Solid state light source assisted processing

Patent metadata

Field	Value
Publication number	US-9232569-B2
Application number	US-201313779004-A
Country	US
Kind code	B2
Filing date	Feb 27, 2013
Priority date	Feb 27, 2013
Publication date	Jan 5, 2016
Grant date	Jan 5, 2016

Abstract

Apparatus for providing pulsed or continuous energy in a process chamber are provided herein. The apparatus may include a lamphead including a set of lamps, wherein the first set of lamps are not solid state light sources, and a set of solid state light sources disposed on the lamp head, to provide pulsed or continuous energy to the process chamber.

First claim

The invention claimed is:

1. An apparatus for providing pulsed or continuous energy in a process chamber, the apparatus comprising:
a lamp head including a set of lamps, wherein the set of lamps are not solid state light sources; and
a set of solid state light sources disposed on the lamp head to provide pulsed or continuous energy to the process chamber, wherein the set of solid state light sources includes a plurality of solid state light sources disposed on one or more printed circuit boards coupled to the lamp head.

2. The apparatus of claim 1 , wherein the set of solid state light sources are light emitting diodes (LEDs).

3. The apparatus of claim 1 , wherein the one or more printed circuit boards including the plurality of solid state light sources are removable.

4. The apparatus of claim 1 , wherein the one or more printed circuit boards including the plurality of solid state light sources are coupled along the periphery of the lamphead.

5. The apparatus of claim 1 , further comprising a controller, wherein the set of lamps and the set of solid state light sources are separately controllable by the controller.

6. An apparatus for providing pulsed or continuous energy in a process chamber, the apparatus comprising:
a lamp head including a set of lamps, wherein the set of lamps are not solid state light sources; and
a set of solid state light sources disposed on the lamp head to provide pulsed or continuous energy to the process chamber, wherein the set of solid state light sources includes groups of solid state light sources, wherein each group of solid state light sources is separately controllable by a controller, and wherein each group includes solid state light sources that at least one of all emit the same wavelength of light or are capable of emitting different wavelengths of light.

7. The apparatus of claim 1 , wherein the set of solid state light sources are configured to connect to sockets used by the set of lamps.

8. An apparatus for providing pulsed or continuous energy in a process chamber, the apparatus comprising:
a shower head including a plurality of gas delivery nozzles to provide process gases to the process chamber to process a substrate; and
a set of solid state light sources disposed on the shower head to provide pulsed or continuous energy to the process chamber, wherein the set of solid state light sources includes a plurality of solid state light sources disposed on one or more printed circuit boards removably coupled to the shower head.

9. The apparatus of claim 8 , wherein the set of solid state light sources are light emitting diodes (LEDs).

10. The apparatus of claim 8 , wherein the set of solid state light sources are disposed about the plurality of gas delivery nozzles.

11. The apparatus of claim 8 , further comprising a controller, wherein each of the solid state light sources is separately controllable by the controller.

12. The apparatus of claim 11 , wherein the set of solid state light sources includes groups of solid state light sources.

13. The apparatus of claim 12 , wherein each group of solid state light sources is separately controllable by the controller.

14. An apparatus for providing pulsed or continuous energy in a process chamber, the apparatus comprising:
a process chamber body of the process chamber having an upper portion including a lid;
a substrate support disposed in a lower portion of the process chamber body to support a substrate when disposed thereon;
an energy source array including a plurality of solid state light sources to provide pulsed or continuous heat energy to the process chamber, wherein the plurality of solid state light sources includes groups of solid state light sources, wherein each group of solid state light sources is separately controllable by a controller, and wherein each group includes solid state light sources that at least one of all emit the same wavelength of light or are capable of emitting different wavelengths of light; and
a transfer robot to transfer the energy source array to and from the process chamber body between the lid and the substrate support.

15. The apparatus of claim 14 , wherein the plurality of solid state light sources are light emitting diodes (LEDs).

16. An apparatus for providing pulsed or continuous energy in a process chamber, the apparatus comprising:
a shower head including a plurality of gas delivery nozzles to provide process gases to the process chamber to process a substrate; and
a set of solid state light sources disposed on the shower head to provide pulsed or continuous energy to the process chamber, wherein the set of solid state light sources includes groups of solid state light sources, wherein each group of solid state light sources is separately controllable by a controller, and wherein each group includes solid state light sources that at least one of all emit the same wavelength of light or are capable of emitting different wavelengths of light.

Assignees

• Applied Materials Inc

Inventors

• Johnson Joseph
• Gerling John
• Schuegraf Klaus

Classifications

• H10P72/0436

  mainly by radiation · CPC title

• H05B3/0038 Primary

  for industrial applications · CPC title

• H01L21/67115

  Electricity · mapped topic