Tunable temperature controlled substrate support assembly

Patent metadata

Field	Value
Publication number	US-10535544-B2
Application number	US-201615212946-A
Country	US
Kind code	B2
Filing date	Jul 18, 2016
Priority date	Jul 23, 2014
Publication date	Jan 14, 2020
Grant date	Jan 14, 2020

Abstract

Implementations described herein provide a substrate support assembly which enables both lateral and azimuthal tuning of the heat transfer between an electrostatic chuck and a heating assembly. The substrate support assembly comprises a body having a substrate support surface and a lower surface, one or more main resistive heaters disposed in the body, a plurality of spatially tunable heaters disposed in the body, and a spatially tunable heater controller coupled to the plurality of spatially tunable heaters, the spatially tunable heater controller configured to independently control an output one of the plurality of spatially tunable heaters relative to another of the plurality of spatially tunable heaters.

First claim

We claim:

1. A substrate support assembly, comprising:
a body having a substrate support formed therein;
a heater assembly formed underlying the substrate support and comprising one or more main resistive heaters embedded in the body and thermally coupled to a plurality of tunable heaters disposed in a corresponding plurality of cells in the body, wherein each cell has sidewalls comprising gaps or materials acting as thermal chokes between adjacent cells to reduce thermal conduction between the adjacent tunable heaters;
a controller coupled to the plurality of tunable heaters, the controller configured to independently control an output for each tunable heater relative another of the tunable heaters, wherein the controller comprises:
an electrical controller, wherein the electrical controller is configured to provide individually controllable power to each tunable heater; and
an optical controller optically connected to an external controller and configured to transmit instructions to the electrical controller for powering each tunable heater.

2. The substrate support assembly of claim 1 , wherein the body is an electrostatic chuck.

3. The substrate support assembly of claim 1 , wherein the controller has an RF filter isolating the controller from the tunable heaters.

4. The substrate support assembly of claim 3 , further comprising:
a fiber optic interface coupling the optical controller to the electrical controller wherein the optical interface is not subject to electromagnetic interference or radio frequency (RF) energy.

5. The substrate support assembly of claim 4 , wherein fiber optic interface is a fiber optic cable.

6. The substrate support assembly of claim 4 , wherein the electrical controller further comprises:
an optical converter is coupled to the optical controller, wherein the optical converter is configured to provide signals controlling the function of the tunable heaters from the optical controller.

7. The substrate support assembly of claim 4 , wherein the optical controller controls the temperature by adjusting the power parameters for each individual tunable heater.

8. The substrate support assembly of claim 1 , wherein the controller is internal to the body.

9. The substrate support assembly of claim 1 , wherein the controller is external to the body.

10. The substrate support assembly of claim 1 , wherein the electrical controller further comprises:
a plurality of switches, wherein each switch accepts a positive power lead to control individual tunable heaters.

11. The substrate support assembly of claim 10 , wherein the optical controller manages the switches via a fiber optic interface to the electrical controller.

Assignees

• Applied Materials Inc

Inventors

• Parkhe Vijay D
• Babayan Steven E
• Makhratchev Konstantin
• Guo Zhiqiang
• Sommer Phillip R
• Marohl Dan A

Classifications

• H10P72/0602

  Temperature monitoring · CPC title

• H10P72/0432 Primary

  mainly by conduction · CPC title

• H10P72/72

  using electrostatic chucks · CPC title

• H10P72/722 Primary

  Details of electrostatic chucks · CPC title

• H05B1/023

  Industrial applications · CPC title