Plasma processing system workpiece carrier with thermally isolated heater plate blocks
US-11322337-B2 · May 3, 2022 · US
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Palagashvili David patents
Palagashvili David is listed as an inventor on 11 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Palagashvili David |
| Total patents | 11 |
| First publication | May 14, 2015 |
| Latest publication | May 3, 2022 |
Notable patents
Publications ranked by popularity score, then publication date.
Chamber apparatus for chemical etching of dielectric materials
US-11302520-B2 · Apr 12, 2022 · US
Shielded lid heater assembly
US-10083816-B2 · Sep 25, 2018 · US
Component temperature control by coolant flow control and heater duty cycle control
US-9639097-B2 · May 2, 2017 · US
Etch rate and critical dimension uniformity by selection of focus ring material
US-2017011891-A1 · Jan 12, 2017 · US
Apparatus for controlling the flow of a gas in a process chamber
US-9443753-B2 · Sep 13, 2016 · US
Shielded lid heater assembly
US-2016254123-A1 · Sep 1, 2016 · US
Shielded lid heater assembly
US-9362148-B2 · Jun 7, 2016 · US
Chamber apparatus for chemical etching of dielectric materials
US-2015380220-A1 · Dec 31, 2015 · US
Plasma reactor electrostatic chuck with cooled process ring and heated workpiece support surface
US-9070536-B2 · Jun 30, 2015 · US
Recent patents
Latest publications not already listed above.
Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Applied Materials Inc | 10 |
| Willwerth Michael D | 2 |
| Palagashvili David | 2 |
| Applied Materials Inc | 1 |
| Todorow Valentin N | 1 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| H01J37/32522 | 7 |
| H01J37/32724 | 6 |
| H10P72/0421 | 5 |
| H01J2237/334 | 5 |
| H01J37/32935 | 5 |