Tunable temperature controlled substrate support assembly
US-12334385-B2 · Jun 17, 2025 · US
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Marohl Dan A patents
Marohl Dan A is listed as an inventor on 22 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Marohl Dan A |
| Total patents | 22 |
| First publication | Mar 12, 2015 |
| Latest publication | Jun 17, 2025 |
Notable patents
Publications ranked by popularity score, then publication date.
Tunable temperature controlled substrate support assembly
US-2024321620-A1 · Sep 26, 2024 · US
Tunable temperature controlled substrate support assembly
US-12009244-B2 · Jun 11, 2024 · US
Consolidated filter arrangement for devices in an RF environment
US-11870252-B2 · Jan 9, 2024 · US
Substrate carrier using a proportional thermal fluid delivery system
US-11615973-B2 · Mar 28, 2023 · US
Consolidated filter arrangement for devices in an rf environment
US-2021059018-A1 · Feb 25, 2021 · US
Consolidated filter arrangement for devices in an RF environment
US-10820378-B2 · Oct 27, 2020 · US
Consolidated filter arrangement for devices in an RF environment
US-10820377-B2 · Oct 27, 2020 · US
Tunable temperature controlled substrate support assembly
US-2020152500-A1 · May 14, 2020 · US
Substrate carrier using a proportional thermal fluid delivery system
US-2020051839-A1 · Feb 13, 2020 · US
Recent patents
Latest publications not already listed above.
Power deposition control in inductively coupled plasma (ICP) reactors
US-10553398-B2 · Feb 4, 2020 · US
Tunable temperature controlled substrate support assembly
US-10535544-B2 · Jan 14, 2020 · US
Substrate carrier using a proportional thermal fluid delivery system
US-10490429-B2 · Nov 26, 2019 · US
Consolidated filter arrangement for devices in an rf environment
US-2018160475-A1 · Jun 7, 2018 · US
Consolidated filter arrangement for devices in an rf environment
US-2018160474-A1 · Jun 7, 2018 · US
Consolidated filter arrangement for devices in an RF environment
US-9872341-B2 · Jan 16, 2018 · US
Tunable temperature controlled substrate support assembly
US-2016329231-A1 · Nov 10, 2016 · US
Tunable temperature controlled substrate support assembly
US-9472435-B2 · Oct 18, 2016 · US
Control architecture for devices in an rf environment
US-2016149733-A1 · May 26, 2016 · US
Consolidated filter arrangement for devices in an rf environment
US-2016149482-A1 · May 26, 2016 · US
Tunable temperature controlled substrate support assembly
US-2016027678-A1 · Jan 28, 2016 · US
Power deposition control in inductively coupled plasma (icp) reactors
US-2015068682-A1 · Mar 12, 2015 · US
Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Applied Materials Inc | 22 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| H05B1/0233 | 16 |
| H10P72/0602 | 11 |
| H10P72/72 | 11 |
| H01L21/67248 | 10 |
| H01L21/6831 | 9 |