Preheat processes for millisecond anneal system
US-12476151-B2 · Nov 18, 2025 · US
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Pfahler Christian patents
Pfahler Christian is listed as an inventor on 18 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Pfahler Christian |
| Total patents | 18 |
| First publication | Jul 6, 2017 |
| Latest publication | Nov 18, 2025 |
Notable patents
Publications ranked by popularity score, then publication date.
Gas delivery system for a thermal processing apparatus
US-2025167008-A1 · May 22, 2025 · US
Preheat Processes for Millisecond Anneal System
US-2024304502-A1 · Sep 12, 2024 · US
Preheat processes for millisecond anneal system
US-12027427-B2 · Jul 2, 2024 · US
Apparatus for hydrogen assisted atmospheric radical oxidation
US-12014920-B2 · Jun 18, 2024 · US
Apparatus for Hydrogen Assisted Atmospheric Radical Oxidation
US-2023099054-A1 · Mar 30, 2023 · US
Hydrogen assisted atmospheric radical oxidation
US-11521847-B2 · Dec 6, 2022 · US
Gas flow control for millisecond anneal system
US-11255606-B2 · Feb 22, 2022 · US
Features for Improving Process Uniformity in a Millisecond Anneal System
US-2020402811-A1 · Dec 24, 2020 · US
Hydrogen Assisted Atmospheric Radical Oxidation
US-2020350158-A1 · Nov 5, 2020 · US
Recent patents
Latest publications not already listed above.
Preheat Processes for Millisecond Anneal System
US-2020350217-A1 · Nov 5, 2020 · US
Features for improving process uniformity in a millisecond anneal system
US-10770309-B2 · Sep 8, 2020 · US
Preheat processes for millisecond anneal system
US-10727140-B2 · Jul 28, 2020 · US
Checking device for data preparation unit
US-10402291-B2 · Sep 3, 2019 · US
Checking device for data preparation unit
US-2017337111-A1 · Nov 23, 2017 · US
Features for Improving Process Uniformity in a Millisecond Anneal System
US-2017194163-A1 · Jul 6, 2017 · US
Gas Flow Control for Millisecond Anneal System
US-2017191759-A1 · Jul 6, 2017 · US
Preheat Processes for Millisecond Anneal System
US-2017194220-A1 · Jul 6, 2017 · US
Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Mattson Tech Inc | 16 |
| Beijing E Town Semiconductor Tech Co Ltd | 13 |
| Bosch Gmbh Robert | 2 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| H10P72/0462 | 16 |
| H10P72/0436 | 16 |
| H10P72/0431 | 15 |
| H10P72/0602 | 12 |
| H01L21/67115 | 11 |