Flexible chuck with strain gauge
US-2026096383-A1 · Apr 2, 2026 · US
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Lu Xiaoming patents
Lu Xiaoming is listed as an inventor on 32 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Lu Xiaoming |
| Total patents | 32 |
| First publication | Feb 3, 2015 |
| Latest publication | Apr 2, 2026 |
Notable patents
Publications ranked by popularity score, then publication date.
Method of shaping a surface, shaping system, and method of manufacturing an article
US-2025216775-A1 · Jul 3, 2025 · US
Method of shaping a surface, shaping system, and method of manufacturing an article
US-12282251-B2 · Apr 22, 2025 · US
Planarization process, planarization system, and method of manufacturing an article
US-2024321586-A1 · Sep 26, 2024 · US
Planarization process, planarization system, and method of manufacturing an article
US-12027373-B2 · Jul 2, 2024 · US
Systems, devices, and methods for registering a superstrate of an imprint tool
US-2024178042-A1 · May 30, 2024 · US
System and method for shaping a film with a scaled calibration measurement parameter
US-11994797-B2 · May 28, 2024 · US
Planarization apparatus, planarization process, and method of manufacturing an article
US-11869813-B2 · Jan 9, 2024 · US
Method of shaping a surface, shaping system, and method of manufacuring an article
US-2023095200-A1 · Mar 30, 2023 · US
Method of determining the initial contact point for partial fields and method of shaping a surface
US-11614693-B2 · Mar 28, 2023 · US
Recent patents
Latest publications not already listed above.
Planarization apparatus including superstrate chuck with bendable periphery
US-11587795-B2 · Feb 21, 2023 · US
Method of Determining the Initial Contact Point for Partial Fields and Method of Shaping a Surface
US-2023014261-A1 · Jan 19, 2023 · US
Planarization process, planarization system, and method of manufacturing an article
US-2022384205-A1 · Dec 1, 2022 · US
Planarization apparatus, planarization process, and method of manufacturing an article
US-2022189832-A1 · Jun 16, 2022 · US
System and Method for Shaping a Film with a Scaled Calibration Measurement Parameter
US-2022128901-A1 · Apr 28, 2022 · US
Planarization apparatus, planarization process, and method of manufacturing an article
US-2022102156-A1 · Mar 31, 2022 · US
Strain and kinetics control during separation phase of imprint process
US-11161280-B2 · Nov 2, 2021 · US
System and methods for nanoimprint lithography
US-10654216-B2 · May 19, 2020 · US
Active metrology frame and thermal frame temperature control in imprint lithography
US-10444624-B1 · Oct 15, 2019 · US
Alignment control in nanoimprint lithography based on real-time system identification
US-10409178-B2 · Sep 10, 2019 · US
Strain and Kinetics Control During Separation Phase of Imprint Process
US-2019232533-A1 · Aug 1, 2019 · US
Imprint apparatus and article manufacturing method
US-10335984-B2 · Jul 2, 2019 · US
Alignment control in nanoimprint lithography based on real-time system identification
US-2019187575-A1 · Jun 20, 2019 · US
Imprint apparatus and method of manufacturing article
US-10248018-B2 · Apr 2, 2019 · US
Imprint apparatus, and method of manufacturing article
US-10199244-B2 · Feb 5, 2019 · US
System and methods for nanoimprint lithography
US-2017282439-A1 · Oct 5, 2017 · US
Imprint apparatus, and method of manufacturing article
US-2017047234-A1 · Feb 16, 2017 · US
Imprint apparatus and article manufacturing method
US-2017028598-A1 · Feb 2, 2017 · US
Imprint apparatus and method of manufacturing article
US-2016288403-A1 · Oct 6, 2016 · US
High throughput imprint based on contact line motion tracking control
US-9090014-B2 · Jul 28, 2015 · US
Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Canon Kk | 27 |
| Molecular Imprints Inc | 5 |
| Canon Nanotechnologies Inc | 3 |
| Lu Xiaoming | 1 |
| Schumaker Philip D | 1 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| G03F7/0002 | 26 |
| H10P72/0428 | 9 |
| H10P95/06 | 8 |
| H10P72/0436 | 8 |
| H10P95/08 | 8 |