Positioning method in microprocessing process of bulk silicon

Patent metadata

Field	Value
Publication number	US-9902613-B2
Application number	US-201515315640-A
Country	US
Kind code	B2
Filing date	Aug 19, 2015
Priority date	Nov 18, 2014
Publication date	Feb 27, 2018
Grant date	Feb 27, 2018

Abstract

A positioning method in a microprocessing process of bulk silicon comprises the steps of: fabricating, on a first surface of a first substrate ( 10 ), a first pattern ( 100 ), a stepper photo-etching machine alignment mark ( 200 ) for positioning the first pattern, and a double-sided photo-etching machine first alignment mark ( 300 ) for positioning the stepper photo-etching machine alignment mark; fabricating, on a second surface, opposite to the first surface, of the first substrate, a double-sided photo-etching machine second alignment mark ( 400 ) corresponding to the double-sided photo-etching machine first alignment mark; bonding a second substrate ( 20 ) on the first surface of the first substrate; performing thinning on a first surface of the second substrate; fabricating, on the first surface of the second substrate, a double-sided photo-etching machine third alignment mark ( 500 ) corresponding to the double-sided photo-etching machine second alignment mark; and finding, on the first surface of the second substrate by using the double-sided photo-etching machine third alignment mark, a corresponding position of the stepper photo-etching machine alignment mark.

First claim

What is claimed is:

1. A positioning method in micromachining process for bulk silicon, comprising:
fabricating a first pattern, a stepper lithography machine alignment mark configured to position the first pattern, and a first alignment mark for a double-sided lithography machine configured to position the stepper lithography machine alignment mark on a first surface of a first substrate;
fabricating a second alignment mark for the double-sided lithography machine corresponding to the first alignment mark for the double-sided lithography machine on a second surface of the first substrate opposite to the first surface;
bonding a second substrate on the first surface of the first substrate;
performing a grinding process to a first surface of the second substrate;
fabricating a third alignment mark for the double-sided lithography machine corresponding to the second alignment mark for the double-sided lithography machine on the first surface of the second substrate; and
finding a position corresponding to the stepper lithography machine alignment mark by the third alignment mark for the double-sided lithography machine on the first surface of the second substrate.

2. The method according to claim 1 , further comprising:
removing a part of the second substrate corresponding to the stepper lithography machine alignment mark, thereby exposing the stepper lithography machine alignment mark on the first surface of the first substrate.

3. The method according to claim 2 , further comprising:
finding a position corresponding to the first pattern on the first surface of the second substrate by the stepper lithography machine alignment mark, and fabricating a second pattern on the position corresponding to the first pattern.

4. The method according to claim 2 , wherein the part of the second substrate on the position corresponding to the stepper lithography machine alignment mark is removed by etching technology.

5. The method according to claim 4 , wherein removing the part of the second substrate on the position corresponding to the stepper lithography machine alignment mark comprises using a stepper lithography machine to perform lithography.

6. The method according to claim 1 , wherein a number of the stepper lithography machine alignment marks is at least five.

7. The method according to claim 1 , wherein a number of the first alignment marks of the double-sided lithography machine is at least two.

8. The method according to claim 1 , wherein the first substrate and the second substrate are silicon wafers.

Assignees

• Csmc Technologies Fab1 Co Ltd

Inventors

• Jing Errong

Classifications

• H10P72/50

  for positioning, orientation or alignment · CPC title

• B81C3/00

  Assembling of devices or systems from individually processed components · CPC title

• B81C2203/051

  Active alignment, e.g. using internal or external actuators, magnets, sensors, marks or marks detectors · CPC title

• G03F9/00

  Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically (G03F7/22 takes precedence; preparation of photographic masks G03F1/00; within photographic printing apparatus for making copies G03B27/00) · CPC title

• B81C1/00

  Manufacture or treatment of devices or systems in or on a substrate (B81C3/00 takes precedence) · CPC title