Semiconductor device

US12453073B2 · US · B2

Patent metadata
FieldValue
Publication numberUS-12453073-B2
Application numberUS-202017616441-A
CountryUS
Kind codeB2
Filing dateMay 25, 2020
Priority dateJun 7, 2019
Publication dateOct 21, 2025
Grant dateOct 21, 2025

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  1. Title

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  2. Abstract

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  3. Assignees and inventors

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  4. Key dates

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  5. First independent claim

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  6. CPC / IPC classifications

    Technology tags used to group this patent with similar filings.

  7. Citations and related patents

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Abstract

Official abstract text for this publication.

A small-size semiconductor device is provided. The semiconductor device includes a first layer, a second layer, and a third layer formed over a substrate. A first transistor included in the first layer includes a first semiconductor layer containing Si. A second transistor included in the second layer includes a second semiconductor layer containing Ga. A third transistor included in the third layer includes a third semiconductor layer containing at least one of In and Zn. The first semiconductor layer of the first transistor is formed using the substrate. The second semiconductor layer of the second transistor is formed using a crystal obtained by crystal growth over the substrate. The third semiconductor layer of the third transistor is formed above the first semiconductor layer and the second semiconductor layer.

First claim

Opening claim text (preview).

The invention claimed is: 1. A semiconductor device comprising: a first layer, a second layer, and a third layer over a substrate, wherein a first transistor included in the first layer comprises a first semiconductor layer comprising Si, wherein a second transistor included in the second layer comprises a second semiconductor layer comprising Ga, wherein a third transistor included in the third layer comprises a third semiconductor layer comprising at least one of In and Zn, wherein the first semiconductor layer of the first transistor is formed using the substrate, wherein the second semiconductor layer of the second transistor is formed using a crystal obtained by crystal growth over the substrate, and wherein the third semiconductor layer of the third transistor is over the first semiconductor layer and the second semiconductor layer. 2. The semiconductor device according to claim 1 , wherein the third transistor comprises a region overlapping with the first transistor. 3. The semiconductor device according to claim 1 , wherein the third transistor comprises a region overlapping with the second transistor. 4. The semiconductor device according to claim 1 , further comprising a fourth layer, wherein a fourth transistor included in the fourth layer comprises at least one of In and Zn in a fourth semiconductor layer, and wherein the fourth transistor comprises a region overlapping with the third transistor. 5. The semiconductor device according to claim 1 , wherein a sensor module is placed on a side opposite to a side where the first transistor in the first layer is formed. 6. A semiconductor device comprising: a first layer, a second layer, and a third layer over a substrate, wherein a first transistor included in the first layer comprises a first semiconductor layer comprising Si, wherein a second transistor included in the second layer comprises a second semiconductor layer comprising Ga, wherein a third transistor included in the third layer comprises a third semiconductor layer comprising at least one of In and Zn, wherein the first semiconductor layer of the first transistor is formed using the substrate, wherein the second semiconductor layer of the second transistor is formed using a crystal obtained by crystal growth over the substrate, wherein the second transistor has a recessed gate structure, and wherein the third semiconductor layer of the third transistor is over the first semiconductor layer and the second semiconductor layer. 7. The semiconductor device according to claim 6 , wherein the third transistor comprises a region overlapping with the first transistor. 8. The semiconductor device according to claim 6 , wherein the third transistor comprises a region overlapping with the second transistor. 9. The semiconductor device according to claim 6 , further comprising a fourth layer, wherein a fourth transistor included in the fourth layer comprises at least one of In and Zn in a fourth semiconductor layer, and wherein the fourth transistor comprises a region overlapping with the third transistor. 10. The semiconductor device according to claim 6 , wherein a sensor module is placed on a side opposite to a side where the first transistor in the first layer is formed. 11. A semiconductor device comprising: a first layer, a second layer, and a third layer over a substrate, wherein a first transistor included in the first layer comprises a first semiconductor layer comprising Si, wherein a second transistor included in the second layer comprises a second semiconductor layer comprising oxygen, wherein a third transistor included in the third layer comprises a third semiconductor layer comprising at least one of In and Zn, wherein the first semiconductor layer of the first transistor is formed using the substrate, wherein the second semiconductor layer of the second transistor is formed using a crystal obtained by crystal growth over the substrate, wherein the second transistor does not overlap with the first transistor, and wherein the third semiconductor layer of the third transistor is over the first semiconductor layer and the second semiconductor layer. 12. The semiconductor device according to claim 11 , wherein the third transistor comprises a region overlapping with the first transistor. 13. The semiconductor device according to claim 11 , wherein the third transistor comprises a region overlapping with the second transistor. 14. The semiconductor device according to claim 11 , further comprising a fourth layer, wherein a fourth transistor included in the fourth layer comprises at least one of In and Zn in a fourth semiconductor layer, and wherein the fourth transistor comprises a region overlapping with the third transistor. 15. The semiconductor device according to claim 11 , wherein a sensor module is placed on a side opposite to a side where the first transistor in the first layer is formed.

Assignees

Inventors

Classifications

  • Integrated devices comprising both bulk components and either SOI or SOS components on the same substrate · CPC title

  • integrated with passive devices, e.g. auxiliary capacitors · CPC title

  • Interconnections, e.g. scanning lines · CPC title

  • comprising semiconductor materials not belonging to the Group IV, e.g. InGaZnO · CPC title

  • wherein the TFTs are in active matrices · CPC title

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What does patent US12453073B2 cover?
A small-size semiconductor device is provided. The semiconductor device includes a first layer, a second layer, and a third layer formed over a substrate. A first transistor included in the first layer includes a first semiconductor layer containing Si. A second transistor included in the second layer includes a second semiconductor layer containing Ga. A third transistor included in the third …
Who is the assignee on this patent?
Semiconductor Energy Lab
What technology area does this patent fall under?
Primary CPC classification H10D30/6755. Mapped technology areas include Electricity.
When was this patent published?
Publication date Tue Oct 21 2025 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
What related patents are in patentsdb?
We list 12 related publications on this page (citations in our corpus or others sharing the same primary CPC).