Method of monitoring a dressing process and polishing apparatus

Patent metadata

Field	Value
Publication number	US-9808908-B2
Application number	US-201314011668-A
Country	US
Kind code	B2
Filing date	Aug 27, 2013
Priority date	Aug 28, 2012
Publication date	Nov 7, 2017
Grant date	Nov 7, 2017

Abstract

A method of monitoring dressing of a polishing pad is provided. The method includes: rotating a polishing table that supports the polishing pad; dressing the polishing pad by pressing a dresser against the polishing pad while causing the dresser to oscillate in a radial direction of the polishing pad; calculating a work coefficient representing a ratio of a frictional force between the dresser and the polishing pad to a force of pressing the dresser against the polishing pad; and monitoring dressing of the polishing pad based on the work coefficient.

First claim

What is claimed is:

1. A method of monitoring dressing of a polishing pad, said method comprising:
rotating a polishing table that supports the polishing pad;
dressing the polishing pad by pressing a dresser against the polishing pad while causing the dresser to oscillate in a radial direction of the polishing pad;
calculating a work coefficient representing a ratio of a frictional force between the dresser and the polishing pad to a force of pressing the dresser against the polishing pad;
monitoring dressing of the polishing pad based on the work coefficient; and
determining a remaining life of the dresser based on the work coefficient.

2. The method according to claim 1 , wherein the work coefficient is calculated from a torque of a table motor for rotating the polishing table, the force of pressing the dresser against the polishing pad, and a distance from a center of rotation of the polishing table to the dresser.

3. The method according to claim 2 , wherein the work coefficient is given by
Z =( Tt−Tt 0 )/( DF *St)
where Z is the work coefficient, Tt is the torque of the table motor when the dresser is dressing the polishing pad, Tt 0 is an initial torque of the table motor before the dresser is brought into contact with the polishing pad, DF is the force of pressing the dresser against the polishing pad, and St is the distance from the center of rotation of the polishing table to the dresser.

4. The method according to claim 1 , further comprising:
detecting a failure of dressing of the polishing pad by comparing the work coefficient with a predetermined threshold value.

5. The method according to claim 4 , further comprising:
describing a position of the dresser at which the work coefficient exceeds the predetermined threshold value on a two-dimensional surface defined on the polishing pad.

6. The method according to claim 1 , further comprising:
detecting a failure of dressing of the polishing pad by comparing an amount of change in the work coefficient per unit time with a predetermined threshold value.

7. The method according to claim 6 , further comprising:
describing a position of the dresser at which the amount of change in the work coefficient per unit time exceeds the predetermined threshold value on a two-dimensional surface defined on the polishing pad.

8. A polishing apparatus for polishing a substrate, comprising:
a polishing table configured to support a polishing pad;
a table motor configured to rotate the polishing table;
a dresser configured to dress the polishing pad;
a swing motor configured to cause the dresser to oscillate in a radial direction of the polishing pad;
a pressing device configured to press the dresser against the polishing pad; and
a pad monitoring device configured to monitor dressing of the polishing pad,
the pad monitoring device being configured to
calculate a work coefficient representing a ratio of a frictional force between the dresser and the polishing pad to a force of pressing the dresser against the polishing pad,
monitor dressing of the polishing pad based on the work coefficient, and
determine a remaining life of the dresser based on the work coefficient.

9. The polishing apparatus according to claim 8 , wherein the pad monitoring device is configured to calculate the work coefficient from a torque of the table motor, the force of pressing the dresser against the polishing pad, and a distance from a center of rotation of the polishing table to the dresser.

10. The polishing apparatus according to claim 9 , wherein the work coefficient is given by
Z =( Tt−Tt 0 )/( DF *St)
where Z is the work coefficient, Tt is the torque of the table motor when the dresser is dressing the polishing pad, Tt 0 is an initial torque of the table motor before the dresser is brought into contact with the polishing pad, DF is the force of pressing the dresser against the polishing pad, and St is the distance from the center of rotation of the polishing table to the dresser.

11. The polishing apparatus according to claim 8 , wherein the pad monitoring device is configured to detect a failure of dressing of the polishing pad by comparing the work coefficient with a predetermined threshold value.

12. The polishing apparatus according to claim 11 , wherein the pad monitoring device is configured to describe a position of the dresser at which the work coefficient exceeds the predetermined threshold value on a two-dimensional surface defined on the polishing pad.

13. The polishing apparatus according to claim 8 , wherein the pad monitoring device is configured to detect a failure of dressing of the polishing pad by comparing an amount of change in the work coefficient per unit time with a predetermined threshold value.

14. The polishing apparatus according to claim 13 , wherein the pad monitoring device is configured to describe a position of the dresser at which the amount of change in the work coefficient per unit time exceeds the predetermined threshold value on a two-dimensional surface defined on the polishing pad.

15. The method according to claim 1 , wherein the remaining life of the dresser is determined by
T end [s]=( Z 0− Z end)/( dZ/dt )

where Tend represents the remaining life of the dresser, Z 0 represents an initial work coefficient, Zend represents a service-limit work coefficient, and dZ/dt represents an amount of change in the work coefficient per unit time.

16. The method according to claim 1 , further comprising:
generating a signal for urging a user to replace the dresser if the determined remaining life of the dresser has reached a predetermined threshold value.

17. The polishing apparatus according to claim 8 , wherein the remaining life of the dresser is determined by
T end [s]=( Z 0− Z end)/( dZ/dt )

where Tend represents the remaining life of the dresser, Z 0 represents an initial work coefficient, Zend represents a service-limit work coefficient, and dZ/dt represents an amount of change in the work coefficient per unit time.

18. The polishing apparatus according to claim 8 , wherein the pad monitoring device is configured to generate a signal for urging a user to replace the dresser if the determined remaining life of the dresser has reached a predetermined threshold value.

Assignees

• Ebara Corp

Inventors

• Shinozaki Hiroyuki

Classifications

• B24B49/18 Primary

  taking regard of the presence of dressing tools · CPC title

• B24B49/16

  taking regard of the load · CPC title

• B24B37/00

  Lapping machines or devices; Accessories (B24B3/00 takes precedence) · CPC title

• B24B53/017 Primary

  Devices or means for dressing, cleaning or otherwise conditioning lapping tools · CPC title

• B24B53/053

  using a rotary dressing tool · CPC title