Consolidated filter arrangement for devices in an RF environment

Patent metadata

Field	Value
Publication number	US-11870252-B2
Application number	US-202017080579-A
Country	US
Kind code	B2
Filing date	Oct 26, 2020
Priority date	Nov 26, 2014
Publication date	Jan 9, 2024
Grant date	Jan 9, 2024

Abstract

A method includes generating, external to a radio frequency (RF) environment and based on a process recipe, a first signal and a second signal. The method further includes converting the first signal into an alternative signal and transmitting, over a non-conductive communication link, the alternative signal to a converter within the RF environment within a processing chamber of a substrate processing system. The method further includes converting the alternative signal into a third signal by the converter inside the RF environment within the processing chamber. The method further includes controlling a first plurality of elements disposed within the RF environment within the processing chamber via one or more first devices disposed within the RF environment within the processing chamber using the third signal and controlling a second plurality of elements of the substrate processing system via one or more second devices of the substrate processing system using the second signal.

First claim

What is claimed is:

1. A method comprising:
generating, by a processing device that is external to a radio frequency (RF) environment and based on a process recipe, a first signal and a second signal;
converting the first signal into an alternative signal;
transmitting, over a non-conductive communication link, the alternative signal to a converter within the RF environment within a processing chamber of a substrate processing system;
converting the alternative signal into a third signal by the converter inside the RF environment within the processing chamber;
controlling a first plurality of elements disposed within the RF environment within the processing chamber via one or more first devices disposed within the RF environment within the processing chamber using the third signal; and
controlling a second plurality of elements of the substrate processing system via one or more second devices of the substrate processing system using the second signal, the second devices and the second plurality of elements being separate from the processing device, wherein at least one of the one or more second devices is configured to control power provided to one or more of the second plurality of elements, wherein the one or more second devices and the second plurality of elements are disposed outside of the processing chamber and are disposed outside of the RF environment, and wherein the first plurality of elements, via the one or more first devices and a first power supply, and the second plurality of elements, via the one or more second devices and a second power supply, are controlled substantially simultaneously by the processing device based on the process recipe.

2. The method of claim 1 , wherein the one or more first devices disposed in the RF environment comprise one or more pulse width modulation (PWM) circuits.

3. The method of claim 1 , wherein the first plurality of elements are disposed within an electrostatic chuck, and wherein the first plurality of elements are configured to elevate a first temperature of a substrate support assembly to a second temperature specified in the process recipe.

4. The method of claim 1 , wherein a plurality of temperature zones are laterally separated and are associated with the first plurality of elements, wherein one or more of the temperature zones to be heated relative to each other by using the first plurality of elements.

5. The method of claim 1 , wherein the one or more first devices are disposed in an electrically conductive housing.

6. The method of claim 1 further comprising receiving, via a user interface, user input comprising the process recipe.

7. The method of claim 1 , wherein the first power supply is configured to perform power transmission over a power line to the first plurality of elements, wherein the power line is coupled to an RF filter to filter RF noise from the power line.

8. The method of claim 1 , wherein the at least one of the one or more second devices has switchable digital output to enable or disable the power provided to the one or more of the second plurality of elements.

9. The method of claim 1 , wherein the at least one of the one or more second devices has a switchable analog input to regulate the power provided to the one or more of the second plurality of elements.

10. The method of claim 1 further comprising:
receiving sensor data from one or more sensors disposed in the RF environment; and
causing performance of one or more corrective actions based on the sensor data.

11. A system comprising:
one or more first devices disposed in a radio frequency (RF) environment, wherein each of the one or more first devices are operably coupled to a corresponding element of a first plurality of elements disposed in the RF environment to control first power provided to the corresponding element; and
a converter disposed in the RF environment and operably coupled to the one or more first devices to provide a non-conductive communication link between the one or more first devices and a controller outside of the RF environment, the controller comprising a real-time logic control, wherein the controller is to receive a process recipe via user input and is to control the first plurality of elements disposed in the RF environment, via the one or more first devices and a first power supply, and a second plurality of elements disposed outside of the RF environment, via one or more second devices disposed outside of the RF environment and a second power supply, substantially simultaneously based on the process recipe, wherein at least one of the one or more second devices is configured to control second power provided to one or more of the second plurality of elements.

12. The system of claim 11 , wherein the one or more first devices disposed in the RF environment comprise one or more pulse width modulation (PWM) circuits.

13. The system of claim 11 , wherein the first plurality of elements are disposed within an electrostatic chuck, and wherein the first plurality of elements are configured to elevate a first temperature of a substrate support assembly to a second temperature specified in the process recipe.

14. The system of claim 11 , wherein a plurality of temperature zones are laterally separated and are associated with the first plurality of elements, wherein one or more of the temperature zones to be heated relative to each other by using the first plurality of elements.

15. The system of claim 11 , wherein the one or more first devices are disposed in an electrically conductive housing.

16. The system of claim 11 , wherein the first power supply is configured to perform power transmission over a power line to the first plurality of elements, wherein the power line is coupled to an RF filter to filter RF noise from the power line.

17. The system of claim 11 , wherein the at least one of the one or more second devices has switchable digital output to enable or disable the second power provided to the one or more of the second plurality of elements.

18. The system of claim 11 , wherein the at least one of the one or more second devices has a switchable analog input to regulate the second power provided to the one or more of the second plurality of elements.

19. The system of claim 11 , wherein the controller is to receive sensor data from one or more sensors disposed in the RF environment and the controller is to cause performance of a corrective action based on the sensor data.

20. The system of claim 19 , wherein the controller is further to control the first plurality of elements disposed in the RF environment and the second plurality of elements disposed outside of the RF environment based on the sensor data.

Assignees

• Applied Materials Inc

Inventors

• Criminale Phillip
• Babayan Steve E
• Edmonson Scott
• Sommer Phillip R
• Marohl Dan A
• Blank Chris

Classifications

• H02J2105/42

  Home appliances · CPC title

• H02J13/1335

  involving a local wireless network, e.g. Wi-Fi®, ZigBee® or Bluetooth® · CPC title

• H02J13/1331

  using wireless data transmission · CPC title

• H02J13/14

  the power network being locally controlled, e.g. home energy management systems [HEMS] · CPC title

• H02J13/1323 Primary

  using optical fibres · CPC title