Vacuum-integrated hardmask processes and apparatus
US-10831096-B2 · Nov 10, 2020 · US
US2016186324A1 · US · A1
| Field | Value |
|---|---|
| Publication number | US-2016186324-A1 |
| Application number | US-201514973804-A |
| Country | US |
| Kind code | A1 |
| Filing date | Dec 18, 2015 |
| Priority date | Dec 25, 2014 |
| Publication date | Jun 30, 2016 |
| Grant date | — |
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There is provided with a method of manufacturing a resin article. A surface of a resin article is modified such that a plating layer can be deposited. In the modification, ultraviolet light is irradiated on the resin article, and shock is applied to the resin article after the ultraviolet light is irradiated.
Opening claim text (preview).
What is claimed is: 1 . A method of manufacturing a resin article, comprising: modifying a surface of a resin article such that a plating layer can be deposited, the modifying comprises: irradiating ultraviolet light on the resin article, and applying shock to the resin article after the ultraviolet light is irradiated. 2 . The method according to claim 1 , wherein in applying the shock, a pressure wave is applied to the resin article. 3 . The method according to claim 2 , wherein the pressure wave is an ultrasonic wave. 4 . The method according to claim 1 , wherein in applying the shock, an air bubble is applied to the resin article. 5 . The method according to claim 4 , wherein the air bubble is a microbubble. 6 . The method according to claim 2 , wherein the shock is applied in an alkaline solution. 7 . The method according to claim 2 , wherein the shock is applied in a solution containing a surfactant. 8 . The method according to claim 1 , wherein in applying the shock, a shock applying member is put in contact with the resin article. 9 . The method according to claim 1 , wherein in the irradiating, the ultraviolet light is irradiated in an atmosphere that contains at least one of oxygen or ozone. 10 . The method according to claim 1 , wherein a primary wavelength of the ultraviolet light is 243 nm or less. 11 . The method according to claim 1 , wherein in the irradiating, ultraviolet light is irradiated on a portion of the surface of the resin article such that a plating layer can be selectively deposited in the portion of the surface of the resin article. 12 . The method according to claim 1 , wherein the irradiating includes irradiating an ultraviolet light laser beam on a portion of the surface of the resin article, and irradiating ultraviolet light from an ultraviolet light lamp or an ultraviolet light LED on a region that includes the portion of the surface of the resin article, such that a plating layer can be selectively deposited in the portion of the surface of the resin article. 13 . The method according to claim 1 , further comprising: performing electroless plating on the resin article that has been modified. 14 . A resin article comprising: a resin article; and a plating layer, wherein the plating layer is manufactured according to a method comprising: irradiating ultraviolet light on the resin article; applying shock to the resin article after the ultraviolet light is irradiated; and performing electroless plating on the resin article to which the shock has been applied. 15 . A resin article, comprising: a resin article having a modified portion that was modified by irradiating ultraviolet light and applying a shock; and a plating layer that was formed on the modified portion.
Radiation, e.g. UV, laser · CPC title
Organic substrates, e.g. resin, plastic · CPC title
Using ultrasound, e.g. for cleaning, soldering or wet treatment · CPC title
Radiation, e.g. UV, laser · CPC title
with use of organic or inorganic compounds other than metals, first · CPC title
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