Substrate processing apparatus, substrate processing method, and chemical liquid
US-12371796-B2 · Jul 29, 2025 · US
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Kosugi Hitoshi patents
Kosugi Hitoshi is listed as an inventor on 14 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Kosugi Hitoshi |
| Total patents | 14 |
| First publication | Aug 2, 2018 |
| Latest publication | Jul 29, 2025 |
Notable patents
Publications ranked by popularity score, then publication date.
System and methods for wafer drying
US-12002687-B2 · Jun 4, 2024 · US
System and Methods for Wafer Drying
US-2023092779-A1 · Mar 23, 2023 · US
Substrate processing apparatus, substrate processing method, and chemical liquid
US-2023041889-A1 · Feb 9, 2023 · US
Substrate processing apparatus, substrate processing method, and chemical liquid
US-11545367-B2 · Jan 3, 2023 · US
System and methods for wafer drying
US-11515178-B2 · Nov 29, 2022 · US
Substrate liquid treatment apparatus
US-11309194-B2 · Apr 19, 2022 · US
Substrate processing method and substrate processing apparatus
US-2022059357-A1 · Feb 24, 2022 · US
Substrate processing method and substrate processing apparatus
US-11217451-B2 · Jan 4, 2022 · US
System and Methods for Wafer Drying
US-2021287919-A1 · Sep 16, 2021 · US
Recent patents
Latest publications not already listed above.
Substrate processing apparatus, substrate processing method, and chemical liquid
US-2021233780-A1 · Jul 29, 2021 · US
Substrate processing method and substrate processing apparatus
US-2020234998-A1 · Jul 23, 2020 · US
Substrate processing apparatus and substrate processing method
US-2020126817-A1 · Apr 23, 2020 · US
Substrate liquid treatment apparatus
US-2018218924-A1 · Aug 2, 2018 · US
Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Tokyo Electron Ltd | 14 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| H10P72/0408 | 9 |
| H10P70/20 | 8 |
| H10P72/0424 | 8 |
| H10P72/0414 | 8 |
| H10P72/0406 | 8 |