Solder bump forming method and apparatus

Patent metadata

Field	Value
Publication number	US-9511438-B2
Application number	US-201214352507-A
Country	US
Kind code	B2
Filing date	Oct 18, 2012
Priority date	Oct 18, 2011
Publication date	Dec 6, 2016
Grant date	Dec 6, 2016

Abstract

Provided is a solder bump forming method that enables micro-solder bumps to be formed without the possibility of occurrence of a bridge due to excess molten solder. An injection head 11 for supplying molten solder has a nozzle 16 brought into contact with a mask with openings that is disposed over a substrate 8 . After completing a supply operation, the injection head 11 is forcedly cooled by heat transfer from a cooling unit 13 through a heater unit 12 whose operation has been stopped. Molten solder 15 in the cooled injection head 11 does not drool from the nozzle 16 when the injection head 11 moves up.

First claim

The invention claimed is:

1. A solder bump forming apparatus comprising:
a work stage arranged to carry an electronic component having a mask disposed over an upper surface of the electronic component with a mask opening positioned where the bump is to be formed directly on the electronic component;
a first heater unit positioned to be in direct or indirect heating contact with a lower surface of the electronic component when the work stage is in a mask opening filling index position and the electronic component is supported by the work stage;
a molten solder injection head movably supported at the mask opening filling position to move horizontally while maintaining a nozzle of the injection head in contact with an upper surface of the mask and the molten solder injection head being arranged to supply molten solder through the nozzle to deliver a predetermined amount of molten solder directly onto the electronic component at the mask opening when the work stage is in the mask opening filling index position and the electronic component is supported by the work stage; and
a first cooling unit movably supported at the mask opening filling position to move between a non-contacting position and a contacting position in which the first cooling unit selectively contacts a lower surface of the first heater unit, wherein the first cooling unit is arranged to forcedly cool, through the first heater unit, each of (1) the electronic component supplied with the molten solder, (2) the mask, (3) the molten solder in the mask opening, and (4) the nozzle holding molten solder when the first cooling unit contacts the lower surface of the first heater unit after the operation of the first heater unit has been stopped.

2. The solder bump forming apparatus of claim 1 , further comprising a second heater unit positioned at a preheating index position to be in direct or indirect contact with the lower surface of the electronic component when the work stage is in the preheating index position and the electronic component is supported by the work stage; and
a second cooling unit positioned at a post-filling index position to be in direct or indirect contact with the lower surface of the electronic component when the work stage is in the post-filling index position and the electronic component is supported by the work stage.

3. The solder bump forming apparatus of claim 2 , further comprising a work stage moving device, wherein
the work stage includes first to fourth work stages supported by the work stage moving device, the first to fourth work stages being spaced from each other at an angle of 90 degrees around an axis of rotation of the work stage moving device, and
the work stage moving device is arranged to intermittently rotate the first to fourth work stages so that the first to fourth work stages take fixed first to fourth index positions, respectively, in sequential rotation, wherein the fixed first to fourth index positions correspond to a work stage loading index position, the preheating index position, the mask opening filling position, and the post-filling index position, respectively.

4. The solder bump forming apparatus of claim 3 , further comprising a supply stage for loading and unloading the component between the supply stage and the work stage positioned at the work stage loading index position.

Assignees

• Senju Metal Industry Co

Inventors

• Sato Issaku
• Takaguchi Akira
• Sato Isamu
• Nauchi Takashi

Classifications

• H10W72/0112

  Apparatus for manufacturing bump connectors · CPC title

• H10W72/01265

  Thermally treating (reflowing H10W72/01257) · CPC title

• H10W72/01223

  in liquid form, e.g. by dispensing droplets or by screen printing · CPC title

• H10W72/011 Primary

  Apparatus therefor · CPC title

• B23K1/20 Primary

  Preliminary treatment of work or areas to be soldered, e.g. in respect of a galvanic coating · CPC title