Electrode for use in measuring dielectric properties of parts

Patent metadata

Field	Value
Publication number	US-9322795-B2
Application number	US-201313867961-A
Country	US
Kind code	B2
Filing date	Apr 22, 2013
Priority date	Oct 5, 2007
Publication date	Apr 26, 2016
Grant date	Apr 26, 2016

Abstract

A plate of substantially uniform thickness is formed from an electrically conductive material. The plate has a top surface defined to support a part to be measured. The plate has a bottom surface defined to be connected to a radiofrequency (RF) transmission rod such that RF power can be transmitted through the RF transmission rod to the plate. The plate is defined to have a number of holes cut vertically through the plate at a corresponding number of locations that underlie embedded conductive material items in the part to be measured when the part is positioned on the top surface of the plate.

First claim

What is claimed is:

1. A method for defining an electrode for use in measuring dielectric properties of a part, comprising:
forming a plate of electrically conductive material to have an outer perimeter defined to substantially match an outer perimeter of the part, wherein the part is a dielectric part including a number of embedded conductive material items, wherein the plate has a top surface and a bottom surface;
identifying a location of each embedded conductive material item within the part;
projecting the identified location of each embedded conductive material item within the part upon either the top surface of the plate or the bottom surface of the plate with the outer perimeters of the part and the plate substantially aligned; and
removing a portion of the plate at each embedded conductive material item location as projected upon the plate, wherein the portion of the plate that is removed extends through an entire vertical thickness of the plate from the top surface of the plate to the bottom surface of the plate.

2. A method for defining an electrode for use in measuring dielectric properties of a part as recited in claim 1 , wherein a size of each removed portion of the plate is sufficient to ensure that the plate is not located below the embedded conductive material item within the part when the part is positioned upon the top surface of the plate with the outer perimeters of the part and the plate substantially aligned.

3. A method for defining an electrode for use in measuring dielectric properties of a part as recited in claim 1 , wherein removing the portion of the plate at each embedded conductive material item location is performed such that the plate remains a single contiguous component.

4. A method for defining an electrode for use in measuring dielectric properties of a part as recited in claim 1 , wherein the plate is formed from copper metal.

5. A method for defining an electrode for use in measuring dielectric properties of a part as recited in claim 1 , wherein a vertical thickness of the plate from the top surface of the plate to the bottom surface of the plate is within a range extending from about 0.125 inch to about 2 inches.

6. A method for defining an electrode for use in measuring dielectric properties of a part as recited in claim 1 , further comprising:
forming a number of alignment features within the plate to facilitate alignment of the part on the top surface of the plate.

7. A method for defining an electrode for use in measuring dielectric properties of a part as recited in claim 1 , further comprising:
forming a number of fastening devices within the plate to enable securing of the plate to a support rod within an apparatus for measuring dielectric properties of the part.

8. A method for defining an electrode for use in measuring dielectric properties of a part as recited in claim 1 , wherein the top surface of the plate is substantially flat.

9. A method for defining an electrode for use in measuring dielectric properties of a part as recited in claim 1 , wherein a vertical thickness of the plate from the top surface of the plate to the bottom surface of the plate is about 0.75 inch.

10. A method for defining an electrode for use in measuring dielectric properties of a part as recited in claim 1 , further comprising:
disposing the plate of electrically conductive material on an electrically insulating support plate.

11. A method for defining an electrode for use in measuring dielectric properties of a part as recited in claim 10 , wherein the electrically insulating support plate is defined to support the plate of electrically conductive material in a substantially horizontal orientation.

12. A method for defining an electrode for use in measuring dielectric properties of a part as recited in claim 10 , wherein the electrically insulating support plate is formed from a plastic material.

13. A method for defining an electrode for use in measuring dielectric properties of a part as recited in claim 10 , further comprising:
disposing the electrically insulating support plate on an electrically insulated stand.

14. A method for defining an electrode for use in measuring dielectric properties of a part as recited in claim 10 , wherein the electrically insulated stand is formed of a same material as the electrically insulating support plate.

15. A method for defining an electrode for use in measuring dielectric properties of a part as recited in claim 14 , wherein the electrically insulated stand is formed as a right circular cylinder.

16. A method for defining an electrode for use in measuring dielectric properties of a part as recited in claim 1 , further comprising:
connecting the plate of electrically conductive material to a radiofrequency power transmission rod.

Assignees

• Lam Res Corp

Inventors

• Kim Jaehyun
• Sato Arthur H
• Comendant Keith
• Liu Qing
• Wu Feiyang

Classifications

• G01N27/04 Primary

  by investigating resistance · CPC title

• Y10T29/49117

  Conductor or circuit manufacturing · CPC title

• G01R27/2623 Primary

  Measuring-systems or electronic circuits (G01R27/2635, G01R27/2682 take precedence) · CPC title