Control systems employing deflection sensors to control clamping forces applied by electrostatic chucks, and related methods

Patent metadata

Field	Value
Publication number	US-9558981-B2
Application number	US-201414158112-A
Country	US
Kind code	B2
Filing date	Jan 17, 2014
Priority date	Nov 19, 2013
Publication date	Jan 31, 2017
Grant date	Jan 31, 2017

Abstract

A control system that includes deflection sensors which can control clamping forces applied by electrostatic chucks, and related methods are disclosed. By using a sensor to determine a deflection of a workpiece supported by an electrostatic chuck, a control system may use the deflection measured to control a clamping force applied to the workpiece by the electrostatic chuck. The control system applies a clamping voltage to the electrostatic chuck so that the clamping force reaches and maintains a target clamping force. In this manner, the clamping force may secure the workpiece to the electrostatic chuck to enable manufacturing operations to be performed while preventing workpiece damage resulting from unnecessary higher values of the clamping force.

First claim

What is claimed is:

1. A control system, comprising:
an electrostatic chuck;
a sensor positioned to determine a deflection of a workpiece into at least one recess of the electrostatic chuck as the electrostatic chuck applies a clamping force to the workpiece, wherein the sensor comprises an end portion of an optical fiber that is configured to emit a radiation from within the at least one recess; and
a controller programmed to determine from the deflection the clamping force applied to the workpiece by the electrostatic chuck, and to adjust a clamping voltage at the electrostatic chuck so that the clamping force reaches and maintains a target clamping force.

2. The control system of claim 1 , wherein the sensor comprises an interferometric displacement sensor.

3. The control system of claim 1 , wherein the electrostatic chuck comprises a material comprising at least one of aluminum oxide or aluminum nitride.

4. The control system of claim 1 , wherein the at least one recess of the electrostatic chuck is formed by adjacent mesas of a plurality of mesas of the electrostatic chuck, and the plurality of mesas are configured to support the workpiece.

5. The control system of claim 1 , wherein the sensor is configured to emit a radiation to a surface of the workpiece and to measure the radiation reflected to determine the deflection.

6. The control system of claim 5 , wherein the optical fiber is positioned to receive a portion of the radiation which is reflected from the surface of the workpiece to determine the deflection of the workpiece.

7. A plasma chamber, including a control system, comprising:
an electrostatic chuck;
a sensor positioned to determine a deflection of a workpiece into at least one recess of the electrostatic chuck as the electrostatic chuck applies a clamping force to the workpiece, wherein the sensor comprises an end portion of an optical fiber that is configured to emit a radiation from within the at least one recess; and
a controller programmed to adjust a clamping voltage based on the deflection.

8. The plasma chamber of claim 7 , wherein the sensor comprises an interferometric displacement sensor.

9. The control system of claim 7 , wherein the controller comprises a proportional-integral-derivative (PID) controller.

10. The control system of claim 9 , wherein the PID controller determines a clamping voltage correction.

11. The control system of claim 10 , wherein the controller applies a clamping voltage to the electrostatic clamp, wherein the clamping voltage is the sum of the clamping voltage correction and a clamping voltage setpoint.

12. The control system of claim 10 , wherein the PID controller receives a clamping force error, wherein the clamping force error is a difference between the clamping force and a clamping force setpoint.

13. A method for controlling a clamping force of an electrostatic chuck, comprising:
determining with a sensor a deflection of a workpiece into at least one recess of an electrostatic chuck, wherein the sensor comprises an end portion of an optical fiber that is configured to emit a radiation from within the at least one recess;
determining with a controller a measured clamping force applied to the workpiece by the electrostatic chuck; and
applying with the controller a clamping voltage to the electrostatic chuck so that the clamping force reaches and maintains a target clamping force.

14. The method of claim 13 , wherein the determining with the sensor comprises emitting a radiation to a surface of the workpiece and measuring a portion of the radiation which is reflected.

15. The method of claim 13 , wherein the sensor comprises an interferometric displacement sensor.

Assignees

• Applied Materials Inc

Inventors

• Boyd Jr Wendell
• Parkhe Vijay D
• Busche Matthew
• Makhratchev Konstantin
• Ono Masanori
• Thach Senh

Classifications

• H10P72/0616

  Monitoring of warpages, curvatures, damages, defects or the like · CPC title

• H10P72/722 Primary

  Details of electrostatic chucks · CPC title

• H01L21/67288

  Electricity · mapped topic

• H01L21/6833 Primary

  Electricity · mapped topic