Composition for forming resist overlayer film for EUV lithography
US-11675269-B2 · Jun 13, 2023 · US
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Endo Takafumi patents
Endo Takafumi holds 4 patents in our database, with recent filings and technology areas summarized below.
| Metric | Value |
|---|---|
| Total patents | 4 |
| Recent patents | 0 |
| First publication | Feb 24, 2015 |
| Latest publication | Jun 13, 2023 |
Filing trend
Year-over-year patent counts for this assignee.
Recent patents
Latest publications where this party is an assignee.
Composition for forming resist underlayer film with reduced outgassing
US-10437150-B2 · Oct 8, 2019 · US
Resist underlayer film-forming composition for EUV lithography containing condensation polymer
US-9240327-B2 · Jan 19, 2016 · US
Resist underlayer film forming composition and method for forming resist pattern using the same
US-8962234-B2 · Feb 24, 2015 · US
Notable patents
Representative or frequently cited publications from precomputed assignee stats.
Composition for forming resist overlayer film for EUV lithography
US-11675269-B2 · Jun 13, 2023 · US
Composition for forming resist underlayer film with reduced outgassing
US-10437150-B2 · Oct 8, 2019 · US
Resist underlayer film-forming composition for EUV lithography containing condensation polymer
US-9240327-B2 · Jan 19, 2016 · US
Resist underlayer film forming composition and method for forming resist pattern using the same
US-8962234-B2 · Feb 24, 2015 · US
Top CPC classifications
Most common classification codes in this portfolio.
| CPC | Patents |
|---|---|
| G03F7/11 | 3 |
| G03F7/091 | 3 |
| H10P76/2041 | 2 |
| H10P50/695 | 1 |
| H10P50/692 | 1 |
Technology areas
Mapped technology topics for this assignee.
| Technology | Patents |
|---|---|
| Physics | 4 |
| Chemistry & Metallurgy | 3 |
| Electricity | 2 |