperature offset, if any, of the temperature sensor;
compensating f

Assignees

• Applied Materials Inc

Inventors

• Strassner James D
• Pomerleau Bradley M
• Lischer D Jeffrey
• Sun Dawei
• ROHRER Michael Paul

Classifications

• H10P95/00

  Generic processes or apparatus for manufacture or treatments not covered by the other groups of this subclass · CPC title

• H10P72/0602 Primary

  Temperature monitoring · CPC title

• G05D23/1904

  variable in time · CPC title

• G05D23/22

  the sensing element being a thermocouple · CPC title

• G05D23/02

  with sensing element expanding and contracting in response to changes of temperature (G05D23/13 takes precedence) · CPC title