Electrostatic edge ring mounting system for substrate processing
US-2025316459-A1 · Oct 9, 2025 · US
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Comendant Keith patents
Comendant Keith is listed as an inventor on 29 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Comendant Keith |
| Total patents | 29 |
| First publication | Jul 28, 2015 |
| Latest publication | Oct 9, 2025 |
Notable patents
Publications ranked by popularity score, then publication date.
Electrostatic edge ring mounting system for substrate processing
US-12340989-B2 · Jun 24, 2025 · US
Electrostatic chucks with coolant gas zones and corresponding groove and monopolar electrostatic clamping electrode patterns
US-12237201-B2 · Feb 25, 2025 · US
High power electrostatic chuck with features preventing he hole light-up/arcing
US-2024404798-A1 · Dec 5, 2024 · US
Electrostatic chucks with coolant gas zones and corresponding groove and monopolar electrostatic clamping electrode patterns
US-2024347366-A1 · Oct 17, 2024 · US
Substrate support with uniform temperature across a substrate
US-2023253193-A1 · Aug 10, 2023 · US
Electrostatic edge ring mounting system for substrate processing
US-2023075462-A1 · Mar 9, 2023 · US
High power electrostatic chuck with features preventing he hole light-up/arcing
US-2022223387-A1 · Jul 14, 2022 · US
Apparatus for spatial and temporal control of temperature on a substrate
US-11302556-B2 · Apr 12, 2022 · US
Electrostatic chuck assembly incorporation a gasket for distributing RF power to a ceramic embedded electrode
US-10804129-B2 · Oct 13, 2020 · US
Recent patents
Latest publications not already listed above.
Power switching system for ESC with array of thermal control elements
US-10770363-B2 · Sep 8, 2020 · US
Apparatus for spatial and temporal control of temperature on a substrate
US-2020251370-A1 · Aug 6, 2020 · US
Substrate support with thermal zones for semiconductor processing
US-10720346-B2 · Jul 21, 2020 · US
Apparatus for spatial and temporal control of temperature on a substrate
US-10636689-B2 · Apr 28, 2020 · US
Substrate supports with multi-layer structure including independent operated heater zones
US-10236193-B2 · Mar 19, 2019 · US
Power switching system for esc with array of thermal control elements
US-2018374763-A1 · Dec 27, 2018 · US
Electrostatic chuck with flexible wafer temperature control
US-2018286642-A1 · Oct 4, 2018 · US
Electrostatic chuck assembly incorporating a gasket for distributing rf power to a ceramic embedded electrode
US-2018277412-A1 · Sep 27, 2018 · US
Adjusting substrate temperature to improve CD uniformity
US-10056225-B2 · Aug 21, 2018 · US
Power switching system for ESC with array of thermal control elements
US-10049948-B2 · Aug 14, 2018 · US
ESC assembly including an electrically conductive gasket for uniform RF power delivery therethrough
US-10002782-B2 · Jun 19, 2018 · US
Substrate supports with multi-layer structure including independent operated heater zones
US-2017229327-A1 · Aug 10, 2017 · US
Heating plate with heating zones for substrate processing and method of use thereof
US-9646861-B2 · May 9, 2017 · US
Substrate support with thermal zones for semiconductor processing
US-2016300741-A1 · Oct 13, 2016 · US
Heating plate with planar heater zones for semiconductor processing
US-9392643-B2 · Jul 12, 2016 · US
Electrode for use in measuring dielectric properties of parts
US-9322795-B2 · Apr 26, 2016 · US
Esc assembly including an electrically conductive gasket for uniform rf power delivery therethrough
US-2016111314-A1 · Apr 21, 2016 · US
Plasma chamber top piece assembly
US-9318349-B2 · Apr 19, 2016 · US
Showerhead electrode assembly with gas flow modification for extended electrode life
US-9093483-B2 · Jul 28, 2015 · US
Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Lam Res Corp | 29 |
| Sharpless Leonard J | 1 |
| Comendant Keith | 1 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| H10P72/722 | 19 |
| H01J37/32724 | 19 |
| H10P72/0434 | 18 |
| H10P72/72 | 17 |
| H01L21/6833 | 16 |