Purification processing apparatus, substrate processing system, and processing method
US-2023111710-A1 · Apr 13, 2023 · US
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Inoue Takeya patents
Inoue Takeya is listed as an inventor on 1 patent in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Inoue Takeya |
| Total patents | 1 |
| First publication | Apr 13, 2023 |
| Latest publication | Apr 13, 2023 |
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Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Tokyo Electron Ltd | 1 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| H10P72/0411 | 1 |
| B01D17/00 | 1 |
| C07B63/00 | 1 |
| B01D17/0208 | 1 |
| B01D11/0492 | 1 |