Automated test equipment for testing high-power electronic components

Patent metadata

Field	Value
Publication number	US-2020379043-A1
Application number	US-201916429668-A
Country	US
Kind code	A1
Filing date	Jun 3, 2019
Priority date	Jun 3, 2019
Publication date	Dec 3, 2020
Grant date	—

Abstract

Aspects of the present application are directed to an automated test equipment (ATE) and methods for operating the same for testing high-power electronic components. The inventor has recognized and appreciated an ATE that provides both high-power alternating-current (AC) and direct-current (DC) testing in a single test system can lead to high throughput testing for high-power components with reduced system hardware complexity and cost. Aspects of the present application provide a synchronized inductor switch module and both a high-precision digitizer and a high-speed digitizer for capturing DC and AC characteristics of a high-power transistor.

First claim

What is claimed is:

1 . A method for operating an automated testing equipment (ATE) to test an insulated-gate bipolar transistor (IGBT) in a device under test (DUT), the method comprising:
turning on the IGBT; driving a current from an energy source unit (ESU) through the IGBT via an inductor; measuring a plurality of current waveforms through and voltage waveforms across the IGBT; processing the plurality of measured current waveforms and voltage waveforms to obtain at least one alternating-current (AC) characteristic and at least one direct-current (DC) characteristic of the IGBT.

2 . The method of claim 1 , wherein the at least one DC characteristic is a collector to emitter voltage at saturation (V CE ) or a forward voltage (V FRD ) of an internal diode of the IGBT, and wherein
processing the plurality of measured current waveforms and voltage waveforms to obtain the at least one DC characteristic comprises processing at least one voltage waveform measured during an on-state of the IGBT.

3 . The method of claim 2 , wherein the at least one AC characteristic is a switching energy of the IGBT, and wherein
processing the plurality of measured current waveforms and voltage waveforms to obtain the at least one AC characteristic comprises processing at least one voltage waveform measured across an on-off transition of the IGBT.

4 . The method of claim 3 , further comprising:
with a first digitizer of the ATE, measuring the at least one voltage waveform measured during an on-state of the IGBT; with a second digitizer of the ATE, measuring the at least one voltage waveform across an on-off transition of the IGBT, wherein the second digitizer has a lower voltage resolution than the first voltage digitizer.

5 . The method of claim 4 , further comprising:
with a first digitizer of the ATE, measuring the at least one voltage waveform measured during an on-state of the IGBT; with a second digitizer of the ATE, measuring the at least one voltage waveform across an on-off transition of the IGBT, wherein the second digitizer has a lower voltage resolution than the first voltage digitizer.

6 . The method of claim 5 , further comprising:
generating, with a controller, a plurality of synchronized control signals that are synchronized with a timing pattern; controlling switching of the IGBT and sampling of the first digitizer and the second digitizer based at least in part on the plurality of synchronized control signals.

7 . An automated test equipment (ATE) for testing a device under test (DUT), comprising:
an energy source unit (ESU) comprising an ESU output; a switch module configured to couple a transistor in the DUT to the ESU output via an inductor; a first digitizer configured to measure a voltage of the transistor; a second digitizer configured to measure the voltage of the transistor with a lower voltage resolution than the first digitizer; and a third digitizer configured to measure a current of the transistor.

8 . The ATE of claim 7 , wherein the ATE is configured to sample the first digitizer and operate one or more switches in the switch module based on a plurality of synchronized control signals.

9 . The ATE of claim 8 , wherein the ATE is configured to cycle the transistor on and off based on the plurality of synchronized control signals, and wherein the ATE is configured to sample the first digitizer during a period when the transistor is turned on.

10 . The ATE of claim 9 , wherein the transistor is an insulated-gate bipolar transistor (IGBT).

11 . The ATE of claim 10 , wherein the first digitizer is configured to measure one or more characteristics of the transistor when the transistor is turned on, wherein the one or more characteristics comprises a collector to emitter voltage at saturation (V CE ), a forward voltage (V FRD ), or combinations thereof.

12 . The ATE of claim 11 , wherein the one or more characteristics comprises a V CE or a V FRD measured when the current of the transistor is at least 3000 A.

13 . The ATE of claim 12 , wherein the transistor is a first IGBT, and the inductor in the switch module has a first inductor terminal configured to be coupled to the first IGBT, and wherein the switch module is further configured to couple a second IGBT between the first inductor terminal and the ESU output.

14 . The ATE of claim 13 , wherein the ATE further comprises:
a fourth digitizer configured to measure a voltage of the second IGBT; a fifth digitizer configured to measure the voltage of the second IGBT with a lower voltage resolution than the fifth digitizer; a sixth digitizer configured to measure a current of the second IGBT, wherein the ATE is configured to sample the fourth digitizer based on the plurality of synchronized control signals.

15 . The ATE of claim 13 , wherein a first switch of the one or more switches in the switch module is in parallel with the inductor, the first switch configured to be operated based on a synchronized control signal of the plurality of synchronized control signals.

16 . The ATE of claim 15 , wherein a second inductor terminal of the inductor is coupled to the ESU output via a second switch of the one or more switches, the second switch configured to be operated based on a synchronized control signal of the plurality of synchronized control signals.

17 . The ATE of claim 16 , wherein the second inductor terminal of the inductor is coupled to a reference voltage via a third switch of the one or more switches, the third switch configured to be operated based on a synchronized control signal of the plurality of synchronized control signals.

18 . The ATE of claim 17 , wherein the switch module is configured to couple the transistor in the DUT between the first inductor terminal of the inductor and the reference voltage.

19 . The ATE of claim 7 , further comprising a controller configured to provide the plurality of synchronized control signals to the second voltage meter and the one or more switches in the switch module, wherein the plurality of synchronized control signal are synchronized with a common timing pattern.

20 . A method for operating an automated testing equipment (ATE) to test a first insulated-gate bipolar transistor (IGBT) in a device under test (DUT), the method comprising:
turning on the first IGBT to cause a first current to flow from an energy source unit (ESU) output towards a reference voltage via a first circuit path, the first circuit path comprising an inductor, a first switch coupled between the inductor and the ESU output, and the first IGBT; measuring, with a first digitizer, a first characteristic of the first IGBT; measuring, with a second digitizer having a lower voltage resolution than the first voltage digitizer, a second characteristic of the first IGBT.

21 . The method of claim 20 , wherein the first characteristic is a collector to emitter voltage at saturation (V CE ) or a forward voltage (V FRD ), and wherein measuring the first characteristic is performed during an on-state of the first IGBT when the first current is flowing through the first IGBT.

22 . The method of claim 21 , wherein the first current is at least 3000 A.

23 . The method of claim 20 , further comprising:
subsequent to turning on the first IGBT, turning off the first IGBT to cause a second current to flow from the ESU output via a second circuit path, the second circuit path comprising the first switch, the inductor and a s

Assignees

• Teradyne Inc

Inventors

• Weimer Jack E

Classifications

• G01R31/31922

  Timing generation or clock distribution (G01R31/3191 takes precedence) · CPC title

• G01R31/2617

  for measuring switching properties thereof · CPC title

• G01R31/31727

  Clock circuits aspects, e.g. test clock circuit details, timing aspects for signal generation, circuits for testing clocks (G01R31/31725 takes precedence; concerning scan test G01R31/318552, for tester hardware G01R31/31922) · CPC title

• G01R31/318307

  computer-aided, e.g. automatic test program generator [ATPG], program translations, test program debugging · CPC title

• G01R31/3167

  Testing of combined analog and digital circuits {(testing ADC's H03M1/1071)} · CPC title