Purification processing apparatus, substrate processing system, and processing method

Patent metadata

Field	Value
Publication number	US-2023111710-A1
Application number	US-202217960746-A
Country	US
Kind code	A1
Filing date	Oct 5, 2022
Priority date	Oct 7, 2021
Publication date	Apr 13, 2023
Grant date	—

Abstract

A purification processing apparatus for supplying purified isopropyl alcohol to a substrate processing apparatus. The purification processing apparatus includes: a processing chamber in which unpurified isopropyl alcohol and ionic liquid are mixed, and the isopropyl alcohol and the ionic liquid are separated to purify the isopropyl alcohol; an unpurified solvent supply port configured to supply the unpurified isopropyl alcohol to the processing chamber; an ionic liquid supply port configured to supply the ionic liquid to the processing chamber; and a purified solvent outlet configured to supply the purified isopropyl alcohol from the processing chamber to the substrate processing apparatus.

First claim

1 . A purification processing apparatus for supplying purified isopropyl alcohol to a substrate processing apparatus, comprising:
a processing chamber in which unpurified isopropyl alcohol and ionic liquid are mixed, and the isopropyl alcohol and the ionic liquid are separated to purify the isopropyl alcohol; an unpurified solvent supply port configured to supply the unpurified isopropyl alcohol to the processing chamber; an ionic liquid supply port configured to supply the ionic liquid to the processing chamber; and a purified solvent outlet configured to supply the purified isopropyl alcohol from the processing chamber to the substrate processing apparatus.

2 . The purification processing apparatus of claim 1 , further comprising:
a waste liquid outlet configured to discharge the ionic liquid from the processing chamber.

3 . The purification processing apparatus of claim 1 , further comprising:
a stirring mechanism configured to stir the isopropyl alcohol and the ionic liquid in the processing chamber.

4 . The purification processing apparatus of claim 1 , further comprising:
a temperature control device configured to control temperatures of the isopropyl alcohol and the ionic liquid.

5 . The purification processing apparatus of claim 4 , wherein the temperature control device controls the temperatures of the unpurified isopropyl alcohol and the ionic liquid supplied to the processing chamber.

6 . The purification processing apparatus of claim 5 , wherein the temperature control device controls the temperatures of the isopropyl alcohol and the ionic liquid in the processing chamber.

7 . The purification processing apparatus of claim 1 , wherein the unpurified solvent supply port supplies the unpurified isopropyl alcohol from a tank containing isopropyl alcohol.

8 . The purification processing apparatus of claim 1 , wherein the unpurified solvent supply port supplies the isopropyl alcohol collected from the substrate processing apparatus.

9 . The purification processing apparatus of claim 1 , wherein the ionic liquid has a higher specific gravity than the isopropyl alcohol.

10 . The purification processing apparatus of claim 1 , wherein the ionic liquid is any one of DEME-BF4, AEIm-BF4, AMIm-BF4, and EMIm-BF4.

11 . A substrate processing system comprising:
a substrate processing apparatus; and a purification processing apparatus for supplying purified isopropyl alcohol to a substrate processing apparatus, comprising:
a processing chamber in which unpurified isopropyl alcohol and ionic liquid are mixed, and the isopropyl alcohol and the ionic liquid are separated to purify the isopropyl alcohol,
an unpurified solvent supply port configured to supply the unpurified isopropyl alcohol to the processing chamber,
an ionic liquid supply port configured to supply the ionic liquid to the processing chamber, and
a purified solvent outlet configured to supply the purified isopropyl alcohol from the processing chamber to the substrate processing apparatus.

12 . A processing method comprising:
mixing isopropyl alcohol containing metals and ionic liquid; separating the isopropyl alcohol and the ionic liquid; supplying the separated isopropyl alcohol to another apparatus.

13 . The processing method of claim 12 , wherein said separating the isopropyl alcohol and the ionic liquid includes:
cooling the mixed isopropyl alcohol and ionic liquid and allowing the mixed isopropyl alcohol and ionic liquid to stand still.

Assignees

• Tokyo Electron Ltd

Inventors

• Inoue Takeya
• Sekiguchi Kenji
• Iwashita Mitsuaki
• Ueda Hirokazu
• Akiyama Koji
• Asako Ryuichi

Classifications

• H10P72/0411

  for wet cleaning or washing · CPC title

• B01D17/00

  Separation of liquids, not provided for elsewhere, e.g. by thermal diffusion (devices for separating or removing fatty or oily substances or similar floating material from water, waste water, or sewage C02F1/40; cleaning or keeping clear the surface of open water from oil or like materials E02B15/04; arrangements for separating lubricants from refrigerants F25B43/02) · CPC title

• C07B63/00

  Purification; Separation (separation of optically-active compounds C07B57/00); Stabilisation; Use of additives · CPC title

• B01D17/0208

  by sedimentation · CPC title

• B01D11/0492

  Applications, solvents used · CPC title