Planar cavity MEMS and related structures, methods of manufacture and design structures
US-11021364-B2 · Jun 1, 2021 · US
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Herrin Russell T patents
Herrin Russell T is listed as an inventor on 26 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Herrin Russell T |
| Total patents | 26 |
| First publication | Jan 13, 2015 |
| Latest publication | Jun 1, 2021 |
Notable patents
Publications ranked by popularity score, then publication date.
Planar cavity MEMS and related structures, methods of manufacture and design structures
US-10906803-B2 · Feb 2, 2021 · US
Planar cavity mems and related structures, methods of manufacture and design structures
US-2019315619-A1 · Oct 17, 2019 · US
Planar cavity MEMS and related structures, methods of manufacture and design structures
US-10414646-B2 · Sep 17, 2019 · US
Planar cavity MEMS and related structures, methods of manufacture and design structures
US-10173889-B2 · Jan 8, 2019 · US
Planar cavity mems and related structures, methods of manufacture and design structures
US-2018319652-A1 · Nov 8, 2018 · US
Planar cavity MEMS and related structures, methods of manufacture and design structures
US-10093537-B2 · Oct 9, 2018 · US
Planar cavity mems and related structures, methods of manufacture and design structures
US-2018057357-A1 · Mar 1, 2018 · US
Planar cavity mems and related structures, methods of manufacture and design structures
US-2018050903-A1 · Feb 22, 2018 · US
Planar cavity MEMS and related structures, methods of manufacture and design structures
US-9890039-B2 · Feb 13, 2018 · US
Recent patents
Latest publications not already listed above.
Planar cavity MEMS and related structures, methods of manufacture and design structures
US-9862598-B2 · Jan 9, 2018 · US
Planar cavity MEMS and related structures, methods of manufacture and design structures
US-9815690-B2 · Nov 14, 2017 · US
Planar cavity MEMS and related structures, methods of manufacture and design structures
US-9764944-B2 · Sep 19, 2017 · US
Planar cavity MEMS and related structures, methods of manufacture and design structures
US-9493343-B2 · Nov 15, 2016 · US
Planar cavity mems and related structures, methods of manufacture and design structures
US-2016325983-A1 · Nov 10, 2016 · US
Planar cavity mems and related structures, methods of manufacture and design structures
US-2016325982-A1 · Nov 10, 2016 · US
Planar cavity MEMS and related structures, methods of manufacture and design structures
US-9406472-B2 · Aug 2, 2016 · US
Self-aligned gate electrode diffusion barriers
US-9397174-B2 · Jul 19, 2016 · US
Methods of manufacture for micro-electro-mechanical system (MEMS)
US-9330856-B2 · May 3, 2016 · US
Planar cavity mems and related structures, methods of manufacture and design structures
US-2016060099-A1 · Mar 3, 2016 · US
Planar cavity mems and related structures, methods of manufacture and design structures
US-2016060107-A1 · Mar 3, 2016 · US
Planar cavity mems and related structures, methods of manufacture and design structures
US-2016055282-A1 · Feb 25, 2016 · US
Planar cavity MEMS and related structures, methods of manufacture and design structures
US-8956903-B2 · Feb 17, 2015 · US
Planar cavity mems and related structures, methods of manufacture and design structures
US-2015041932-A1 · Feb 12, 2015 · US
Self-Aligned Gate Electrode Diffusion Barriers
US-2015035076-A1 · Feb 5, 2015 · US
Self-aligned gate electrode diffusion barriers
US-8932920-B2 · Jan 13, 2015 · US
Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| IBM | 25 |
| Herrin Russell T | 3 |
| Stamper Anthony K | 3 |
| Globalfoundries Inc | 3 |
| Jahnes Christopher V | 2 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| B81C1/00619 | 23 |
| B81C2203/0136 | 23 |
| B81B2201/014 | 23 |
| B81C1/00626 | 23 |
| B81B2203/04 | 23 |