Coaxial lift device with dynamic leveling

Patent metadata

Field	Value
Publication number	US-2020105573-A1
Application number	US-201916565287-A
Country	US
Kind code	A1
Filing date	Sep 9, 2019
Priority date	Sep 28, 2018
Publication date	Apr 2, 2020
Grant date	—

Abstract

Embodiments described herein generally relate to process chambers with coaxial lift devices. In some embodiments, the device comprises both a bottom bowl lift and a pedestal lift. The bottom bowl lift supports a bottom bowl and is configured to move the bottom bowl into a position that reduces the process volume. The bottom bowl lift is co-axial with the pedestal lift and the bottom bowl lift and the pedestal lift are attached for vacuum operation. The pedestal lift includes multiple actuators to create a dynamic lift mechanism. Both systems complete a nested system such that the bottom bowl lift is adjustable and can close the bottom bowl creating a symmetric and small process volume. The pedestal lift can move independently to its process position and tilt in a desired direction without interference with the bottom bowl lift, increasing film uniformity on a processed substrate.

First claim

We claim:

1 . A lift assembly, comprising:
a pedestal having a substrate supporting surface and a sidewall that defines an outer dimension of the pedestal; a bottom bowl lift comprising: a bottom bowl comprising a wall having an inner dimension that is larger than the outer dimension of the pedestal; a bottom bowl carrier that is configured to support the bottom bowl; a bottom bowl actuator assembly configured to cause the bottom bowl carrier to translate in the first direction; and a pedestal lift comprising:
a pedestal carrier coupled to the pedestal; and
a plurality of actuators, wherein each of the plurality of actuators is coupled to a separate portion of the pedestal carrier, and the plurality of actuators are configured to cause relative linear and angular motion between the pedestal and the bottom bowl when one or more of the plurality of actuators causes at least a portion of the pedestal carrier to translate in the first direction.

2 . The lift assembly of claim 1 , wherein the bottom bowl carrier and the pedestal carrier are attached together via a bellows, the bellows forming a seal between the bottom bowl lift and the pedestal lift.

3 . The lift assembly of claim 1 , wherein the bottom bowl actuator assembly further comprises one or more guides and a bottom bowl actuator, wherein the one or more guides are coupled to a backbone structure and the bottom bowl carrier, and the one or more guides are configured to allow relative linear motion between the backbone structure and the bottom carrier in a first direction when the bottom bowl actuator causes the bottom bowl carrier to translate in the first direction.

4 . The lift assembly of claim 1 , further comprising spherical joint assemblies, wherein each of the spherical joint assemblies couple one of the plurality of actuators to the pedestal carrier.

5 . The lift assembly of claim 4 , wherein the spherical joint assemblies allow three degrees of freedom (pitch, yaw, and roll) about an attachment point.

6 . The lift assembly of claim 1 , further comprising flexure hinges with a first end and a second end, wherein each of the flexure hinges are attached to a base assembly at the first end and are attached to one of the plurality of actuators at the second end.

7 . The lift assembly of claim 1 , further comprising a cooling hub attached to the bottom bowl carrier and the pedestal carrier.

8 . The lift assembly of claim 1 , wherein the plurality of actuators comprise three actuators.

9 . A method for a lift system, comprising:
lowering a bottom bowl lift to an exchange position such that a bottom bowl is in a lowered position proximate a bottom surface of a process chamber, wherein the bottom bowl comprises a wall that has an inner surface that defines inner volume; raising the bottom bowl lift to a process position that is a distance from the bottom surface of the process chamber; orienting the top surface of a pedestal in a first orientation relative to an output surface of a showerhead, wherein
the first orientation of the top surface of the pedestal relative to the output surface of the showerhead is not coplanar; and
the pedestal is positionable within an inner volume of the bottom bowl; and
depositing a first layer of material on a substrate disposed on the top surface of the pedestal while the top surface of the pedestal is oriented in the first orientation, and the bottom bowl lift is in the process position.

10 . The method of claim 9 , wherein the lift system comprises a bottom bowl carrier and pedestal carrier, wherein the bottom bowl carrier is coupled to the bottom bowl and the pedestal carrier is coupled to the pedestal.

11 . The method of claim 9 , wherein the lift system comprises a plurality of actuators configured to cause relative linear and angular motion between the pedestal and the bottom bowl.

12 . A lift system, comprising:
a pedestal having a substrate supporting surface and a sidewall that defines an outer dimension of the pedestal; a bottom bowl lift comprising:
a bottom bowl comprising a wall having an inner dimension that is larger than the outer dimension of the pedestal;
a bottom bowl carrier that is configured to support the bottom bowl;
a bottom bowl actuator assembly configured to move the bottom bowl carrier between an exchange position such that bottom bowl is in a lowered position proximate a bottom of a process chamber and a process position such that the bottom bowl is in a raised position relative the bottom of the process chamber; and
a pedestal lift comprising:
a pedestal carrier that is configured to support the pedestal, wherein the pedestal is positonable within an inner volume of the bottom bowl; and
a plurality of actuators, wherein each of the plurality of actuators is coupled to a separate portion of the pedestal carrier, and the plurality of actuators are configured to raise the pedestal proximate an output surface of a showerhead and orient a top surface of the pedestal in a first orientation relative to the output surface of the showerhead, wherein the first orientation of the top surface of the pedestal relative to the output surface of the showerhead is not coplanar.

13 . The lift system of claim 12 , wherein a lower end of the bottom bowl further comprises a bellows having a first end and a second end, the first end of the bellows coupled to the wall and the second end of the bellows sealed to a portion of the bottom of the process chamber.

14 . The lift system of claim 12 , wherein the bottom bowl actuator and each of the plurality of actuators are linear ball screw actuators.

15 . The lift system of claim 14 , wherein each of the linear ball screw actuators are driven by a servo motor.

16 . The lift system of claim 12 , further comprising spherical joint assemblies, wherein each of the spherical joint assemblies couple one of the plurality of actuators to the pedestal carrier.

17 . The lift system of claim 16 , wherein the spherical joint assemblies allow three degrees of freedom (pitch, yaw, and roll) about an attachment point.

18 . The lift system of claim 12 , further comprising flexure hinges with a first end and a second end, wherein each of the flexure hinges are attached to a base assembly at the first end and are attached to one of the plurality of actuators at the second end.

19 . The lift system of claim 12 , further comprising a cooling hub attached to the bottom bowl carrier and the pedestal carrier.

20 . The lift system of claim 12 , wherein the plurality of actuators comprise three actuators.

Assignees

• Applied Materials Inc

Inventors

• Schaller Jason M
• Blahnik Jeffrey Charles
• Bansal Amit Kumar

Classifications

• H10P72/7618 Primary

  characterised by a movable susceptor, stage or support, others than those only rotating on their own vertical axis, e.g. susceptors on a rotating carrousel · CPC title

• H01J37/32715 Primary

  Workpiece holder · CPC title

• H01J2237/002

  Cooling arrangements · CPC title

• H01J2237/20235

  Z movement or adjustment · CPC title

• H01L21/68764 Primary

  Electricity · mapped topic