Slab amplifier, and laser apparatus and extreme ultraviolet light generation apparatus including slab amplifier

Patent metadata

Field	Value
Publication number	US-9680277-B2
Application number	US-201514657640-A
Country	US
Kind code	B2
Filing date	Mar 13, 2015
Priority date	Sep 18, 2012
Publication date	Jun 13, 2017
Grant date	Jun 13, 2017

Abstract

There is provided a slab amplifier including an optical system ( 48, 51 ) provided in a chamber ( 47 ) to allow a seed beam having entered from a first window into the space between a pair of electrodes ( 42, 43 ) to be repeatedly reflected between the space so that the seed beam is amplified to be an amplified beam; a first aperture plate ( 61 ) provided between the first window and the electrodes, and having an opening of a dimension equal to or greater than a cross-section of the seed beam and equal to or smaller than a dimension of the first window; and a second aperture plate ( 62 ) provided between the second window and the electrodes, and having an opening of a dimension equal to or greater than a cross-section of the amplified beam and equal to or smaller than a dimension of the second window.

First claim

The invention claimed:

1. A slab amplifier configured to receive a seed beam outputted from a seed light source and to amplify the seed beam, the slab amplifier comprising:
a chamber having a first through-hole and a second through-hole and accommodating a laser gain medium;
a pair of plate electrodes, disposed to face one another with a predetermined space between the pair of plate electrodes, in the chamber;
a first window provided to seal the first through-hole;
a first window holder configured to hold the first window such that a normal line of the first window is inclined in a first direction with respect to a first plane;
a second window provided to seal the second through-hole;
a second window holder configured to hold the second window such that a normal line of the second window is inclined in a direction different from the first direction with respect to the first plane; and
an optical system configured to reflect the seed beam having entered the chamber through the first window and to allow the reflected seed beam to be repeatedly reflected between the pair of electrodes and to be outputted to the chamber through the second window,
wherein the first plane includes a central axis of a beam path of the seed beam having entered the optical system and a central axis of a beam path of the seed beam reflected from the optical system,
the slab amplifier further including:
a first aperture plate provided between the first window and the electrodes, and having an opening of a dimension equal to or greater than a cross-section of the seed beam and equal to or smaller than a dimension of the first window; and
a second aperture plate provided between the second window and the electrodes, and having an opening of a dimension equal to or greater than a cross-section of the amplified beam and equal to or smaller than a dimension of the second window,
wherein a shape of the opening of the first aperture plate and the opening of the second aperture plate is a rectangle having a longer side in a direction in which the first plane extends.

2. The slab amplifier according to claim 1 further comprising:
a first container provided between the first window with the first window holder and the chamber,
the first container including:
a first input-side opening aligned with the first through-hole;
a second input-side opening provided to face the first input-side opening; and
a wall configured to absorb light; and

a second container provided between the second window with the second window holder and the chamber,
the second container including:
a first output-side opening aligned with the second through-hole;
a second output-side opening provided to face the first output-side opening; and
a wall configured to absorb light.

3. A laser apparatus, comprising:
a seed light source configured to output a seed beam; and
a plurality of slab amplifiers according to claim 1 , arranged in series, configured to receive the seed beam outputted from the seed light source and to amplify the seed beam.

Assignees

• Gigaphoton Inc

Inventors

• Nowak Krzysztof
• Suganuma Takashi
• Saito Takashi
• Kawasuji Yasufumi

Classifications

• H01S3/0971

  transversely excited (H01S3/0975 takes precedence) · CPC title

• H01S3/2325

  Multi-pass amplifiers, e.g. regenerative amplifiers · CPC title

• H01S3/034 Primary

  Optical devices within, or forming part of, the tube, e.g. windows, mirrors (reflectors having variable properties or positions for initial adjustment of the resonator H01S3/086) · CPC title

• H01S3/076

  Folded-path lasers · CPC title

• H01S3/2366

  comprising a gas as the active medium (H01S3/10092, H01S3/2383 take precedence) · CPC title