Workpiece Processing Chamber Having a Rotary Microwave Plasma Source
US-2018352617-A1 · Dec 6, 2018 · US
for laboratory use
for laboratory use · Cooperative Patent Classification (CPC)
Electric circuits, power, telecommunications, and semiconductors.
Related technology areas
Mapped technology topics for this CPC code.
| Metric | Value |
|---|---|
| CPC code | H05B6/806 |
| Official title | {for laboratory use} |
| Display label | for laboratory use |
| Total patents | 140 |
Filing trend
Year-over-year patent counts classified under this CPC code.
Filing activity over the last five years is declining.
| Year | Patents |
|---|---|
| 2015 | 29 |
| 2016 | 13 |
| 2017 | 11 |
| 2018 | 12 |
| 2019 | 8 |
| 2020 | 15 |
| 2021 | 9 |
| 2022 | 16 |
| 2023 | 13 |
| 2024 | 6 |
| 2025 | 5 |
| 2026 | 3 |
Representative patents
Representative publications under this CPC code from precomputed stats, or recent filings when stats are unavailable.
Method and apparatus for uniform thermal distribution in a microwave cavity during semiconductor processing
US-2018323091-A1 · Nov 8, 2018 · US
Instantaneous in-line heating of samples on a monolithic microwave integrated circuit microfluidic device
US-10123380-B2 · Nov 6, 2018 · US
Microwave applicator with solid-state generator power source
US-2018269037-A1 · Sep 20, 2018 · US
Systems and methods for annealing semiconductor structures
US-10037906-B2 · Jul 31, 2018 · US
Workpiece processing chamber having a rotary microwave plasma source
US-10039157-B2 · Jul 31, 2018 · US
Systems and methods for microwave-radiation annealing
US-10020210-B2 · Jul 10, 2018 · US
Microwave irradiating and heating device
US-9823019-B2 · Nov 21, 2017 · US
Systems and Methods for Annealing Semiconductor Structures
US-2017301572-A1 · Oct 19, 2017 · US
Apparatus and method for heat treatment of coatings on substrates
US-9750091-B2 · Aug 29, 2017 · US
Microwave irradiating and heating device
US-9737866-B2 · Aug 22, 2017 · US
Microwave irradiating and heating device
US-2017209847-A1 · Jul 27, 2017 · US
Systems and methods for annealing semiconductor structures
US-9698026-B2 · Jul 4, 2017 · US
Microwave irradiating and heating device
US-2017165631-A1 · Jun 15, 2017 · US
Microwave irradiating and heating device
US-2017131032-A1 · May 11, 2017 · US
Low-oxygen atmosphere apparatus
US-9642193-B2 · May 2, 2017 · US
Susceptor
US-9638376-B2 · May 2, 2017 · US
Chemical reaction apparatus
US-9573112-B2 · Feb 21, 2017 · US
Microwave irradiation apparatus and substrate treatment method
US-9532409-B1 · Dec 27, 2016 · US
Substrate treatment apparatus and substrate treatment method
US-2016358780-A1 · Dec 8, 2016 · US
Frequently asked questions
Answers are generated from the same data shown on this page.
- What is CPC H05B6/806?
- CPC H05B6/806 is the Cooperative Patent Classification code for “for laboratory use.”
- How many patents are filed under CPC H05B6/806 (for laboratory use)?
- Our database includes 140 publications tagged with this CPC code.
- Is patent activity under CPC H05B6/806 growing?
- Publication counts under this code: 6 in 2024 vs 5 in 2025 (latest complete years).