Shielded lid heater assembly

Patent metadata

Field	Value
Publication number	US-10083816-B2
Application number	US-201615149923-A
Country	US
Kind code	B2
Filing date	May 9, 2016
Priority date	Mar 21, 2008
Publication date	Sep 25, 2018
Grant date	Sep 25, 2018

Abstract

A shielded lid heater lid heater suitable for use with a plasma processing chamber, a plasma processing chamber having a shielded lid heater and a method for plasma processing are provided. The method and apparatus enhances positional control of plasma location within a plasma processing chamber, and may be utilized in etch, deposition, implant, and thermal processing systems, among other applications where the control of plasma location is desirable. In one embodiment, a process for tuning a plasma processing chamber is provided that include determining a position of a plasma within the processing chamber, selecting an inductance and/or position of an inductor coil coupled to a lid heater that shifts the plasma location from the determined position to a target position, and plasma processing a substrate with the inductor coil having the selected inductance and/or position.

First claim

What is claimed is:

1. A process for tuning a plasma processing chamber, comprising:
determining a position of a plasma within a processing chamber;
selecting an inductance characteristic of a lid heater disposed on the processing chamber that shifts a plasma location from the determined plasma position to a target plasma position; and
plasma processing a substrate with the inductor coil having the selected inductance and/or position.

2. The process of claim 1 , wherein plasma processing further comprises:
performing a process on the substrate selected from the group consisting of etching, chemical vapor deposition, physical vapor deposition, implanting, nitriding, annealing, plasma treating, and ashing.

3. The process of claim 1 , wherein the lid heater includes an annular thermally conductive base having a plurality of inwardly extending fingers forming a spoke-like pattern.

4. The process of claim 3 , wherein the inductor coil is electrically isolated from the conductive base.

5. The process of claim 3 , wherein the inductor coil is electrically coupled to the conductive base.

6. The process of claim 1 , wherein determining the position of the plasma comprises:
measuring a characteristic of the plasma, by optical methods, utilizing sensors, empirical dates, examination of processing results, modeling or other suitable manner.

7. The process of claim 1 , wherein selecting the inductance characteristic comprises:
varying the inductance value of a variable inductor between process runs or in situ processing to produce a desired effect on the plasma, wherein the variable inductor is sized to provide an inductance tailored to influence the magnetic and electric fields within the chamber.

8. The process of claim 1 , wherein selecting the inductance characteristic comprises:
changing an inductance of the inductor coil.

9. The process of claim 1 , wherein selecting the inductance characteristic comprises:
changing a position of the inductor coil.

10. A process for tuning a plasma processing chamber, comprising:
plasma processing a first substrate in the processing chamber, the processing chamber having a heater disposed on a lid of the processing chamber, the heater having a tunable inductance characteristic; and
plasma processing a second substrate in the processing chamber while heater has an inductance characteristic different than an inductance characteristic of the heater when processing the first substrate.

11. The process of claim 10 further comprising:
determining a position of a plasma within the processing chamber while processing the first substrate; and
selecting an inductance of an inductor coil coupled to a heater that shifts a plasma location from the determined plasma position to a target plasma position.

12. The process of claim 10 further comprising:
determining a position of a plasma within the processing chamber while processing the first substrate; and
selecting a position of an inductor coil coupled to a heater that shifts a plasma location from the determined plasma position to a target plasma position.

13. The process of claim 10 , wherein plasma processing the first substrate further comprises:
performing a process on the substrate selected from the group consisting of etching, chemical vapor deposition, physical vapor deposition, implanting, nitriding, annealing, plasma treating, and ashing.

14. The process of claim 10 , wherein the lid heater includes an annular thermally conductive base having a plurality of inwardly extending fingers forming a spoke-like pattern.

15. The process of claim 14 , wherein the inductor coil is electrically isolated from the conductive base.

16. The process of claim 10 further comprising:
measuring a characteristic of the plasma, by optical methods, utilizing sensors, empirical dates, examination of processing results, modeling or other suitable manner; and
changing the inductance characteristic of the inductor coil in response to the measured characteristic of the plasma.

17. The process of claim 10 , wherein changing the inductance characteristic of the heater comprises:
varying the inductance value of a variable inductor between process runs or in situ processing to produce a desired effect on the plasma, wherein the variable inductor is sized to provide an inductance tailored to influence the magnetic and electric fields within the chamber.

18. A process for tuning a plasma processing chamber, comprising:
plasma processing a first substrate in the processing chamber, the processing chamber having a heater disposed on a lid of the processing chamber, the heater having a tunable inductance characteristic;
measuring a characteristic of the plasma, by optical methods, utilizing sensors, empirical dates, examination of processing results, modeling or other suitable manner; and
changing the inductance characteristic of the inductor coil in response to the measured characteristic of the plasma.

19. The process of claim 18 , wherein changing the inductance characteristic comprises:
changing an inductance of the inductor coil.

20. The process of claim 18 , wherein changing the inductance characteristic comprises:
changing a position of the inductor coil.

Assignees

• Applied Materials Inc

Inventors

• Willwerth Michael D
• Palagashvili David
• Todorow Valentin N
• Yuen Stephen

Classifications

• H10P72/0421

  for drying etching · CPC title

• H10P72/0402

  Apparatus for fluid treatment (H10P72/0441, H10P72/0448 take precedence) · CPC title

• H01J37/32321

  Discharge generated by other radiation (H01J37/32055, H01J37/32073, H01J37/32082, H01J37/32192, H01J37/32348 take precedence) · CPC title

• H01J37/321 Primary

  the radio frequency energy being inductively coupled to the plasma · CPC title

• H05B6/02

  Induction heating · CPC title