Slab amplifier, and laser apparatus and extreme ultraviolet light generation apparatus including slab amplifier
US-9680277-B2 · Jun 13, 2017 · US
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Patent family 50341206
This patent family groups 2 related publications across US. Members often share priority claims or equivalent filings in different countries.
| Field | Value |
|---|---|
| Family ID | 50341206 |
| Family type | — |
| Earliest priority | Sep 18, 2012 |
| First filing country | US |
| Member publications | 2 |
| Countries | US |
| Representative publication | US9680277B2 — Slab amplifier, and laser apparatus and extreme ultraviolet light generation apparatus including slab amplifier |
Representative publication
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US9680277B2 — Slab amplifier, and laser apparatus and extreme ultraviolet light generation apparatus including slab amplifier (published Jun 13, 2017)
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