Method for conditioning polishing tool, substrate processing method, and substrate processing device
US-2024253182-A1 · Aug 1, 2024 · US
US9440328B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9440328-B2 |
| Application number | US-201414197796-A |
| Country | US |
| Kind code | B2 |
| Filing date | Mar 5, 2014 |
| Priority date | Mar 5, 2013 |
| Publication date | Sep 13, 2016 |
| Grant date | Sep 13, 2016 |
A practical reading order for non-experts. Skip the full description unless you need deep technical detail.
What the patent document calls the invention.
A short plain-language summary of the technical disclosure.
Who owns or filed the patent and who is credited as inventor.
Filing, priority, publication, and grant dates set the timeline.
The legal scope of protection — read this for what is actually claimed.
Technology tags used to group this patent with similar filings.
Prior art links and similar publications in this corpus.
Official abstract text for this publication.
The invention relates to a method for ascertaining topography deviations of a dressing tool. The method includes executing a predefined relative movement of a dressing tool in relation to a dressable grinding tool, wherein during the execution of the relative movement, at least one contour region of the dressing tool is transferred into a transfer region of the grinding tool. A plunging body made of material which can be ground in the machine is provided. The transfer region of the grinding tool is moved into the vicinity of the plunging body by a relative infeed movement. A rotational movement of the grinding tool around an axis of rotation is executed. Plunging the transfer region of the grinding tool into the material of the plunging body, to thus perform a transfer of the topography of the transfer region into an imaging region of the plunging body. A scanning movement of the topography is performed of the plunging body using a coordinate scanning sensor and a computational ascertainment by means of a computer of at least one item of coordinate information, which permits a statement about the actual geometry of the dressing tool.
Opening claim text (preview).
What is claimed is: 1. A method for ascertaining topography deviations of a dressing tool, which is mounted so it is rotationally drivable about a dressing axis in a CNC-controlled machine, which comprises a dressable grinding tool, which is chucked on a tool rotational axis, wherein the dressing tool has a target geometry, and wherein the dressing tool has an actual geometry, which deviates from the target geometry, after a dressing of the grinding tool in the machine, comprising: (a) executing a predefined relative movement of the dressing tool in relation to the grinding tool, wherein during the execution of the relative movement, at least one contour region of the dressing tool is transferred into a transfer region of the grinding tool; (b) providing a plunging body made of material which can be ground in the machine; (c) executing a relative infeed movement, to move the transfer region of the grinding tool into the vicinity of the plunging body; (d) executing a rotational movement of the grinding tool about the tool rotational axis; (e) executing a predefined, relative plunging movement, to plunge the transfer region of the grinding tool into the material of the plunging body, wherein during the execution of the plunging movement, a transfer of a topography of the transfer region into an imaging region of the plunging body in the form of a negative topography is performed; (f) carrying out an automated scanning movement of the negative topography of the plunging body in the imaging region using a coordinate scanning sensor; (g) transmitting scanning signals from the coordinate scanning sensor to a computer; and (h) computationally ascertaining, by means of the computer, at least one item of coordinate information, and determining a statement about the actual geometry of the dressing tool. 2. The method according to claim 1 , wherein at least two of the steps (a), (b), (c), (d), (e), (f), (g), or (h) are carried out simultaneously or chronologically overlapping. 3. The method according to claim 1 , wherein, during the execution of the predefined relative movement of the dressing tool in relation to the grinding tool, the dressing tool is brought into contact with the grinding tool, while the dressing tool rotates about the dressing axis and the grinding tool rotates about the tool rotational axis, to thus transfer a part of a topography of the dressing tool into the transfer region of the grinding tool. 4. The method according to claim 1 , wherein, after the transfer of the topography, a relative retraction movement is executed to remove the transfer region of the grinding tool from the material of the plunging body. 5. The method according to claim 1 , wherein the coordinate scanning sensor is an integrated component of the machine. 6. The method according to claim 1 , comprising ascertaining the actual geometry of the dressing tool to be performed in the machine indirectly by the use of the plunging body, wherein during this ascertainment of the actual geometry, the dressing tool does not have to be removed or remounted. 7. The method according to claim 1 , comprising adapting a dressing movement of the dressing tool in the machine, so that even when the dressing tool is worn to a certain extent, it can still be used for dressing the grinding tool.
using rotary dressing tools (B24B53/07 takes precedence) · CPC title
Devices or means for dressing or conditioning abrasive surfaces (compensation for grinding wheel abrasion resulting from dressing B24B47/25) · CPC title
Arrangements of abrasive wheel dressing devices on gear-cutting machines (dressing devices per se B24B53/00) · CPC title
taking regard of the wear of the dressing tools · CPC title
taking regard of the presence of dressing tools · CPC title
Related publications grouped by family.
Answers are generated from the same data shown on this page.