Centrifuge MEMS stiction detection and screening system and method

Patent metadata

Field	Value
Publication number	US-9758374-B2
Application number	US-201414267864-A
Country	US
Kind code	B2
Filing date	May 1, 2014
Priority date	May 6, 2013
Publication date	Sep 12, 2017
Grant date	Sep 12, 2017

Abstract

A centrifuge screening system and method of testing MEMS devices using the system. The wafer level centrifuge screening system can include a base centrifuge system and a cassette mounting hub coupled to the base centrifuge system. The method can include applying a smooth and continuous acceleration profile to one or more MEMS components via the base centrifuge system. Each of the one or more MEMS components can have one or more MEMS devices formed thereon. The one or more MEMS components can be provided in one or more cassettes configured on the cassette mounting hub. The method can also include identifying one or more target MEMS components, which can include identifying stiction in one or more MEMS devices on the one or more MEMS components.

First claim

What is claimed is:

1. A method for testing MEMS devices using a centrifuge screening system comprising a base centrifuge system and a cassette mounting hub coupled to the base centrifuge system, the method comprising:
inserting one or more MEMS components into each of two or more cassettes;
coupling the two or more cassettes to the cassette mounting hub;
applying a controlled acceleration profile to the one or more MEMS components of each cassette via the base centrifuge system, wherein each of the one or more MEMS components of each cassette having one or more MEMS devices formed thereon;
remove the one or more MEMS components of each cassette from the two or more cassettes; and
determining one or more MEMS devices from the one or more MEMS components having physical problems;
wherein the coupling the two or more cassettes to the cassette mounting hub is such that the g-force from applying the acceleration profile is oriented in the +Z direction relative to the one or more MEMS devices of each of the one or more MEMS components.

2. The method of claim 1 wherein the one or more MEMS components of each cassette and the two or more cassettes are configured in a precision balanced manner on the cassette mounting hub.

3. The method of claim 1 wherein the one or more MEMS components of each cassette comprise a MEMS wafer and the two or more cassettes comprise two or more wafer holding cassettes, and wherein each of the one or more MEMS wafers of each cassette comprises a top or bond pad side, and wherein the one or more MEMS wafers of each cassette and the two or more wafer holding cassettes are configured such that the top side of each of the MEMS wafers faces the cassette mounting hub from within the two or more wafer holding cassettes.

4. The method of claim 1 wherein the physical problems comprises stiction problems.

5. The method of claim 1 wherein the two or more cassettes are vertically mounted or horizontally mounted on the cassette mounting hub.

6. The method of claim 1 wherein the one or more MEMS components comprise one or more MEMS wafers, one or more MEMS diced parts, one or more processed MEMS, or one or more packaged MEMS.

7. A method for testing MEMS devices using a centrifuge screening system comprising a base centrifuge system and a cassette mounting hub coupled to the base centrifuge system, the method comprising:
providing one or more MEMS components each having one or more MEMS devices formed thereon;
configuring the one or more MEMS components within two or more cassettes;
configuring the two or more cassettes on the cassette mounting hub;
applying a controlled acceleration profile to the MEMS components via the base centrifuge system; and
identifying one or more target MEMS components that have physical problems as a result of testing;
wherein the configuring of the one or more MEMS components and the two or more cassettes is such that the g-force from applying the acceleration profile is oriented in the +Z direction relative to the one or more MEMS devices of each of the one or more MEMS components.

8. The method of claim 7 wherein the configuring of the one or more MEMS components and the two or more cassettes are configured in a precision balanced manner on the cassette mounting hub.

9. The method of claim 7 wherein the one or more MEMS components comprise two or more MEMS wafers and the two or more cassettes comprise two or more wafer holding cassettes, and wherein each of the two or more MEMS wafers comprises a top or bond pad side, and wherein the configuring of the two or more MEMS wafers and the two or more wafer holding cassettes are such that the top side of each of the MEMS wafers faces the cassette mounting hub from within the two or more wafer holding cassettes.

10. The method of claim 7 wherein the identifying of the one or more target MEMS components comprises identifying stiction in one or more MEMS devices on the one or more MEMS components.

11. The method of claim 7 wherein the identifying of the one or more target MEMS components comprises a chip probing process, a wafer probing process, or convention wafer probe production process.

12. The method of claim 7 wherein providing the one or more MEMS components comprises providing two or four MEMS wafers, each of the two or four MEMS wafers having one or more MEMS devices formed thereon.

13. The method of claim 7 wherein each of the two or more cassettes comprise 2-slot Titanium wafer cassettes with Delrin ribs.

14. The method of claim 7 wherein the two or more cassettes are vertically mounted or horizontally mounted on the cassette mounting hub.

15. The method of claim 7 wherein the one or more MEMS components comprise one or more MEMS wafers, one or more MEMS diced parts, one or more processed MEMS, or one or more packaged MEMS.

16. The method of claim 7 wherein the cassette mounting hub comprises a pinned dovetail central cassette mounting hub.

17. The method of claim 7 wherein the controlled acceleration profile includes a smooth acceleration profile, a static acceleration profile, a continuous acceleration profile, a step-wise acceleration profile, or a pulsed acceleration profile.

18. The method of claim 7 wherein the two or more cassettes comprise two or more tray cassettes or tray carriers, and wherein configuring the one or more MEMS components within the two or more cassettes comprises configuring MEMS diced parts, MEMS packaged parts, or MEMS processed parts within each of the two or more tray cassettes or tray carriers.

Assignees

• Mcube Inc

Inventors

• Merrill Jr Raymond
• Jensen Dave Paul
• Liu yuan-chun

Classifications

• B81C99/0035

  Testing · CPC title

• B81C99/004 Primary

  during manufacturing · CPC title

• B81C99/005

  Test apparatus · CPC title