Laser apparatus

Patent metadata

Field	Value
Publication number	US-9331450-B2
Application number	US-201514663086-A
Country	US
Kind code	B2
Filing date	Mar 19, 2015
Priority date	Sep 21, 2012
Publication date	May 3, 2016
Grant date	May 3, 2016

Abstract

A laser apparatus according to embodiments may include a laser chamber including a laser gain medium; a power source; a first electrode to which a voltage is applied from the power source and a second electrode that is grounded, the first and second electrodes being disposed in the laser chamber; and a connector connected to the power source, and supporting the first electrode in a way that allows the first electrode to move toward a side where the second electrode is disposed.

First claim

What is claimed is:

1. A laser apparatus comprising:
a laser chamber including a laser gain medium, and a part of the laser chamber being constructed by an insulator;
a power source;
a first electrode to which a voltage is applied from the power source and a second electrode that is grounded, the first and second electrodes being disposed in the laser chamber, and the first electrode being disposed at a side where the insulator is disposed;
a connector connected to the power source, and supporting the first electrode in a way that allows the first electrode to move toward a side where the second electrode is disposed; and
an electrode moving mechanism being installed in the insulator and being connected to the first electrode to move the first electrode toward the side where the second electrode is disposed,
wherein the electrode moving mechanism comprises shims which are stacked and removed corresponding to a wear volume of the first electrode.

2. The laser apparatus according to claim 1 , wherein a part contacting with the first electrode in the connector is made of elastic metal.

3. The laser apparatus according to claim 1 , wherein the connector includes an elastic member therein that is made of metal.

4. The laser apparatus according to claim 1 , wherein
the connector contacts with the first electrode at a plurality of parts, and
each of the parts contacting with the first electrode is made of elastic metal.

5. The laser apparatus according to claim 1 , wherein
the connector is fixed to the insulator.

6. The laser apparatus according to claim 1 , further comprising an insulator member disposed between the electrode moving mechanism and the first electrode.

7. The laser apparatus according to claim 1 , wherein a part of the electrode moving mechanism and the first electrode are joined to each other.

8. The laser apparatus according to claim 1 , further comprising:
a controller configured to control the electrode moving mechanism so that the first electrode moves at a specific timing.

9. The laser apparatus according to claim 8 , wherein the specific timing is arranged based on the number of discharges between the first electrode and the second electrode, or a charge voltage for applying a voltage between the first electrode and the second electrode.

Assignees

• Gigaphoton Inc

Inventors

• Asayama Takeshi
• Mizoguchi Hakaru
• Kakizaki Kouji
• Tsushima Hiroaki
• Wakabayashi Osamu
• Takezawa Kazuya

Classifications

• H01S3/2256

  KrF, i.e. krypton fluoride is comprised for lasing around 248 nm · CPC title

• H01S3/104

  in gas lasers · CPC title

• H01S3/0388

  Compositions, materials or coatings · CPC title

• H01S3/08009

  using a diffraction grating · CPC title

• H01S3/034

  Optical devices within, or forming part of, the tube, e.g. windows, mirrors (reflectors having variable properties or positions for initial adjustment of the resonator H01S3/086) · CPC title