Composition for forming resist overlayer film for EUV lithography
US-11675269-B2 · Jun 13, 2023 · US
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Ho Bangching patents
Ho Bangching is listed as an inventor on 8 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Ho Bangching |
| Total patents | 8 |
| First publication | Mar 19, 2015 |
| Latest publication | Jun 13, 2023 |
Notable patents
Publications ranked by popularity score, then publication date.
Composition for forming resist underlayer film with reduced outgassing
US-10437150-B2 · Oct 8, 2019 · US
Silicon-containing EUV resist underlayer film-forming composition including additive
US-9627217-B2 · Apr 18, 2017 · US
Resist overlayer film forming composition for lithography and method for manufacturing semiconductor device using the same
US-9494864-B2 · Nov 15, 2016 · US
Resist underlayer film-forming composition for EUV lithography containing condensation polymer
US-9240327-B2 · Jan 19, 2016 · US
Resist overlayer film forming composition for lithography and method for manufacturing semiconductor device using the same
US-2015248057-A1 · Sep 3, 2015 · US
Composition for forming resist underlayer film for EUV lithography
US-9005873-B2 · Apr 14, 2015 · US
Silicon-containing euv resist underlayer film-forming composition including additive
US-2015079792-A1 · Mar 19, 2015 · US
Recent patents
Latest publications not already listed above.
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Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Nissan Chemical Ind Ltd | 8 |
| Sakamoto Rikimaru | 3 |
| Ho Bangching | 3 |
| Endo Takafumi | 3 |
| Fujitani Noriaki | 1 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| G03F7/091 | 8 |
| G03F7/11 | 5 |
| H10P76/2041 | 5 |
| H10P50/692 | 4 |
| G03F7/094 | 4 |