High-voltage column with permanent magnet lens and positive wafer bias for overlay
US-2025385066-A1 · Dec 18, 2025 · US
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Gerling John patents
Gerling John is listed as an inventor on 24 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Gerling John |
| Total patents | 24 |
| First publication | Mar 12, 2015 |
| Latest publication | Dec 18, 2025 |
Notable patents
Publications ranked by popularity score, then publication date.
Ultra-high sensitivity hybrid inspection with full wafer coverage capability
US-2025316437-A1 · Oct 9, 2025 · US
Miniature electron optical column with a large field of view
US-2024014000-A1 · Jan 11, 2024 · US
Miniature hybrid electron beam column
US-2023326704-A1 · Oct 12, 2023 · US
Segmented multi-channel, backside illuminated, solid state detector with a through-hole for detecting secondary and backscattered electrons
US-11699607-B2 · Jul 11, 2023 · US
Segmented multi-channel, backside illuminated, solid state detector with a through-hole for detecting secondary and backscattered electrons
US-2022399220-A1 · Dec 15, 2022 · US
Defect inspection and review using transmissive current image of charged particle beam system
US-11410830-B1 · Aug 9, 2022 · US
Multi-column scanning electron microscopy system
US-2021090844-A1 · Mar 25, 2021 · US
Multi-column scanning electron microscopy system
US-10840056-B2 · Nov 17, 2020 · US
Array-based characterization tool
US-10438769-B1 · Oct 8, 2019 · US
Recent patents
Latest publications not already listed above.
Multi-column scanning electron microscopy system
US-10354832-B2 · Jul 16, 2019 · US
Multi-Column Scanning Electron Microscopy System
US-2018358200-A1 · Dec 13, 2018 · US
Multi-Column Scanning Electron Microscopy System
US-2018226219-A1 · Aug 9, 2018 · US
Apparatus and method for fine-tuning magnet arrays with localized energy delivery
US-9779872-B2 · Oct 3, 2017 · US
High density solid state light source array
US-9754807-B2 · Sep 5, 2017 · US
Apparatus for providing and directing heat energy in a process chamber
US-9543172-B2 · Jan 10, 2017 · US
Apparatus and method for optical inspection, magnetic field and height mapping
US-9513230-B2 · Dec 6, 2016 · US
Asymmetrical detector design and methodology
US-9418819-B2 · Aug 16, 2016 · US
Non-invasive charged particle beam monitor
US-9390887-B2 · Jul 12, 2016 · US
Solid state light source assisted processing
US-9232569-B2 · Jan 5, 2016 · US
Apparatus and method for fine-tuning magnet arrays with localized energy delivery
US-2015179327-A1 · Jun 25, 2015 · US
Dummy barrier layer features for patterning of sparsely distributed metal features on the barrier with cmp
US-2015076697-A1 · Mar 19, 2015 · US
Non-invasive charged particle beam monitor
US-2015076350-A1 · Mar 19, 2015 · US
Asymmetrical detector design and methodology
US-2015069234-A1 · Mar 12, 2015 · US
Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Kla Tencor Corp | 14 |
| Kla Corp | 9 |
| Applied Materials Inc | 3 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| H01J37/28 | 13 |
| H01J37/244 | 10 |
| H01J37/14 | 7 |
| H01J2237/28 | 6 |
| H01J37/1471 | 6 |