Desmear module of a horizontal process line and a method for separation method and removal of desmear particles from such a desmear module

Patent metadata

Field	Value
Publication number	US-9930786-B2
Application number	US-201515515357-A
Country	US
Kind code	B2
Filing date	Oct 15, 2015
Priority date	Oct 29, 2014
Publication date	Mar 27, 2018
Grant date	Mar 27, 2018

Abstract

A desmear module for a horizontal galvanic or wet-chemical process line for metal, in particular copper, deposition on a substrate to be treated for a removal of precipitates comprising a desmear container connectable to a desmear unit, a pump and at least a first liquid connection element for connecting said pump with the desmear unit, wherein said pump is in conjunction with said desmear unit by said at least first liquid connection element; and wherein a treatment liquid level is provided inside the desmear module, which is above an intake area of the pump; wherein the desmear module further comprises at least a first liquid area, at least an adjacent second liquid area comprising the intake area of the pump, and at least a first separating element arranged between said at least first liquid area and said at least second liquid area.

First claim

The invention claimed is:

1. Desmear module for a horizontal galvanic or wet-chemical process line for metal deposition on a substrate to be treated for a removal of precipitates comprising a desmear container being connectable to a desmear unit, a pump and at least a first liquid connection element for connecting said pump with the desmear unit, wherein said pump is in conjunction with said desmear unit by said at least first liquid connection element; and wherein a treatment liquid level is provided inside of the desmear module, which is above of an intake area of the pump characterized in that
the desmear module further comprises at least a first liquid area, at least an adjacent second liquid area comprising the intake area of the pump, and at least a first separating element arranged between said at least first liquid area and said at least second liquid area,
wherein the first separating element is a non-permeable liquid weir being arranged below the treatment liquid level inside of the desmear module comprising an overflow edge to allow treatment liquid to flow from the first liquid area to the second liquid area or
wherein the first separating element is a permeable liquid weir going from the bottom of the desmear container up to an absolute height above the treatment liquid level inside of the desmear module,
wherein the term desmear module refers to a horizontal processing module being able to allow a desmear process step taking place inside it in order to remove smear from the drillings of the through-going conduits in substrates to be treated,
wherein the term desmear unit refers to a module of a horizontal process line containing flooding device elements, each adapted to direct a flow of desmear treatment liquid to one or both surfaces of the substrate to be treated, to remove residual smear of the raw material of the substrate to be treated out of the drilled though-going conduits.

2. Desmear module according to claim 1 characterized in that the desmear module is for a horizontal galvanic or horizontal wet-chemical process line for copper deposition.

3. Method for selective separation and subsequent removal of desmear particles from a desmear module characterized by the following method steps:
i) Providing a desmear module of a horizontal galvanic or wet-chemical process line according to claim 1 ;
ii) Selective separation of desmear particles from the bottom of the desmear container in front of the at least first separating element by allowing the desmear particles to accumulate there over time;
iii) Removal of the collected desmear particles by conveying solution through a filter device having at least a coarse filter unit;
iv) Conducting the filtered treatment liquid from the filter device back to the desmear container.

4. Desmear module according to claim 1 characterized in that the desmear module further comprises at least a second separating element which is arranged in a parallel manner to the first separating element.

5. Desmear module according to claim 4 characterized in that the desmear module comprises at least a first and a second separating element having different absolute heights of the respective overflow edge.

6. Desmear module according to claim 1 characterized in that a bottom wall of the desmear container is subdivided in two parts, namely a first bottom wall part in the first liquid area and a second bottom wall part in the second liquid area, wherein the transition point between said bottom wall parts is below the at least first separating element; wherein both bottom wall parts can run straight horizontally or at least one of both bottom wall parts runs at least partially inclined upwards or downwards related to the horizontal.

7. Desmear module according to claim 6 characterized in that the first bottom wall part comprises in front of the at least first separating element at least a first cavity for accumulating desmear particles, wherein the bottom of said at least first cavity comprises a treatment liquid outlet for removing said desmear particles out of the desmear container.

8. Desmear module according to claim 1 characterized in that the desmear module further comprises at least a first treatment liquid circulation system, wherein said first treatment liquid circulation system comprises at least a second liquid connection element going from a treatment liquid outlet arranged in front of the at least first separating element in the first liquid area for removing desmear particles out of the desmear container to a first filter device having a coarse filter unit, wherein the desmear particles are separated from the filtrate, wherein said second liquid connection element is subsequently going further to the second liquid area of the desmear container.

9. Desmear module according to claim 8 characterized in that the desmear module further comprises at least a second treatment liquid circulation system, wherein said second treatment liquid circulation system comprises at least the first liquid connection element, wherein a second filter device having a fine filter unit is interconnected.

10. Desmear module according to claim 1 characterized in that the desmear module further comprises at least a second separating element which is arranged in a parallel manner to the first separating element.

11. Desmear module according to claim 10 characterized in that the desmear module comprises at least a first and/or at least a first and a second separating element each having a plurality of openings, pores, through-going conduits and/or gaps.

12. Desmear module according to claim 11 characterized in that the plurality of openings, pores, through-going conduits and/or gaps have a nonhomogeneous distribution in the at least first and/or second separating element.

13. Desmear module according to claim 11 characterized in that the plurality of openings, pores, through-going conduits and/or gaps in each separating element have equal and/or unequal average diameters; wherein said openings, pores, through-going conduits and/or gaps comprise a round, or angular cross section or a cross section formed by a mixture of round and angular structure elements.

14. Desmear module according to claim 11 characterized in that the average diameter of said openings, pores, through-going conduits and/or gaps in each separating element is continuously increasing from the bottom of the desmear container up to the absolute height above the treatment liquid level inside of the desmear module.

15. Desmear module according to claim 10 characterized in that the second separating element is identical to the first separating element.

16. Desmear module according to claim 15 characterized in that the desmear module comprises at least a first and/or at least a first and a second separating element each having a plurality of openings, pores, through-going conduits and/or gaps.

17. Desmear module according to claim 16 characterized in that the plurality of openings, pores, through-going conduit, gaps or combination thereof have a nonhomogeneous distribution in the both the first separating element and the second separating element.

18. Desmear module according to claim 17 characterized in that the plurality of openings, pores, through-going conduits, gaps or combination thereof in both the first separating element and the second separating element have equal or unequal average diameters; wherein said openings, pores, through-going conduits, gaps or combination thereof comprise a round, or angular cross section, or a cross section formed by a mixture of roun

Assignees

• Atotech Deutschland Gmbh

Inventors

• Skupin Andreas
• Grüβner Stefan

Classifications

• H05K2203/1545

  Continuous processing, i.e. involving rolls moving a band-like or solid carrier along a continuous production path · CPC title

• H05K2203/0796

  Oxidant in aqueous solution, e.g. permanganate · CPC title

• H05K3/00

  Apparatus or processes for manufacturing printed circuits · CPC title

• B81C1/00539

  Wet etching · CPC title

• H05K3/0088

  for treatment of holes · CPC title