Multi-plate electrostatic chucks with ceramic baseplates
US-12451335-B2 · Oct 21, 2025 · US
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Gaff Keith patents
Gaff Keith is listed as an inventor on 42 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Gaff Keith |
| Total patents | 42 |
| First publication | Feb 26, 2015 |
| Latest publication | Oct 21, 2025 |
Notable patents
Publications ranked by popularity score, then publication date.
Substrate support with varying depths of areas between mesas and corresponding temperature dependent method of fabricating
US-12227840-B2 · Feb 18, 2025 · US
Electrostatic chuck with ceramic monolithic body
US-11967517-B2 · Apr 23, 2024 · US
Multi-plate electrostatic chucks with ceramic baseplates
US-2024112893-A1 · Apr 4, 2024 · US
Electrostatically clamped edge ring
US-11935776-B2 · Mar 19, 2024 · US
Multi-plate electrostatic chucks with ceramic baseplates
US-11848177-B2 · Dec 19, 2023 · US
Electrostatic Chuck design for cooling-gas light-up prevention
US-11651991-B2 · May 16, 2023 · US
Substrate support temperature probe diagnostics and management
US-2023127806-A1 · Apr 27, 2023 · US
Substrate support with varying depths of areas between mesas and corresponding temperature dependent method of fabricating
US-2022380894-A1 · Dec 1, 2022 · US
Electrostatic chuck with ceramic monolithic body
US-2022148903-A1 · May 12, 2022 · US
Recent patents
Latest publications not already listed above.
Electrostatic chuck design for cooling-gas light-up prevention
US-2021296099-A1 · Sep 23, 2021 · US
Electrostatic chuck with features for preventing electrical arcing and light-up and improving process uniformity
US-11069553-B2 · Jul 20, 2021 · US
Electrostatically clamped edge ring
US-2021166965-A1 · Jun 3, 2021 · US
Electrostatic chuck design for cooling-gas light-up prevention
US-11024532-B2 · Jun 1, 2021 · US
Electrostatically clamped edge ring
US-10923380-B2 · Feb 16, 2021 · US
Systems and methods for correcting non-uniformities in plasma processing of substrates
US-10872748-B2 · Dec 22, 2020 · US
Edge ring dimensioned to extend lifetime of elastomer seal in a plasma processing chamber
US-10804081-B2 · Oct 13, 2020 · US
Electrostatic chuck assembly incorporation a gasket for distributing RF power to a ceramic embedded electrode
US-10804129-B2 · Oct 13, 2020 · US
Substrate support with thermal zones for semiconductor processing
US-10720346-B2 · Jul 21, 2020 · US
Systems and methods for correcting non-uniformities in plasma processing of substrates
US-2019371576-A1 · Dec 5, 2019 · US
Multi-plate electrostatic chucks with ceramic baseplates
US-2019267218-A1 · Aug 29, 2019 · US
Component of a substrate support assembly producing localized magnetic fields
US-10388493-B2 · Aug 20, 2019 · US
Substrate supports with multi-layer structure including independent operated heater zones
US-10236193-B2 · Mar 19, 2019 · US
Electrostatic chuck design for cooling-gas light-up prevention
US-2019006225-A1 · Jan 3, 2019 · US
Electrostatic chuck assembly incorporating a gasket for distributing rf power to a ceramic embedded electrode
US-2018277412-A1 · Sep 27, 2018 · US
Electrostatic chuck design for cooling-gas light-up prevention
US-10083853-B2 · Sep 25, 2018 · US
ESC assembly including an electrically conductive gasket for uniform RF power delivery therethrough
US-10002782-B2 · Jun 19, 2018 · US
Electrostatically clamped edge ring
US-2018166312-A1 · Jun 14, 2018 · US
Substrate support with varying depths of areas between mesas and corresponding temperature dependent method of fabricating
US-2018148835-A1 · May 31, 2018 · US
Electrostatically clamped edge ring
US-9922857-B1 · Mar 20, 2018 · US
Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Lam Res Corp | 42 |
| Singh Harmeet | 1 |
| Gaff Keith | 1 |
| Richardson Brett | 1 |
| Lee Sung | 1 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| H10P72/722 | 37 |
| H10P72/0434 | 33 |
| H01J37/32724 | 27 |
| H01L21/6833 | 26 |
| H10P72/0602 | 21 |