MEMS device positioning apparatus, test system, and test method

Patent metadata

Field	Value
Publication number	US-9618556-B2
Application number	US-201615133433-A
Country	US
Kind code	B2
Filing date	Apr 20, 2016
Priority date	Nov 26, 2013
Publication date	Apr 11, 2017
Grant date	Apr 11, 2017

Abstract

A positioning apparatus includes a support structure, a positioning structure, and a fixture for retaining MEMS devices. A shaft spans between the support structure and the positioning structure, and is configured to rotate about a first axis relative to the support structure in order to rotate the positioning structure and the fixture about the first axis. The positioning structure includes a pair of beams spaced apart by a third beam. Another shaft spans between the pair of beams and is configured to rotate about a second axis relative to the positioning structure in order to rotate the fixture about the second axis. Methodology entails installing the positioning apparatus into a chamber, orienting the fixture into various positions, and obtaining output signals from the MEMS devices to determine functionality of the MEMS devices.

First claim

What is claimed is:

1. A method of testing a microelectromechanical systems (MEMS) device comprising:
loading said MEMS device into a fixture of a positioning apparatus, said positioning apparatus including a support structure, a positioning structure, a first shaft spanning between said support structure and said positioning structure, and a second shaft in physical communication with said positioning structure, said fixture being retained on said second shaft;
installing said positioning structure and said fixture into a test chamber;
placing said fixture into a first position;
obtaining a first output signal from said MEMS device in said first position;
orienting said fixture into a second position by rotating at least one of said first and second shafts, wherein said orienting operation rotates said fixture about at least one of first and second orthogonal axes;
obtaining a second output signal from said MEMS device in said second position; and
determining a functionality of said MEMS device utilizing said first and second output signals.

2. The method of claim 1 wherein said positioning structure includes first and second beams spaced apart from one another, and a third beam spanning between and interconnected with each of said first and second beams, and said second shaft spans between said first and second beams of said positioning structure.

3. The method of claim 1 wherein said first shaft is configured to rotate about said first axis relative to said support structure in order to rotate said fixture about said first axis, said second shaft is configured to rotate about said second axis relative to said positioning structure in order to rotate said fixture about said second axis.

4. The method of claim 1 wherein said installing comprises engaging a face section of said positioning apparatus with said test chamber to seal said test chamber with said positioning structure and said fixture located within said test chamber, and said orienting operation occurs without unsealing said test chamber.

5. The method of claim 1 wherein said orienting operation comprises electronically controlling a rotational drive system to orient said fixture in said second position.

6. The method of claim 5 further comprising:
sensing an actual position of said fixture via a position sensor coupled to said fixture; and
providing, from said position sensor, a feedback control signal of said actual position to said rotational drive system.

7. The method of claim 1 further comprising setting a temperature of said test chamber to a test temperature in accordance with a test protocol, and obtaining said first output signal after said temperature of said test chamber has reached said test temperature.

8. The method of claim 7 further comprising:
activating a fan within said test chamber in conjunction with said setting operation; and
deactivating said fan prior to said performing operation.

9. The method of claim 7 further comprising obtaining said second output signal after said temperature of said test chamber has reached said test temperature.

10. The method of claim 7 wherein said test temperature is a first test temperature, and said method further comprises:
setting said temperature of said test chamber to a second test temperature in accordance with said test protocol;
replacing said fixture into said first position;
obtaining a third output signal from said MEMS device in said first position after said temperature of said test chamber has reached said second test temperature;
reorienting said fixture into said second position; and
obtaining a fourth output signal from said MEMS device in said second position after said temperature of said test chamber has reached said second test temperature, wherein said determining operation comprises utilizing said first, second, third, and fourth output signals from said MEMS device to determine said functionality of said MEMS device.

11. The method of claim 7 further comprising performing said replacing and reorienting operations by electronically controlling a rotational drive system that is in communication with each of said first and second shafts.

12. A method as claimed in claim 1 further comprising:
orienting said fixture into a third position; and
obtaining a third output signal from said MEMS device in said third position, wherein said determining operation determines said functionality of said MEMS device utilizing said first, second, and third output signals.

13. A method of testing a microelectromechanical systems (MEMS) device comprising:
loading said MEMS device into a fixture of a positioning apparatus, said positioning apparatus including a support structure, a positioning structure having first and second beams spaced apart from one another, and a third beam spanning between and interconnected with each of said first and second beams, a first shaft spanning between said support structure and said positioning structure, and a second shaft spanning between said first and second beams of said positioning structure, said fixture being retained on said second shaft;
installing said positioning apparatus into a test chamber;
placing said fixture into a first position;
obtaining a first output signal from said MEMS device in said first position;
orienting said fixture into a second position, wherein said first shaft is configured to rotate about a first axis relative to said support structure in order to rotate said positioning structure and said fixture about said first axis, said second shaft is configured to rotate about a second axis relative to said positioning structure in order to rotate said fixture about said second axis, said second axis being orthogonal to said first axis, and said orienting operation includes rotating at least one of said positioning structure and said fixture about at least one of said first and second axes;
obtaining a second output signal from said MEMS device in said second position; and
determining a functionality of said MEMS device utilizing said first and second output signals.

14. A method as claimed in claim 13 wherein said orienting operation comprises electronically controlling a rotational drive system to orient said fixture in said second position.

15. A method as claimed in claim 13 further comprising:
orienting said fixture into a third position; and
obtaining a third output signal from said MEMS device in said third position, wherein said determining operation determines said functionality of said MEMS device utilizing said first, second, and third output signals.

16. A method of testing a microelectromechanical systems (MEMS) device comprising:
loading said MEMS device into a fixture of a positioning apparatus, said positioning apparatus including a support structure, a positioning structure, a first shaft spanning between said support structure and said positioning structure, and a second shaft in physical communication with said positioning structure, said fixture being retained on said second shaft;
installing said positioning structure and said fixture into a test chamber, said installing operation comprising engaging a face section of said positioning apparatus with said test chamber to seal said test chamber with said positioning structure and said fixture located within said test chamber;
placing said fixture into a first position;
obtaining a first output signal from said MEMS device in said first position;
orienting said fixture into a second position by rotating at least one of said first and second shafts, wherein said orienting operation rotates said fixtu

Assignees

• Freescale Semiconductor Inc
• Nxp Usa Inc

Inventors

• Birk Thomas J

Classifications

• B81C99/005 Primary

  Test apparatus · CPC title

• G01R31/003 Primary

  Environmental or reliability tests (of individual semiconductors G01R31/2642; of PCB's G01R31/2817; of IC's G01R31/2855; of other circuits G01R31/2849) · CPC title