Inductively coupled plasma reactor having RF phase control and methods of use thereof
US-9378930-B2 · Jun 28, 2016 · US
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Todorow Valentin N patents
Todorow Valentin N holds 2 patents in our database, with recent filings and technology areas summarized below.
| Metric | Value |
|---|---|
| Total patents | 2 |
| Recent patents | 0 |
| First publication | Jun 7, 2016 |
| Latest publication | Jun 28, 2016 |
Filing trend
Year-over-year patent counts for this assignee.
Not enough yearly data to assess filing trend yet.
| Year | Patents |
|---|---|
| 2016 | 2 |
| Year | Patents |
|---|---|
| 2016 | 2 |
Recent patents
Latest publications where this party is an assignee.
Shielded lid heater assembly
US-9362148-B2 · Jun 7, 2016 · US
Notable patents
Representative or frequently cited publications from precomputed assignee stats.
Inductively coupled plasma reactor having RF phase control and methods of use thereof
US-9378930-B2 · Jun 28, 2016 · US
Shielded lid heater assembly
US-9362148-B2 · Jun 7, 2016 · US
Top CPC classifications
Most common classification codes in this portfolio.
| CPC | Patents |
|---|---|
| H10P72/0421 | 2 |
| H01L21/67069 | 2 |
| H01J37/321 | 2 |
| H10P72/0402 | 1 |
| H05B6/108 | 1 |
Technology areas
Mapped technology topics for this assignee.
| Technology | Patents |
|---|---|
| Electricity | 2 |
| Chemistry & Metallurgy | 1 |